A process in which a quaternary vinyl pyridine salt may be produced and then polymerized directly without the need for any isolation stage is disclosed. The process involves the replacement of the conventional non-aqueous solvent for the reaction by water; the vinyl pyridine and water are mixed, a quaternizing agent is added to the mixture and the mixture heated to form a solution of the quaternary vinyl pyridine salt. The solution so produced is then directly amenable to polymerization without the necessity for isolation and purification of the salt. 6 Claims, No Drawings
A negative working resist composition and medium for microlithographic recording comprises a vinyl polymer having aromatic quaternized nitrogen-containing pendant groups. The resist undergoes a transformation from high to low solubility in polar solvents such as water or low molecular weight alcohols upon exposure to electron beams, ultraviolet light, or X-rays. A method for patterning substrates by employing the resist composition is also disclosed.
