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Claims  |
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What is claimed is:
1. A tracking system for continually tracking a moving object relative to a
reference location, the combination comprising:
a retroreflector rigidly coupled to the object;
a rigid stationary base positioned at the reference location;
a first support;
means for pivotally coupling said first support to said base for pivotal
movement about a Y axis;
a second support;
means for pivotally coupling said second support to said first support for
pivotal movement about an X axis, said X and Y axes being substantially
perpendicular and intersecting at a point A;
means for generating a laser beam directed along said Y axis towards point
A;
first reflective means, rigidly coupled to said first support, for
receiving the laser beam extending along said Y axis before it intersects
the X axis and redirecting the laser beam along said X axis towards point
A;
second reflective means, rigidly coupled to said second support, for
(a) receiving the redirected laser beam along said X axis from said first
reflective means and redirecting the laser beam at point A along an R axis
indicent on said retroreflector, and
(b) receiving the laser beam reflected by said retroreflector and
redirecting the laser beam substantially parallel to and generally along
said X axis away from point A;
said R axis being substantially perpendicular to said X axis and
intersecting said X and Y axes at said point A;
motive means, coupled to said base and said first and second supports, for
pivoting, respectively, said first and second supports relative to said
base;
detection means, located along the path of the laser beam, for receiving
the laser beam after incidence on said retroreflector and for generating
an error signal representing movement of said retroreflector and object
relative to said X and Y axes; and
control means, coupled to said motive means and receiving said error
signal, for actuating said motive means to reduce said error signal to
zero.
2. A tracking system according to claim 1, and further comprising
inteferometer means, coupled to said base and receiving the laser beam from
said means for generating a laser beam and receiving a portion of the
retro-reflected laser beam from said second reflective means via said
first reflective means, for determining the distance of said
retroreflector and object from the reference location;
said first reflective means including means for redirecting a portion of
the retro-reflected laser beam from said second reflective means to said
interferometer means.
3. A tracking system according to claim 1, wherein
said first reflective means comprises
a first reflector for reflecting the incident laser beam extending along
said Y axis in a direction substantially parallel to said X axis and away
from said Y axis,
a second reflector for reflecting the incident laser beam received from
said first reflector in a direction substantially parallel to said Y axis
and towards said X axis, and
a third reflector for reflecting the incident laser beam received from said
second reflector in a direction substantially parallel to and
substantially coincident with said X axis.
4. A tracking system according to claim 3, wherein
said Y axis intersects said first reflector.
5. A tracking system according to claim 4, wherein
said X axis intersects said third reflector.
6. A tracking system according to claim 3, wherein
said X axis intersects said third reflector.
7. A tracking system according to claim 1, wherein
said second reflective means comprises a front surface reflector.
8. A tracking system according to claim 1, wherein
said means for pivotally coupling said first support to said base has a
range of about .+-.90.degree., and
said means for pivotally coupling said second support to said first support
has a range of about .+-.60.degree..
9. A tracking system according to claim 1, wherein
said first support comprises a hollow housing.
10. A tracking system according to claim 9, wherein
said second support comprises a substantially S-shaped member.
11. A tracking system according to claim 1, wherein
said second support comprises a substantially S-shaped member.
12. A tracking system according to claim 1, wherein
said detection means comprises a quadrant detector.
13. A tracking system according to claim 1, wherein
said first support includes means for supporting said detection means on
said first support in a position intersected by said X axis.
14. A tracking system according to claim 13, wherein
said means for supporting said detection means comprises a tubular shaft.
15. A tracking system according to claim 14, wherein
said tubular shaft is rigidly coupled to said detection means and said
means for supporting further comprises means for pivotably coupling said
tubular shaft to said first support.
16. A tracking system according to claim 1, wherein
said means for pivotally coupling said first support to said base comprises
a tubular shaft through which said laser beam passes.
17. A tracking system according to claim 1, wherein
said means for generating a laser beam directed along said Y axis comprises
a reflector rigidly coupled to said base and intersected by said Y axis.
18. A tracking system according to claim 1, and further comprising
third reflective means, rigidly coupled to said first support, for
redirecting a portion of the retro-reflected laser beam from said second
reflective means along said Y axis, and
interferometer means, coupled to said base and receiving the laser beam
from said third reflective means, for determining the distance of said
retroreflector and object from the reference location.
19. A tracking system according to claim 1, wherein
said motive means comprises
first and second motors,
means for rigidly mounting each of said motors to said base,
first means for transmitting motive power from said first motor to said
first support, and
second means for transmitting motive power from said second motor to said
second support.
20. A method of continually tracking a moving object relative to X and Y
axes which are perpendicular and intersect at a point A at a reference
location, comprising the steps of
rigidly coupling a retroreflector to the object,
directing a laser beam along the Y axis towards the X axis,
redirecting the laser beam from the Y axis, before the beam intersects the
X axis, along the X axis,
redirecting the laser beam from the X axis at point A along an R axis
incident on the retroreflector, the R axis being substantially
perpendicular to the X axis and intersecting the X and Y axes at point A,
generating an error signal from the displacement of the laser beam after
incidence of the laser beam on the retroreflector representing movement of
the retroreflector and object relative to the X and Y axes, and
relocating the R axis relativ to the retroreflector and object so as to
reduce the error signal to zero.
21. A method according to claim 20, and further comprising the step of
determining the distance of the retroreflector and object relative to the
reference location.
22. A method according to claim 20, wherein the relocating step comprises
the steps of
relocating the R axis within a range of about .+-.60.degree. about the X
axis, and
relocating the R axis within a range of about .+-.90.degree. about the Y
axis.
23. A method according to claim 20, wherein the step of redirecting the
laser beam from the Y axis along the X axis comprises the steps of
reflecting the laser beam extending along the Y axis in a direction
substantially parallel to the X axis and away from the Y axis,
reflecting the laser beam substantially parallel to the Y axis and towards
the X axis, and
reflecting the laser beam substantially parallel to and substantially
coincident with the X axis.
24. A tracking system for continually tracking a moving object relative to
a reference location, the combination comprising:
a retroreflector rigidly coupled to the object;
a rigid stationary base positioned at the reference location;
a first support;
means for pivotally coupling said first support to said base for pivotal
movement about a Y axis;
a second support;
means for pivotally coupling said second support to said first support for
pivotal movement about an X axis, said X and Y axes being substantially
perpendicular and intersecting at a point A;
means for generating a laser beam directed along said Y axis towards point
A;
first reflective means, rigidly coupled to said first support, for
receiving the laser beam extending along said Y axis before it intersects
the X axis and redirecting the laser beam along said X axis towards point
A;
second reflective means, rigidly coupled to said second support, for
receiving the redirected laser beam along said X axis from said first
reflective means and redirecting the laser beam at point A along an R axis
incident on said retroreflector;
said R axis being substantially perpendicular to said X axis and
intersecting said X and Y axes at said point A;
motive means, coupled to said base and said first and second supports, for
pivoting, respectively, said first and second supports relative to said
base;
detection means, located along the path of the laser beam, for receiving
the laser beam after incidence on said retroreflector and for generating
an error signal representing movement of said retroreflector and object
relative to said X and Y axes; and
control means, coupled to said motive means and receiving said error
signal, for actuating said motive means to reduce said error signal to
zero.
25. A tracking system according to claim 24, wherein
said second reflective means further includes means for receiving the laser
beam reflected by said retroreflector.
26. A tracking system according to claim 25, and further comprising
interfermeter means, coupled to said base and receiving the laser beam from
said means for generating a laser beam and receiving a portion of the
retro-reflected laser beam from said second reflective means via said
first reflective means, for determining the distance of said
retroreflector and object from the reference locatioon;
said first reflective means including means for redirecting a portion of
the retro-reflected laser beam from said second reflective means to said
interferometer means.
27. A tracking system according to claim 24, wherein
said first reflective means comprises
a first reflector for reflecting the incident laser beam extending along
said Y axis in a direction substantially parallel to said X axis and away
from said Y axis,
a second reflector for reflecting the incident laser beam received from
said first reflector in a direction substantially parallel to said Y axis
and towards said X axis, and
a third reflector for reflecting the incident laser beam received from said
second reflector in a direction substantially parallel to and
substantially coincident with said X axis. |
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Claims  |
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Description  |
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FIELD OF THE INVENTION
The invention relates to a system for tracking a randomly moving object
using a laser beam and first and second beam steering assemblies, which
pivot, respectively, about substantially perpendicular and intersecting X
and Y axes. The steering assemblies direct the laser beam along an R axis,
which is perpendicular to the X axis and intersects the X and Y axes,
towards a retroreflector coupled to the moving object. The system includes
an interferometer to determine the distance of the object from a reference
location. Advantageously, the first beam steering assembly comprises two
prisms and the second beam steering assembly comprises a third prism. The
system can be used to control and calibrate robotic devices, inspect large
critical parts, and control machine tool operations and laser welding.
BACKGROUND OF THE INVENTION
Systems for tracking moving objects have utility in various technical
fields. Thus, they can be used to control and calibrate robotic devices,
inspect large critical parts such as dish antennas, air frames and
propellers, and control machine tool operations and laser welding. In
addition to merely tracking the moving object, these systems typically
utilize distance measuring devices, such as laser interferometers, to
determine the distance at any point in time of the object relative to a
reference location. The precise location of the moving object in a volume
is typically determined using three tracking and distance measuring
devices and the well-known trilateration method. Adding additional
structure can also provide the relative angle of the moving object.
While considerable work has been done in the prior art to develop these
systems to a high degree of accuracy, the typical prior art systems have
numerous disadvantages. One type of system utilizes gimballed flat mirrors
to steer beams of radiation and servo-controlled motors to vary the
angular position of the mirrors relative to the object. These gimballed
mirrors, however, are accurate only to about 20-50 microns with respect to
a volume of about 100 cubic meters. The accuracy of these systems is
limited by bearing and shaft alignment errors, known as run out errors,
and by the initial alignment error of the laser beam and the precise
center of the mirror. Moreover, these gimballed mirrors afford only
limited tilt angles and require frequent recalibration.
Additional systems utilize reflective pellicles which are formed from very
thin reflecting membranes, the thickness being on the order of several
microns. However, these pellicles are not rugged and are difficult to work
with since they tend to vibrate.
Examples of these prior art systems are disclosed in the following U.S.
Pat. Nos. 4,436,417 to Hutchin; 4,457,625 to Greenleaf et al; and
4,621,926 to Merry et al, the disclosures of which are hereby incorporated
by reference.
Thus, there is a continuing need to provide improved tracking and distance
measuring devices of high accuracy.
SUMMARY
Accordingly, a primary object of the invention is to provide a tracking
laser interferometer that can track a moving object and determine its
distance from a reference location with a very high degree of accuracy.
Another object of the invention is to provide a tracking laser
interferometer having an accuracy of about one micron per 100 cubic meters
and where cosine errors are on the order of about 0.1 micron.
A further object of the invention is to provide a tracking laser
interferometer that is light, compact, portable, and rugged.
Another object of the invention is to provide a tracking laser
interferometer having relatively wide tracking angles and in which the
initial alignment of the laser is not acutely critical.
Another object of the invention is to provide a laser tracking system which
is an improvement over single mirror systems by limiting the error
introduced by initial laser misalignment and by directing the laser beam
to an optical point in space defined by intersecting axes.
The foregoing objects are basically attained by providing a tracking system
for continually tracking a moving object relative to a reference location,
the combination comprising a retroreflector rigidly coupled to the object;
a rigid stationary base positioned at the reference location; a first
support; a mechanism for pivotally coupling the first support to the base
for pivotal movement about a Y axis; a second support; a mechanism for
pivotably coupling the second support to the first support for pivotal
movement about an X axis, the X and Y axes being substantially
perpendicular and intersecting at a point A; a mechanism for generating a
laser beam directed along the Y axis towards point A; a first reflective
assembly, rigidly coupled to the first support, for receiving the laser
beam extending along the Y axis before it intersects the X axis and
redirecting the laser beam along the X axis towards point A; a second
reflective assembly, rigidly coupled to the second support, for (a)
receiving the redirected laser beam along the X axis from the first
reflective assembly and redirecting the laser beam at point A along an R
axis incident on the retroreflector, and (b) receiving the laser beam
reflected by the retroreflector and redirecting the laser beam
substantially parallel to and generally along the X axis away from point
A; the R axis being substantially perpendicular to the X axis and
intersecting the X and Y axes at point A; a motive assembly, coupled to
the base and the first and second supports, for pivoting, respectively,
the first and second supports relative to the base; a detection mechanism,
located along the path of the laser beam, for receiving the laser beam
after incidence on the retroreflector and for generating an error signal
representing movement of the retroreflector and object relative to the X
and Y axes; and a control assembly, coupled to the motive assembly and
receiving the error signal, for actuating the motive assembly to reduce
the error signal to zero.
The foregoing objects are also attained by providing a method of
continually tracking a moving object relative to X and Y axes which are
perpendicular and intersect at a point A at a reference location,
comprising the steps of rigidly coupling a retroreflector to the object,
directing a laser beam along the Y axis towards the X axis, redirecting
the laser beam from the Y axis, before the beam intersects the X axis,
along the X axis, redirecting the laser beam from the X axis at point A
along an R axis incident on the retroreflector, the R axis being
substantially perpendicular to the X axis and intersecting the X and Y
axes at point A, generating an error signal from the displacement of the
laser beam after incidence of the laser beam on the retroreflector
representing movement of the retroreflector and object relative to the X
and Y axes, and relocating the R axis relative to the retroreflector and
object so as to reduce the error signal to zero.
Other objects, advantages, and salient features of the invention will
become apparent from the following detailed description, which, taken in
conjunction with the annexed drawings, discloses preferred embodiments of
the invention.
DRAWINGS
Referring now to the drawings which form a part of this original
disclosure:
FIG. 1 is an optical schematic of the tracking laser interferometer in
accordance with the invention, including a first beam steering assembly
pivotable about the Y axis and a second beam steering assembly pivotable
about the X axis, these axes being perpendicular and intersecting at point
A from which the laser beam is directed along the R axis to a
retroreflector;
FIG. 2 is a front elevational view of an apparatus in accordance with the
present invention;
FIG. 3 is an enlarged front elevational view of the apparatus shown in FIG.
2 with parts in section and broken away;
FIG. 4 is a reduced rear perspective view of the apparatus in accordance
with the invention shown in FIGS. 2 and 3;
FIG. 5 is a top plan view of the apparatus shown in FIG. 2 with parts in
section and broken away for clarity;
FIG. 6 is an optical schematic of a second embodiment in accordance with
the invention which is similar to that shown in FIGS. 1-5 except that a
third reflective assembly is utilized to conduct the laser beam to the
interferometer receiver at the end of the laser beam wave path; and
FIG. 7 is a top plan view of a portion of the optical schematic shown in
FIG. 6 illustrating in more detail the second reflective assembly.
DETAILED DESCRIPTION OF THE INVENTION
Referring now to FIGS. 1-5, the tracking laser interferometer system 10 in
accordance with the invention is intended to track a moving object and
also determine its distance from a reference location.
System 10 basically comprises a laser 12 capable of generating a lser beam
14 and first and second beam steering assemblies 16 and 18. The steering
assemblies 16 and 18 pivot, respectively, about substantially
perpendicular and intersecting X and Y axes and direct the laser beam 14
along an R axis, which is perpendicular to the X axis and intersects the X
and Y axes. Along the R axis, the laser beam is intercepted by a
retroreflector 20, which is coupled to the moving object 22 (FIG. 4) and
which returns the laser beam to a position sensitive photodetector 24 via
the steering assemblies. The photodetector generates an error signal based
on lateral displacement of the laser beam and representative of the
object's movement relative to the X and Y axes, and this signal is
transmitted to two motors 26 and 28 which pivot the steering assemblies
about the X and Y axes to reduce the error to zero. The system 10 includes
an interferometer 30 which utilizes the laser beam 14 to determine the
distance of the object from a reference location.
The first beam steering assembly 16 includes two prisms 32 and 34 which
redirect the laser beam 14 through three 90.degree. reflections from an
initial direction parallel to the Y axis and towards the X axis to an
intermediate direction along the X axis and towards the Y axis. The second
beam steering assembly 18 includes a third prism 36 which redirects the
laser beam through one 90.degree. reflection from the intermediate
direction along the X axis to one coincident with the R axis where it is
intercepted by the retroreflector 20 and returned to the prism 36 and then
photodetector 24.
By utilizing this system 10 in which the laser beam 14 is maintained
parallel to the X and Y axes, a high degree of accuracy is attained which
is on the order of about one micron within 100 cubic meters. By using
three of the systems, the position of the object within a volume can be
accurately determined. In this case, each of these systems can be rigidly
coupled to a platform. By adding a second or third retroreflector to the
object and using two or three additional systems, the angular orientation
of the object can also be determined.
In more comprehensive detail, as seen in FIGS. 2-5 the overall system 10
comprises a rigid stationary base 40, the first and second beam steering
assemblies 16 and 18 pivotably coupled to the base, first and second
servo-controlled motive assemblies including motors 26 and 28 to pivot
respectively the first and second beam steering assemblies, a detection
assembly comprising photodetector 24, and a control system 42 for
receiving an error signal from the photodetector and providing the
necessary signals for actuating motors 26 and 28.
As seen in FIGS. 2-5, the stationary base 40 forms a reference location and
comprises a series of four horizontally extending vertically aligned
brackets 44, 46, 48 and 50. The first bracket 44 has a vertical bore 52
coaxial with the Y axis and likewise the second bracket 46 has a vertical
bore 54 which is coaxial with the Y axis. The second bracket 46 also has a
horizontal passageway 56 formed in its front face and extending rearwardly
as seen in FIG. 3 into communication with bore 54. A ball bearing 58 is
also rigidly secured inside bore 54 and coaxial therewith.
The third bracket 48 has a suitable vertical bore located therein and
rigidly receiving a ball bearing 60 which is coaxial with the Y axis. A
similar bore and ball bearing, not shown, is likewise provided in the
fourth bracket 50. The ball bearings are preferably coupled to the base by
set screws.
The First Beam Steering Assembly
As seen in FIGS. 1-3, the first beam steering assembly 16 comprises a first
support 62, an upper tubular shaft 64, a lower tubular shaft 66, and a
first reflective assembly 68, all of which pivot about the Y axis through
about .+-.90.degree..
The first support 62 is advantageously in the form of a parallelopiped
housing or case and, while not shown, can include a left and right front
cover separated by a slit and a rear cover. These covers reduce the
possibility of outside interference with the laser beam activity therein.
The first support 62 thus comprises an upper wall 70, a lower wall 72, a
right side wall 74, and a left side wall 76.
As seen in FIG. 3, the upper wall 70 has a suitable vertically oriented
bore receiving ball bearing 78 rigidly therein, the inner race thereof
being rigidly connected to the upper shaft 64. The upper wall 70 has an
inwardly extending slot 80 therein as seen in FIG. 2 to allow the laser
beam to be angled upwardly through at least 60.degree. when the second
beam steering assembly 18 is pivoted about the X axis. The lower wall 72
has a similar slot 82 as seen in FIGS. 2 and 5 to allow the laser beam to
be tilted downwardly through an additional 60.degree.. Likewise, the lower
wall 72 has a suitable bore receiving rigidly therein ball bearing 84 as
seen in FIG. 3. The inner race of bearing 84 is suitably rigidly coupled
to and received therein the lower tubular shaft 66 as seen in FIG. 3.
The upper tubular shaft 64 is suitably rigidly coupled to bracket 44 and
the lower tubular shaft 66 is suitably rigidly coupled to the second
bracket 46, preferably by set screws.
Thus, the first support 62 and prisms 32 and 34 can pivot about the Y axis
in a scanning action relative to shafts 64 and 66, which are coaxial with
each other and the Y axis.
The lower wall 72 as seen in FIG. 2 also has a vertical bore 86 therein for
the reception of a suitable bearing and a drive shaft 138 as will be
described in more detail hereinafter.
The right side wall 74 has a horizontally oriented bore having a ball
bearing 88 rigidly received therein and coaxial with the X axis. In
addition, extending rigidly outwardly from the right wall are a pair of
stop pins 90 and 92 as seen in FIGS. 2, 3 and 5, which limit the pivoting
of the second beam steering assembly 18 about the X axis, as will be
described in more detail hereinafter.
The left side wall 76 has a suitable horizontally oriented bore rigidly
receiving therein a bearing 94 which is coaxial with the X axis.
As illustrated in FIGS. 1, 2 and 3, the first reflective assembly 68
comprises the first 45.degree. rear surface prism 32 and the second rear
surface prism 34, these prisms being rigidly coupled to the bottom wall 72
by any suitable means, such as adhesive or mechanical fasteners. The
prisms 32 and 34 are aligned in a plane which receives the X and Y axes
and move with support 62. While shown as a pair of prisms, these
reflective members could also be three flat mirrors.
Turning to FIG. 1, the first prism 32 has a quarter wave plate 96 on its
bottom for use with a polarized laser beam. The 45.degree. angled rear
surface of the prism which is intersected by the Y axis acts as a first
reflector of the laser beam. The second prism 34 is rigidly coupled to
prism 32 as seen in FIG. 3 by any suitable means. In addition, rigidly
coupled to the top of the prism 34 is an upper coated mirrored prism 100
which combines with prism 34 to form a beam splitter, allowing about 15%
light leakage therethrough towards detector 24. The upper prism 100 is
coated with a polarization sensitive material. Facing the third prism 36
and rigidly coupled to the second prism 34 is a quarter wave plate 102. As
seen in FIG. 1, the second prism 34 forms second and third reflectors via
its upper and lower 45.degree. angled surfaces.
The Second Beam Steering Assembly
Referring now to FIGS. 1, 2, 3 and 5, the second beam steering assembly 18
comprises a second S-shaped support or member 104, a left side shaft 106,
a right side tubular shaft 108, and as a second reflective assembly, the
third front surface prism 36, all of which pivot about the X axis and are
supported by the first support 62.
The third prism 36 is rigidly received in the center of the second support
104 in an aperture 110 as seen in FIG. 3 and secured therein rigidly via
suitable pins. Prism 36 is located so that its 45.degree. reflective
surface is at the intersection of the X and Y axes which defines point A
in space about which pivoting of the supports takes place. The alignment
of these axes as defined by shafts 106 and 108 and shafts 64 and 66 is as
accurate as the best machining tolerances will allow. While shown as a
prism, reflective member 36 can be a flat mirror or a rear surface prism.
A passageway 112 extends from aperture 110 through the remaining thickness
of the support 104 so that the laser beam can be reflected from the second
prism 34 incident on the third prism 36 along the X axis. On the left side
of the second support 104, a worm wheel 114 is rigidly secured whose axis
is parallel to and coincident with the X axis. Extending to the left of
the worm wheel 114 is the left side shaft 106 which is suitably rigidly
coupled to the second support. On the right side of support 104 is a bore
116 rigidly receiving the right side shaft 108 therein. This shaft 108 is
rotatably supported along the X axis via bearing 88, while the left side
shaft 106 is rotatably supported along the X axis in bearing 94.
Thus, shafts 106 and 108 pivotaly couple support 104 and prism 36 to the
first support 62 for pivotal scanning movement about the X axis.
Rigidly coupled to the right side shaft 108 exterior to the first support
62 is a control arm 118 which engages stop pins 90 and 92 upon pivotal
motion of the second beam steering assembly 18 to limit the pivotal
movement about the X axis to about .+-.60.degree..
The position sensitive photodetector 24 seen in FIGS. 1 and 3 is rigidly
supported inside right side shaft 108 and is aligned with the X axis.
Adjacent prism 34 and on the inner end of shaft 108 is a plano-convex lens
120 for focusing the laser beam on the photodetector 24. This photodetetor
comprises a detection assembly and is advantageously in the form of a
quadrant detector, also known as a quad cell. Extending from the
photodetector 24 is an output line 122 which provides an error signal to
the control system 42 as seen in FIG. 1.
Referring to FIGS. 1, 4 and 5, a first motive assembly is formed from a
first D.C. motor 26 which as seen in Figs. 4 and 5 is rigidly coupled to
the rear of base 40 via bracket 124. Motor 26 rotates in either direction
a worm gear 126 which in turn rotates a horizontally oriented worm wheel
128. Wheel 128 is rigidly coupled to a vertical first drive shaft 130 and
is rigidly received in a horizontal slot 132 in a movable bracket 134.
Movable bracket 135 has a vertical bore 136 for the rigid reception of
first drive shaft 130 about which it pivots. Drive shaft 130 is suitably
pivotally supported in brackets 46 and 48.
Rotatably received in bracket 134 and vertically oriented is a second drive
shaft 138 which is suitably supported in suitable bearings therein. This
shaft 138 as seen in FIGS. 2 and 3 extends upwardly through the lower wall
72 in the first support 62 via vore 86 and is rotatably received in a
suitable bore and bearing in the upper wall 70 of the first support 62.
Since the second drive shaft 138 can only rotate relative to bracket 134
and does not move vertically, pivotal movement of bracket 134 under the
influence of worm wheel 128 and worm gear 126, via motor 26, causes
pivotal movement of the first support 62 about the Y axis and tubular
shafts 64 and 66.
The second motive assembly for pivoting the second beam steering assembly
18 about the X axis comprises the second D.C. motor 28 which is rigidly
coupled to the fourth bracket 50 on the base. This motor rotates, in
either direction via third drive shaft 140, a horizontally oriented spur
gear 142 which meshes with a second horizontally oriented spur gear 144.
This spur gear 144 is rigidly coupled to the bottom of the second drive
shaft 138 and rotates a second worm gear 146 which is located as seen in
FIGS. 1 and 5 inside the first support 62 and threadedly engages the
vertically oriented worm wheel 114. Thus, rotation of worm gear 146 in
either direction provides pivotal movement to the second beam steering
assembly 18 via spur gear 144. This pivotal movement is about the X axis
and is supported by shafts 106 and 108. By locating the second motor on
the base, not the first support, any heat from the motor is isolated from
the optical components. Moreover, the weight of the first support is kept
low so that it can more efficiently be pivoted in either direction. Even
though bracket 134 is connected to both wheel 128 and gear 144, movement
of wheel 128 does not necessarily actuate worm gear 146 since gear 144 can
walk around gear 142.
As seen in FIGS. 1 and 4, the control system 42 has a first output line 148
connected with the first motor 26 and a second output line 150 connected
to the second motor 28. The control system is a conventional device that
will take the error signal from the photodetector 24 and energize the
first and second motors 26 and 28 to rotate in the appropriate directions
and for the appropriate amount of time in order to reduce the error signal
to zero. This control system basically includes a digital computer with
the necessary logic.
The laser 12 utilized as the source of the laser beam 14 is advantageously
capable of producing a dual mode polarized beam since this is less
sensitive to turbulence in the air. Using such a dual mode polarized beam
necessitates the use of the quarter wave plates. However, they can be
eliminated with use of different types of lasers and interferometers. The
wave plates are inserted between the pivoting parts of the optical
elements in the system and the stationary ones. These wave plates convert
linear polarization to circular polarization so that the effect of the
pivoting is nil.
The interferometer 30 seen in FIGS. 1, 2, 3 and 5, comprises a receiver, or
fringe counter, 152, a beam splitter 154, a quarter wave plate 156 and a
corner cube 158. These elements forming the interferometer are rigidly
coupled to the side of the base in a position where the beam splitter 154
intercepts the laser beam 14 and the receiver 152 intercepts the laser
beam as reflected via the corner cube 158 from the beam steering
assemblies.
In order to transmit the laser beam 14 from the beam splitter 154 and in a
direction parallel with the Y axis and towards the x axis, a beam guiding
45.degree. rear surface prism 160, as seen in FIGS. 1, 2 3, is rigidly
located inside bore 54 in the second bracket in the base in direct
communication with the open passageway 56 and aligned with the Y axis. A
quarter wave plate, shown in FIG. 1, is also rigidly coupled in the base
adjacent the prism 160. The prism 160 and quarter wave plate 162 are
suitably rigidly supported inside the base in bore 54 in alignment with
the beam splitter 154 in any suitable fashion. Advantageously, they can be
adhered to the bottom of the lower tubular shaft 66 as illustrated in FIG.
3.
The retroreflector 20 seen in FIGS. 1, 4 and 5, is advantageously a
retrosphere, but also may be a corner cube, and is rigidly coupled to the
object 22. This object 22 can be for example a robot arm, a non-contact
optical probe, a cutting tool, or a welding tool. The retroreflector 20
receives the laser beam 14 as it is reflected from prism 36 along the R
axis and in turn reflects the laser beam back to prism 36. This R axis is
perpendicular to the X axis, intersects with the X and Y axes at point A
seen in FIG. 1, and varies angularly relative to the Y axis as the
retroreflector moves.
Operation
In operation, as seen best in FIG. 1, the laser 12 is energized, thereby
generating laser beam 14 which is intercepted along the beam path by beam
splitter 154. This causes a portion of the laser beam to be reflected
upwardly through the quarter wave plate 156 and into the corner cube 158
where the laser beam is reflected downwardly through the quarter wave
plate and the beam splitter as a reference beam and into the receiver 152.
The other portion of the beam 14 continues onwardly through the beam
splitter to prism 160 where it is reflected 90.degree. upwardly through
quarter wave plate 162 and tubular shaft 66 in a direction towards the X
axis and substantially coincident with the Y axis.
The laser beam 14 continues through the quarter wave plate 96 and is
reflected 90.degree. via the first prism 32 into a direction parallel to
the X axis and away from the Y axis. Next, the laser beam 14 is reflected
90.degree. by the lower angled surface of the second prism 34 upwardly in
a direction parallel with the Y axis and towards the X axis where it is
again reflected 90.degree. by the upper angled surface of prism 34. The
beam is reflected in a direction towards the Y axis and point A along a
line substantially coincident with the X axis. The beam passes through the
quarter wave plate 102 and then is reflected 90.degree. by the third prism
36 in the second beam steering assembly 18 and outward therefrom along the
R axis, which is perpendicular to the X axis and extends from point A.
Along the R axis, the laser beam 14 is intercepted by the retroreflector 20
coupled to the object 22 and the beam is retro-reflected back to prism 36
where it is reflected 90.degree. into a direction generally along the X
axis. As the retroreflector moves, the laser beam reflected generally
along the X axis is laterally offset, but substantially prallel to the X
axis.
The beam then passes through the quarter wave plate 102 and through the
beam splitter formed by prism 34 and prism 100 with a portion of the beam
extending through prism 100 to the plano-convex lens 120 where it is
focused on the quad cell 24.
If the beam 14 is perfectly aligned with the X axis and the center of the
quad cell, no error signal will be sent. However, if there is some lateral
displacement, then the quad cell 24 generates a suitable error signal and
transmits it along output line 122 to the control system 42. The control
system in turn will energize motors 26 and 28 as necessary to pivot the
first beam steering assembly 16 about the Y axis, the second beam steering
assembly 18 about the X axis, or both, in the necessary directions in
order to reduce the error signal to zero. This generation of an error
signal and compensation by the motors continues as the retroreflector 20
moves relative to the X and Y axes. In essence, the activity of the motors
tends to relocate the R axis so that the error is reduced to zero.
Returning to the prisms 34 and 100, the other portion of the laser beam 14
not transmitted to the quad cell is reflected downwardly 90.degree. from a
direction generally along the X axis to one which is substantially
parallel to the Y axis and away from the X axis. This portion of the beam
is then reflected 90.degree. towards the Y axis and substantially parallel
to the X axis via the lower angled surface of prism 34 and is intercepted
by the first prism 32. This prism reflects this portion of the beam
downwardly generally along and substantially parallel to the Y axis,
through the lower tubular shaft 66, through the quarter wave plate 162 and
incident on the beam guiding prism 160. This prism reflects the beam
90.degree. back to beam splitter 154 where this portion of the beam is
reflected 90.degree. downwardly into the receiver 152. By comparing the
reference beam from the corner cube 158 and the portion of the beam
returning from the retroreflector 20, the receiver via fringe counting can
determine the distance of the retroreflector therefrom.
As is evident from FIG. 1, the first beam steering assembly 16 comprising
prisms 32 and 34 can be pivoted about the Y axis on shafts 64 and 66
through about .+-.90.degree.. In addition, the second beam steering
assembly 18 comprising the third prism 36, lens 120 and quad cell 24 can
be pivoted about the X axis via shafts 106 and 108, which are pivotally
coupled to the first support 62. The pivotal movement about the X axis is
through about .+-.60.degree..
By using this structure, a highly accurate tracking laser interferometer
system results which is light, compact, portable and rugged and provides
wide tracking angles. Moreover, the system does not rely upon initial
laser alignment which can be off by several tenths of a millimeter. In
addition, the overall system reduces cosine errors to about 0.1 micron and
is accurate to about one micron within a volume of 100 cubic meters.
Cosine error means the laser beam path difference between a beam that goes
to the center of the retroreflector and one that deviates from that path
by d.theta.. The path length difference is dL=L(1-cos d.theta.) which is
substantially equal to L d.theta..sup.2 /2.
Embodiment of FIGS. 6 and 7
As seen in FIGS. 6 and 7, a second embodiment of the present invention is
shown as tracking laser interferometer system 10'. This system 10' is
similar to that shown in FIGS. 1-5 and discussed above and utilizes many
of the same components. These same components are illustrated
schematically in FIGS. 6 and 7 and are given similar reference numerals
with the addition of a prime. However, additional structure is added for
the main purpose of eliminating dead path error by eliminating the return
of the laser beam from the second steering beam assembly along its initial
wave path to the interferometer. Instead, there is one continuous wave
path with the receiver of the interferometer being at the end of the
overall wave path. Dead path error is any change in the laser beam path
length between the interferometer beam splitter and the last beam steering
optical element of the tracking system. Thus, any change in this path
length while the system is tracking introduces such a dead path error.
The additional structure added to system 10' shown in FIGS. 6 and 7 begins
with prism 170 located above and coupled to upper tubular shaft 64' and
quarter wave plate 172 therebetween. Below shaft 64' is a third reflective
assembly 174 which is similar to and acts as the first reflective assembly
68 described above except it does not have an additional prism 100 forming
a beam splitter. Thus, this third reflective assembly 174 comprises a
quarter wave plate 17 | | |