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Electrostatically sealed piezoelectric device
   
Document Number
US Patent 4639631
Issued Date
January 27, 1987
Link
Inventors
Tomase; Joseph P. (Libertyville, IL)
Nield; Kenneth J. (Western Springs, IL)
Moore; Steven C. (Mountain View, CA)
Map
Abstract
A piezoelectric device package consists of a base and a cover which are sealed together to hermetically seal a piezoelectric device such as a quartz crystal therebetween. A recess in the cover receives the quartz crystal. Feedthrough holes in the base, or the cover, or both, which have electrostatic seals formed over them provide a means for making electrical connections with the quartz wafer while still maintaining the hermetic seal.
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Electrostatically sealed piezoelectric device - US Patent 4639631 Drawing
Drawing from US Patent 4639631
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Number of Claims:
43
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Owner
Motorola, Inc. (Schaumburg, IL)
Published
January 27, 1987
Application Number
06/750,455
Filed
July 1, 1985
US Classification
310/344   310/348
Int'l Classification
H03H   9/10   (20060101)   H01L   41/00   (20060101)   H01L   41/053   (20060101)   H03H   9/05   (20060101)  
Examiner
USPTO Field of Search
310/344   310/348   310/370  
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Claims
Description
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