A photometric apparatus includes a light source, apparatus for oscillating a light beam spot across a sample, apparatus for measuring secondary light from the sample, and apparatus for determining the specific portion of the sample to be examined by photometry. With this photometric apparatus, each of a plurality of microscopic areas of the sample can be evaluated accurately.
Mar 21, 1984 [JP] 59-53979 Mar 21, 1984 [JP] 59-53980 Mar 21, 1984 [JP] 59-53981 Mar 21, 1984 [JP] 59-53982 Mar 21, 1984 [JP] 59-53983
USPTO Field of Search
356/444
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Related Patents
5682245 - Microscopic photometry apparatus - Owned by Research Development Corporation of Japan (JP) Yasukawa Electric Corporation (JP) Nikon Engineering Co., Ltd. (JP)
In a microscopic photometry apparatus having an optical system for photometry and an optical system for observation, there are provided a mirror having a slit for photometry, a photodetector for receiving light from the slit for photometry, a TV camera for observing an image of a sample reflected by the mirror, an image translating mechanism for translating the image of the sample, and an image rotating mechanism for rotating the image of the sample. Photometry is performed for an arbitrary position within the image of the sample by translating and rotating the image while simultaneously observing the slit for photometry and the image of the sample. Therefore, it is possible to easily and accurately perform observation and/or measurement for a microscopic object or a microscopic part of a macroscopic object, including photometry for arbitrary two points.
