An interferometer, for use in spectrometry, is disclosed in which a more reliable synchronization of the starting points of successive analytical scans is obtained by combining: (a) a moving retro-reflector in the variable-length arm which reflects both the analytical beam and the reference beam; (b) stationary reflecting means in the variable-length arm providing a flat "folding" reflector which causes the path of at least the reference beam from the retro-reflector to be folded on itself and returned to the retro-reflector; and (c) stationary reflecting means for the reference beam in the fixed-length arm so located as to offset the reference interferogram with respect to the analytical interferogram. Two versions of the invention are shown, each having two disclosed embodiments. In one version all three of the beams (clock, reference, and analytical) are "folded" by means of mirrors located adjacent to the moving retro-reflector. In the other version only the reference beam is folded.
An interferometer structure is disclosed which has an integrated central mirror unit, which constitutes an integrated alignment unit permitting complete prealignment before the unit is incorporated into the interferometer. The integrated unit carries the beamsplitter and two folding mirrors. Alignment is accomplished by adjusting the positions of the two folding mirrors around vertical and horizontal axes. Both the stationary mirror and the movable mirror, which control the radiation path lengths in the two interferometer arms, are retroreflectors. Because of the folding miirror effect, resolution of the interferometer spectrometer system is significantly enhanced.
Interferometric apparatus that combines white-light VSI and single-wavelength PSI capabilities to improve the accuracy of height measurements in steep regions and in areas with large inter-pixel steps on the test surface. The technique consists of performing VSI measurements to obtain a relatively coarse profile of the test surface and to identify regions separated by a large step. Then PSI measurements are carried out over the test surface to obtain a relatively fine profile. Offsets between VSI and PSI measurements are calculated to correct for misalignments and phase shifts that may have occurred between the two sets of measurements. Finally, the fine PSI data are integrated to within one quarter wavelength of the coarse VSI data. The resulting quality of the height data in each of the step regions is thus improved to within the resolution of the PSI measurements.
A multiplicity of one-piece flexure plates are assembled in pairs to provide a support system on which a retroreflector may be mounted for reciprocal motion. Combined with balance bodies, the flexure plates provide a support system having portions that are dynamically and statically balanced with one another, irrespective of orientation, so as to thereby immunize the unit against extraneous forces. The motion transfer assembly is especially adapted for use to support a moving retroreflector in a two-arm interferometer that may further include a beamsplitter assembly constructed from a one-piece, integrally formed body, the body having convergent, optically flat planar surfaces of specular reflectance, and means for adjustably mounting a beamsplitter therein. The spectrometer is of modular construction, and employs an integrated clocking sub-assembly as well as a light-weight voice-coil motor.
A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.
A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.
