A mechanism is provided for varying the distance between a detector and a measuring crystal in an X-ray spectrometer. The crystal is arranged on a rotatable shaft and the detector is arranged on an arm which can perform a circular movement about the crystal shaft. The crystal shaft and the detector arm are coupled so that a rotation of the crystal shaft through an angle .theta. is accompanied by a rotation of the detector arm through an angle 2.theta.. A first pulley having a radius r is mounted on the crystal shaft and a second disc having a radius 2r is rotatably mounted on the crystal shaft. A belt or cord is guided over each one of two guide rollers. One end of each of these belts is permanently connected to the first pulley, while its other end is permanently connected to the second pulley.
To provide an X-ray fluorescence spectrometer of a simplified structure of a type in which a sample can be transported to an irradiating position where the sample is irradiated with primary X-rays and analysis can be achieved by positioning a target area to be measured of the sample. When an r drive means 37 drives an r drive shaft 43, a transporting function of transporting the sample 3 and a positioning function of positioning the target area in an r direction are performed. Also, a.theta. drive shaft 53 of a .theta. drive means 38 for performing the positioning function for positioning the target area in a .theta. direction and the r drive shaft 43 of the r drive means 37 form a dual coaxial shaft assembly.
A Dual Channel Spectrometer system is provided for measurement of X-ray spectra in which at least two pairs of crystals are arranged in a crystal changer so that different pairs of such crystals can be selected in the X-ray spectrometer. This selection is achieved by rotating a drum on which pairs of crystals are mounted about an axis to bring one pair of crystals into alignment with a collimated X-ray beam. This enables the selection of the wavelength range used in the spectrometer to be made without deactivating the spectrometer or without loosing the vacuum in the spectrometer.
Using a belt transmission and guide wheels, a linear drive for a detector arm of an X-ray monochromator is simply obtained, the angle between the detector arm and the crystal arm always being accurately equal to the angle between the crystal arm and the entrance slit.
A single-leaf X-ray collimator comprises at least one collimating leaf member having at least one collimating aperture. The collimating leaf member is adapted to be configured to rotate about at least one of a vertical or horizontal plane. The collimator provides elliptical collimation and hence improved dosage efficiency.
A device which measures both the thickness of a thin film and the concentration of selected elements within the thin film. An X-ray source is utilized to irradiate the thin film sample and two detectors, an energy dispersive detector and a wavelength dispersive detector, provide the film thickness and element concentration measurements respectively.
