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CHEMICAL STRIPPERS AND METHOD OF USING
   
Document Number
US Patent 3787239
Issued Date
January 22, 1974
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Abstract
Strippers for removal of organic films and deposits, such as the polymeric etch resists employed in the manufacture of semiconductors from inorganic surfaces commonly encountered in the electrical and electronic industries, are composed of solutions of chromium trioxide in mixtures of strong nitric and sulfuric acids containing about 2 percent to about 20 percent water.
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Number of Claims:
9
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Owner
[*] Notice:The portion of the term of this patent subsequent to July 11, 1989 has been disclaimed.
Published
January 22, 1974
Application Number
05/270,125
Filed
July 10, 1972
US Classification
134/2   216/83 252/79.2 257/E21.255 430/329 510/108 510/175 510/176 510/202 510/238 510/508
Int'l Classification
H01B   19/00   (20060101)   H01B   19/04   (20060101)   H01L   21/02   (20060101)   H01L   21/311   (20060101)   C04B   41/91   (20060101)   C04B   41/53   (20060101)   G03F   7/42   (20060101)  
Examiner
Parent Case
This application is a continuation-in-part of application Ser. No. 75660 filed Sept. 25, 1970 now U.S. Pat. No. 3,676,219 which is in turn a continuation-in-part of application Ser. No. 866,036 filed Oct. 13, 1969 now abandoned.
USPTO Field of Search
252/142   252/146   252/79.2   134/3   134/2   96/36   96/36.2   156/13   117/34  
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Description
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