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AIMING DEVICE FOR SEMICONDUCTOR BONDING APPARATUS
   
Document Number
US Patent 3661316
Issued Date
May 9, 1972
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Abstract
Apparatus for aiming a tool used to perform a mechanical operation on a semiconductor device, including a light pencil which directs a thin beam of light in the area where the tool is to be aimed. The position of the light beam indicates one of the positions of the moveable tool.
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AIMING DEVICE FOR SEMICONDUCTOR BONDING APPARATUS - US Patent 3661316 Drawing
Drawing from US Patent 3661316
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Number of Claims:
9
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Owner
Published
May 9, 1972
Application Number
05/027,955
Filed
April 13, 1970
US Classification
228/56.5   228/4.1 438/16
Int'l Classification
H01L   21/00   (20060101)  
Assistant Examiner
USPTO Field of Search
228/3   228/4   228/5   228/3.5   228/1   219/85   29/526   29/592   29/428   29/203   29/569   29/589   356/626   356/592   356/428   356/203   356/569   356/589   269/4   83/520   350/81  
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Description
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