A magnetic filter for an ion source reduces the production of undesired ion species and improves the ion beam quality. High-energy ionizing electrons are confined by the magnetic filter to an ion source region, where the high-energy electrons ionize gas molecules. One embodiment of the magnetic filter uses permanent magnets oriented to establish a magnetic field transverse to the direction of travel of ions from the ion source region to the ion extraction region. In another embodiment, low energy 16 eV electrons are injected into the ion source to dissociate gas molecules and undesired ion species into desired ion species.

An electron beam is directed into a first region containing gaseous molecules which capture electrons from the beam and then dissociate to produce negative ions. The ions are accelerated to the desired energy electrostatically and drawn to a second region where they are exposed to an intra-cavity laser beam which traverses their path. The laser is chosen to have a wevelength which will cause photodetachment of electrons to form neutral atoms. Simultaneously with the above, the electron beam and ions are collimated with a magnetic field. The neutral atoms are separated from any remaining ions or electrons by a repelling electrical potential provided by a repeller plate or the like.

An electron beam is directed into a first region containing gaseous molecules which capture electrons from the beam and then dissociate to produce negative ions. The ions are accelerated to the desired energy electrostatically and drawn to a second region where they are exposed to an intra-cavity laser beam which traverses their path. The laser is chosen to have a wavelength which will cause photodetachment of electrons to form neutral atoms. Simultaneously with the above, the electron beam and ions are collimated with a magnetic field. The neutral atoms are separated from any remaining ions or electrons by a repelling electrical potential provided by a repeller plate or the like.