A method of producing fluorinated diamond particles bonded in a filled fluorocarbon resin matrix. Simple hot pressing techniques permit the formation of such matrices from which diamond impregnated grinding tools and other articles of manufacture can be produced. Teflon fluorocarbon resins filled with Al.sub.2 O.sub.3 yield grinding tools with substantially improved work-to-wear ratios over grinding wheels known in the art.

A method of depositing diamond-like films produces depositing species from a plasma of a hydrocarbon gas precurser. The plasma is generated by a laser pulse which is fired into the gas and is absorbed in an initiater mixed with the gas. The resulting detonation produces a plasma of ions, radicals, molecular fragments and electrons which is propelled by the detonation pressure wave to a substrate and deposited thereon.

An abrasive element comprising a substrate having on a surface thereof particles of an abrasive material secured by an organic binding medium wherein at least the surface of the element between the particles of abrasive material contains a fluorochemical selected from the group consisting of compounds comprising a fluorinated aliphatic group attached to a polar group or moiety and compounds having a molecular weight of at least 750 and comprising a non-fluorinated polymeric backbone having a plurality of pendant fluorinated aliphatic groups, said aliphatic groups comprising the higher of (a) a minimum of three C--F bonds, or (b) in which 25% of the C--H bonds have been replaced by C--F bonds such that the compound comprises at least 15% by weight of fluorine. The compound may be applied as a layer coated over the existing layers of an abrasive element or it may be incorporated into at least the coating formulation which will form the outermost layer of the binding medium. The abrasive elements may be in the form of sheets, blocks, discs, pads, belts etc. The presence of the compound serves to reduce the loading of the abrading surface in use, thereby extending the working life of the abrasive element.

This invention relates to fixed abrasive articles and abrasive constructions containing at least one fluorochemical agent. The fixed abrasive articles and abrasive constructions are used in semiconductor wafer surface modification processes during the fabrication of semiconductor devices. Specifically, fixed abrasive articles comprise an abrasive composite that is coextensive with a backing and at least one fluorochemical agent associated with the composite. The invention further relates to methods of making fixed abrasive articles comprising at least one fluorochemical agent.

Energy, such as from three different lasers, is directed at the surface of a substrate to mobilize and vaporize a carbon constituent element (e.g., carbide) within the substrate (e.g., steel). The vaporized constituent element is reacted by the energy to alter its physical structure (e.g., from carbon to diamond) to that of a composite material which is diffused back into the substrate as a composite material. An additional secondary element, which also contains carbon, may optionally be directed (e.g., sprayed) onto the substrate to augment, enhance and/or modify the formation of the composite material, as well as to supply sufficient or additional material for fabricating a diamond or diamond-like coating on the surface of the substrate. The process can be carried out in an ambient environment (e.g., without a vacuum), and without pre-heating or post-cooling of the substrate.