The specification discloses a workpiece feeding device for advancing workpieces step by step from an incoming station into a plurality of work stations and then to an outgoing station. The device has frame members reciprocable in the direction of movement of the workpieces and movably carried by the frame members are workpiece engaging elements arranged in opposed relation and movable toward each other to engage workpieces and away from each other to release workpieces. The feeding device is particularly adapted for use with a mechanical press and is arranged to be driven by the press crankshaft so as to operate in timed relation to the movement of the press slide.
Apparatus is provided for transferring articles from station to station in order that work operations can be performed on the articles at the various stations. The apparatus includes article grasping members which are mounted for lateral movement between open and closed positions and for reciprocal longitudinal movement. A rotary member interconnected with means upon which the article grasping members are mounted effects both the lateral and longitudinal movement by virtue of various connecting members including a contractible-extensible tie assembly.
A wafer transport system for use in in-line sputtering systems having a first magnet exterior to a process chamber and a second magnet in the process chamber connected to wafer support arms carrying wafers such that the magnetic coupling between the magnets permits the positioning of the wafer support arms in a desired location by movement of the exterior magnet.
