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Method of doping during epitaxy
   
Document Number
US Patent 3874952
Issued Date
April 1, 1975
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Inventors
Woodall; Jerry M. (White Plains, NY)
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Abstract
The converter obtains an efficient conversion of solar electromagnetic radiation into electrical power. A p-n junction is fabricated close to an optical surface of a region of n-type GaAs which is receptive of the solar radiation. There is a window on the optical surface consisting of a window layer of Ga.sub.1.sub.-x Al.sub.x As, where x is less than one and greater than zero with a composition to cause the window layer to contribute selectively to absorbing and transmitting certain components of the incoming solar radiation. The layer of Ga.sub.1.sub.- x Al.sub.x As is made nearly transparent to electromagnetic radiation and is nearly absorbent of the energetic particle radiation content of the received solar radiation. The window layer is an integral part of the procedure for forming the p-n junction. It contributes the p-type doping species to the junction by diffusion into the n-type GaAs substrate. For certain applications, the Ga.sub.1.sub.-x Al.sub.x As window can be removed by etching with aqueous solution of HCl. If the window is removed, the ohmic contact is then made to the optical surface of the p-type GaAs. Illustratively, another structure provided by this disclosure includes a window of GaP of p-type conductivity on the surface of a region of n-type InP with a p-type transition region of InP therebetween.
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Method of doping during epitaxy - US Patent 3874952 Drawing
Drawing from US Patent 3874952
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Number of Claims:
13
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Published
April 1, 1975
Application Number
05/267,880
Filed
June 30, 1972
US Classification
117/54   148/DIG.107 148/DIG.119 148/DIG.135 148/DIG.51 148/DIG.65 148/DIG.67 148/DIG.72 148/DIG.84 252/62.3GA 257/E21.117 438/925 438/94
Int'l Classification
H01L   21/02   (20060101)   H01L   21/208   (20060101)   H01L   31/00   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
This is a division, of application Ser. No. 837,755 filed June 30, 1969, now U.S. Pat. No. 3,675,026 issued July 4, 1972.
USPTO Field of Search
148/171   148/172   148/186   148/188   252/62.3GA  
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