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Piezoelectric contamination detector
   
Document Number
US Patent 4561286
Issued Date
December 31, 1985
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Abstract
A piezoelectric detector for determination of the mass or film thickness of gaseous, liquid or solid substances being adsorbed or condensed on the surface of a piezoelectric resonator, having at least one measuring resonator with at least one integrated thin-film sensor, one discrete or integrated on the resonator re-evaporation heating element, and a reference resonator separated from the measuring resonator with a contamination shield, and protected from contamination, but not from heat radiation, with an optical window, which all allow correction by electronic or numerical means of influences of temperature changes on the resonant frequency and of cut-angle deviations and the temperature differences between the resonators.
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Piezoelectric contamination detector - US Patent 4561286 Drawing
Drawing from US Patent 4561286
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Number of Claims:
20
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Published
December 31, 1985
Application Number
06/625,550
Filed
June 28, 1984
US Classification
73/24.06   177/210FP 310/312 310/321 310/324 310/341 310/346 310/366
Int'l Classification
G01B   7/02   (20060101)   G01B   7/06   (20060101)  
Attorney/Law Firm
Priority Data
Jul 13, 1983 [CH] 3826/83
USPTO Field of Search
73/23   73/28   73/29   310/315   310/341  
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