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VACUUM MEMORY HOLDING DEVICE
   
Document Number
US Patent 3558093
Issued Date
January 26, 1971
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Inventors
Bok; Hendrik F. (North Dartmouth, MA)
Map
Abstract
A vacuum memory holding device of the type used as a tray for rigidly supporting a plurality of waferlike objects in a spray-coating chamber. The device includes a top plate having a plurality of apertures as a support for each one of the wafers and a bottom vacuum chamber from which the vacuum is drawn. The vacuum chamber includes a resilient wall which is collapsed as the vacuum is drawn and serves to hold the vacuum independently and rigidly support the waferlike objects during the spray-coating operation without being connected to the vacuum-drawing source.
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Number of Claims:
9
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Owner
Epec Systems Corporation (New Bedford, MA)
Published
January 26, 1971
Application Number
04/847,526
Filed
July 29, 1969
US Classification
558/250  
Int'l Classification
USPTO Field of Search
248/362   248/363   248/206   269/21   51/235  
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Description
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