An ion source comprises a cylindrical chamber having a longitudinal exit slit formed therein and two parallel anode wires extending the length of the chamber in the central region thereof and symmetrically disposed with respect to the longitudinal axis of the chamber and the exit slit, wherein at each end of the exit slit there is positioned at or near the zero potential equipotential a mask, the separation of the inner ends of the masks defining the width of the ion beam emitted by the source.
CROSS REFERENCE TO RELATED APPLICATIONS
This application is a continuation-in-part of application Ser. No. 23,745, filed on Mar. 26, 1979, now abandoned.
The invention is directed to a saddle field source for ions or neutral particles which is asymmetrically configured. The saddle field source preferably has three electrodes and has an improved efficiency.
