Circuitry for controlling the power output of an R.F. generator for regulating the forward power transmitted into a load of varying impedance, such as an R.F. sputtering target, and for limiting reflected power to a safe predetermined level. Forward power is controlled by circuitry that compares the voltage across the target with a predetermined reference voltage and the amplified output is applied to the signal generator control circuitry. Reflected power is measured by a sensor that outputs a proportional D.C. signal that is compared with a predetermined threshold voltage. Whenever the reflected power signal exceeds this threshold, it removes the effect of the target voltage input signal so that the amplified control signal to the R.F. generator is a function only of the reflected power.

The detector circuit disclosed comprises a semiconductor diode bridge providing full wave output through an operational amplifier. The amplifier is enclosed within a feedback loop in which is interposed at least one diode matched to the detector diodes so as to enhance the linearity of operation of the detector-amplifier combination over a range of operating temperature and input signal levels.

A condition responsive element, disclosed as a negative temperature coefficient thermistor, operates in conjunction with a bridge circuit to provide a differential input to a special direct current amplifier system. The amplifier system utilizes a combination of positive feedback and negative feedback with the negative feedback always exceeding the level of the positive feedback under steady state operating conditions. The output of the amplifier means further is connected to the lowest energizing potential for the amplifier means through a network that includes a relatively fixed voltage dropping means so that changes in the negative feedback can be made to change the gain of the amplifier system with a minimum of offset or change in calibration of the condition responsive device.