Method for transporting at least one vaporous substance through the wall (4) of a vacuum chamber and into the vacuum chamber and device for executing and utilizing the method. In the method, a vaporous substance is introduced from the outside through an interior pipe (1) of a double-walled pipe into the vacuum chamber, with electric current from a power supply (3) applied to the interior pipe (1) and exterior pipe (2) of the double-walled pipe.

In a closed discharge chamber wherein a discharge electrode supported on an electric insulating material and an opposite electrode are arranged to confront each other, a high electric potential applied between said electrodes causes corona discharge to occur in the gas between the two electrodes. A method for control of pure fluid elements, fluid servomechanisms, etc. is disclosed which is accomplished by utilizing a phenomenon that the pressure of the gas within the closed discharge chamber increases in consequence of the occurrence of corona discharge and the increased pressure falls with the subsequent extinction of corona discharge back to the level existing before said corona discharge.