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| United States Patent | 4803361 |
| Link to this page | http://www.wikipatents.com/4803361.html |
| Inventor(s) | Aiki; Kunio (Komoro, JP);
Sasayama; Atsushi (Komoro, JP);
Nemoto; Tugio (Komoro, JP);
Haneda; Makoto (Komoro, JP);
Ishii; Satoru (Tamamura, JP);
Kugimiya; Haruo (Komoro, JP);
Kawasaki; Tutomu (Tsuchiura, JP) |
| Abstract | In a photoelectric device, particularly, a photoelectric device for optical
communication, an optical fiber is fixed at two fixing points so that the
extremity of the optical fiber is disposed opposite to the light emitting
surface of a laser diode chip and the optical fiber extends in a nonlinear
shape, for example, in a moderate curve, between the two fixing points.
Even though holding members fixedly holding the optical fiber at the two
fixing points and a base member supporting the holding members are formed
of a metal or metals having a coefficient of thermal expansion far greater
than that of the optical fiber, and even if the distance between the two
fixing points is varied due to the thermal expansion or contraction of the
holding members and the base member, the optical fiber is obliged only to
change the shape of extension. Therefore, the optical fiber and the solder
fixing the optical fiber to the holding members at the two fixing points
are not subjected to repeated stress, and hence the fatigue of the optical
fiber and the solder is avoided. Accordingly, the photoelectric device is
able to continue stable optical communication regardless of temperature
variation. |
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Title Information  |
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Drawing from US Patent 4803361 |
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Photoelectric device with optical fiber and laser emitting chip |
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| Publication Date |
February 7, 1989 |
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| Priority Data |
May 26, 1986[JP]61-119235
May 26, 1986[JP]61-119234
May 26, 1986[JP]61-119233
May 26, 1986[JP]61-119236
May 26, 1986[JP]61-119219 |
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Title Information  |
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Description  |
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BACKGROUND OF THE INVENTION
The present invention relates to a photoelectric device and, more
specifically, to a photoelectric device having a package containing a
laser chip which emits laser light, and an optical fiber cable which
guides the laser light emitted from the laser chip outside the package.
A semiconductor laser device is used as a light source for the optical
communication system. An exemplary laser module, namely, a semiconductor
laser device, for the optical communication system is published in
"Hitachi Hyoron", Hitachi Hyoron Sha, No. 10, pp. 39-44, Oct., 1983. This
semiconductor laser device is of a so-called direct disposition system, in
which the free end of the optical fiber is disposed opposite to the
resonant end face of the semiconductor laser element, and is formed in a
flat module having a box-shaped package. This semiconductor laser device
has a metallic stem with the central portion of the main plane thereof
sealed by a cap formed of a metallic plate and is provided internally with
a semiconductor laser element (laser diode chip) and a light receiving
element which detects the optical output of laser light emitted from the
resonant end face of the laser diode chip. Further, this semiconductor
laser device employs a laser diode chip which emits a laser light of a 1.3
.mu.m band, and a single-mode optical fiber for long-distance
large-capacity communication. In this semiconductor laser device, the free
end of the optical fiber facing the light emitting surface of the laser
diode chip are supported on a positioning shaft, which is bent to adjust
the position of the free ends of the optical fiber for optical axis
alignment.
The applicant of this patent application has proposed a technique to
improve the efficiency of the optical connection of the laser diode chip
and the optical fiber of a semiconductor laser device in Japanese Patent
Application No. 58-151560. According to this technique, the free end of
the optical fiber is held by a flexible holder, and an external force is
applied to the head of the flexible holder after fixing the optical fiber
and the laser diode chip to adjust the position of the free ends of the
optical fiber so that the respective optical axis of the optical fiber and
the laser diode chip are aligned with each other.
A light emitting module for optical communication is published in "NEC
Giho", Vol. 38, No. 2, pp. 84-89, 1985. This light emitting module
comprises, in a package, a laser element which emits a laser light, a
Ge-PD (light receiving element) for monitoring the back radiation of the
laser element, a thermistor for monitoring the temperature of the laser
element, and a Peltier element functioning as a temperature regulating
cooler; an optical fiber cable for transmitting the laser light outside
the package is connected to the package. The light emitting module is a
dual in line package. The laser element and the thermistor are mounted on
a block fixed on the Peltier element, while the optical fiber is secured
to the block. The light receiving element is fixed to the block.
In either foregoing semiconductor laser device, the optical fiber is
disposed with the free end thereof opposite the laser diode chip and are
held fixedly at a position near the wall of the package and at a position
near the laser diode so as to extend linearly between the two positions.
SUMMARY OF THE INVENTION
As is described in the cited papers, to enable a semiconductor laser device
to function fully and stably as a component of an optical communication
equipment, it is essential to align the respective optical axes of the
laser diode chip and the optical fiber at a high accuracy and to maintain
the configuration of the parts, which are positioned at a high accuracy,
for an extended period of time.
In the conventional semiconductor laser device, the optical fiber is held
fixedly at a position near the laser diode chip and at a position near the
wall of the package so that the optical fiber will extend linearly between
the two positions. Since the optical fiber is formed of quartz having a
coefficient of thermal expansion which is far smaller than that of metals
forming holding members holding the optical fiber at the two positions,
the optical fiber linearly extended between the two position is unable to
follow the variation of the distance between the two positions
attributable to temperature variation when the distance between the two
positions is as small as several millimeters to several tens millimeters.
It has been found by the inventors of the present invention that, since
the optical fiber is unable to follow the variation of the distance
between the two holding positions, the optical fiber or the solder fixing
the optical fiber is subjected to repeated stress and thereby the solder
is caused to fracture and the optical fiber is caused to break by
buckling. Since the fatigue fracture of the solder make the solder unable
to hold the optical fiber securely, the free end of the optical fiber is
dislocated to deteriorate the optical connection of the optical fiber and
the laser diode chip making optical communication impossible. Optical
communication is obliged to be interrupted also by the buckling of the
optical fiber.
Furthermore, the disposition of the light receiving element for monitoring
the laser light, and the thermistor for temperature detection also is
important to enable all the parts to exhibit their full functions.
Moreover, since those parts which need to be assembled at a high accuracy
are very small, a technique for integrally assembling those very small
parts in a module is important in respect of the improvement of the
reliability of the semiconductor laser device, productivity of the
production line and yield, and the reduction of the manufacturing cost of
the semiconductor laser device.
On the other hand, as is described in the cited papers, a technique for
aligning the optical axes to enable the optical fiber to efficiently
receive the laser light emitted from the light emitting surface of the
laser diode chip is very important to improve the reliability of the
semiconductor laser device and the yield of the manufacturing process.
As is further described in the cited papers, leads of 0.45 mm in diameter
are arranged on the bottom wall of the package to construct a dual in line
package. In such a semiconductor laser device, the leads penetrate the
bottom wall of the package and hence the length of each lead extending
from the bottom wall is large. The inventors of the present invention have
found that such a lead vibrates in connecting a wire to the upper end of
the lead through ultrasonic bonding to the upper end of the lead, and
thereby the wire is unable to be connected to the upper end of the lead
satisfactorily. The inventors found a further disadvantage of such a long
lead that an increased parasitic inductance of the long lead deteriorates
the high-frequency band characteristics.
As is described in the cited paper, Hitachi Hyoron, also important is a
technique for aligning the respective optical axes of the laser diode chip
and the optical fiber to secure the satisfactory optical connection of the
laser diode chip and the optical fiber. To maintain the optical connection
as assembled, the optical fiber needs to be fixed near the free end
thereof. Generally, solder, which does not produce any gas, is used as a
bonding material for fixing the optical fiber, to enhance the reliability
of the semiconductor laser device.
The inventors of the present invention have found that, in some cases, the
optical fiber correctly positioned relative to the laser diode chip is
dislocated in fixing the optical fiber to a holding member by soldering.
Generally, the holding members holding the optical fiber and the laser
diode chip, and a base supporting those holding members are formed of
metals, respectively. Accordingly, in soldering the optical fiber to the
holding member, the holding member is heated locally and the heat is
transferred from the holding member to the base making the holding member
unable to be heated to a temperature necessary for soldering. Furthermore,
since the soldering heat is transferred to the base to heat the peripheral
parts causing the thermal expansion and deformation of those peripheral
parts, so that the disposition of the laser diode and the optical fiber is
varied causing the deterioration of the alignment of the respective
optical axes of the laser diode chip and the optical fiber, which has been
adjusted previous to soldering. If the optical fiber is thus fixed with
their optical axes in misalignment with the optical axis of the laser
diode chip, the efficiency of the optical connection of the laser diode
and the optical fiber is reduced, and hence the semiconductor device
cannot be used, and reassembling the faultily assembled semiconductor
laser device requires troublesome work.
It is therefore a first object of the present invention to provide a
photoelectric device the efficiency of the optical connection of which is
not affected by temperature variation.
It is a second object of the present invention to provide a photoelectric
device having an optical fiber and optical fiber fastening parts which are
not damaged even when subjected to temperature variation.
It is a third object of the present invention to provide a technique for
aligning optical axes at high accuracy.
It is a fourth object of the present invention to provide a photoelectric
device having high reliability.
It is a fifth object of the present invention to provide a highly
productive technique for manufacturing a photoelectric device.
It is a sixth object of the present invention to provide a technique for
manufacturing a photoelectric device at a reduced manufacturing cost.
It is a seventh object of the present invention to provide electronic parts
of constructions which enable reliable ultrasonic bonding.
It is an eighth object of the present invention to provide electronic parts
of constructions reducing the parasitic inductances of the leads and the
like.
It is a ninth object of the present invention to provide electronic parts
capable of functioning in high-frequency bands.
It is a tenth object of the present invention to provide electronic parts
of constructions permitting efficient local heating in a short time.
It is an eleventh object of the present invention to provide a
semiconductor laser device of a construction capable of being assembled
without spoiling the efficiency of optical connection secured in a
preparatory assembling process.
The above and other objects, features and advantages of the present
invention will become apparent from the following description taken in
conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a plan view showing the essential portion of a photoelectric
device, in a first embodiment, according to the present invention;
FIG. 2 is a perspective view of the photoelectric device of FIG. 1;
FIG. 3 is a sectional view of the photoelectric device of FIG. 1;
FIG. 4 is a sectional side elevation of the photoelectric device of FIG. 1;
FIG. 5 is a perspective view of the subcarrier of the photoelectric device
of FIG. 1;
FIG. 6 is a plan view of a heat sink provided on the subcarrier of FIG. 5;
FIG. 7 is a fragmentary sectional view of an optical fiber positioning and
fastening member provided on the subcarrier of FIG. 5;
FIG. 8 is a perspective view of assistance in explaining a mode of mounting
a laser diode chip on the subcarrier;
FIG. 9 is a perspective view of a package body;
FIG. 10 is an enlarged fragmentary sectional view showing leads and lead
reinforcing members;
FIG. 11 is a sectional view showing a Peltier element and a subcarrier
mounted on the package body of FIG. 9;
FIG. 12 is a sectional view showing an optical fiber fastened to the
subcarrier;
FIG. 13 is a diagrammatic view showing a manner of fastening an optical
fiber;
FIG. 14 is a perspective view of assistance in explaining a manner of
aligning the optical axes of a laser diode chip and an optical fiber;
FIG. 15 is a perspective view of assistance in explaining directions of
movement of the optical fiber positioning and fastening member;
FIG. 16 is a sectional view showing the essential portion of a
photoelectric device, in a second embodiment, according to the present
invention;
FIG. 17 is a perspective view showing the essential portion of a
photoelectric device, in a third embodiment, according to the present
invention;
FIG. 18 is a perspective view showing the essential portion of a
photoelectric device, in a fourth embodiment, according to the present
invention;
FIG. 19 is a schematic illustration of assistance in explaining a manner of
fastening the leads of a photoelectric device, in a fifth embodiment,
according to the present invention;
FIG. 20 is a perspective view showing the essential portion of the
photoelectric device of FIG. 19;
FIG. 21 is a sectional view showing the essential portion of a
photoelectric device, in a sixth embodiment, according to the present
invention;
FIG. 22 is a sectional view showing the essential portion of a
semiconductor laser device, in a seventh embodiment, according to the
present invention;
FIG. 23 is a general perspective view of the semiconductor laser device of
FIG. 22; and
FIG. 24 is a sectional view showing the positioning pin for positioning and
fixing the optical fiber of a modification of the semiconductor laser
device of FIG. 22 according to the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
A photoelectric device, in a first embodiment, according to the present
invention will be described with reference to FIGS. 1 through 15 as
applied to an originating device incorporating a laser diode chip which
emits a laser light of 1.3 or 1.5 .mu.m in wavelength, for use in optical
communication systems.
Referring to FIGS. 1 to 4, the photoelectric device has a box-shaped
package 1. The package 1 has one end provided with a flange 3 having
through holes 2 for receiving fastening members for fastening the package
1 and the other end provided with a fiber guide 4 for guiding an optical
cable 5. The photoelectric device is of a dual in line construction having
leads 6 arranged in two rows and penetrating the bottom wall of the
package 1. The package 1 consists of a box-shaped package body 7 having an
upper opening and a lid 8 hermetically covering the upper opening of the
package body 7. A base plate 9 is fixed to the upper surface of the bottom
wall of the package body 7; a Peltier element 10 is mounted fixedly on the
base plate 9; a subcarrier 11 is mounted fixedly on the Peltier element
10. The subcarrier 11 comprises a heat sink 14 having a holding part 12
and a supporting part 13 rising from the main surface thereof, a laser
diode chip 15 held on the holding part 12, a tubular positioning and
fixing member 17 for positioning and fixing a optical fiber 16 which
receives the laser light emitted from the laser diode chip 15, a light
receiving element 18 for monitoring the laser light, and a thermistor 19
for monitoring the temperature of the heat sink 14. In the package 1, the
jacket of the optical fiber cable 5 is removed to expose the optical fiber
16 each having a core and a cladding enclosing the core. The free end of
the exposed optical fibers 16 is held by the positioning and fixing member
17 so as to be disposed opposite to one of the light emitting faces of the
laser diode chip 15. The respective electrodes of the elements are
connected to the corresponding leads 6 by conductive wires 20,
respectively. In this photoelectric device, neither a resin nor a
soldering flux is filled in the package 1 to obviate the deterioration of
the characteristics of the photoelectric device attributable to a resin or
a soldering flux.
The laser light emitted from the laser diode chip 15 is transmitted to a
desired place through the optical fiber cable 5 for optical communication.
The output of the laser diode chip 15 is controlled on the basis of the
output of the light receiving element 18 monitoring the laser light for
stable optical communication. The Peltier element 10 is controlled on the
basis of the output of the thermistor 19 monitoring the temperature of the
heat sink 14 so that the laser diode chip 15 is maintained at a fixed
temperature for stable optical communication.
Incidentally, the photoelectric device is characterized in that the optical
fiber 16 is extended slack in a moderate curve between the fiber guide 4
attached to one end of the package body 7 and the positioning and fixing
member 17 of the subcarrier 11 as illustrated in FIGS. 1 and 13. Fixing
members fixing the optical fiber 16 to the subcarrier 11 and to the fiber
guide 4 are formed of a metal such as, for example, covar, and the optical
fiber 16 is formed of a quartz glass having a coefficient of thermal
expansion which is far smaller than those of metals. Therefore, the
optical fiber 16 is unable to follow the variation of the distance between
the fixing positions attributable to the variation of temperature if the
optical fiber 16 is taut between the subcarrier 11 and the fiber guide 4.
Consequently, the optical fiber 16 and the solder fixing the optical fiber
16 are subjected to repeated stress, and thereby the optical fiber 16 is
buckled and the solder is caused to fracture by fatigue making stable
light transmission impossible. When the optical fiber 16 is extended slack
in a moderate curve between the fixing positions, the optical fiber 16 is
allowed to bend as indicated by an alternate long and short dash line or
by an alternate long and two short dashes line in FIG. 13 when one of the
fixing positions is shifted toward the fiber guide 4 from a point A to a
point C or away from the fiber guide 4 from the point A to a point B, so
that the optical fiber 16 is not exposed to an excessive stress and are
not damaged. Accordingly, the optical fiber 16 is not subjected to
repeated stress and hence the solder fixing the optical fiber 16 is not
caused to fracture by fatigue.
The components of the photoelectric device will be described hereinafter.
The photoelectric device is assembled by integrating several
subassemblies. For example, principal subassemblies are the package body 7
and the subcarrier 11. The subassemblies will be described prior to the
description of the general construction of the photoelectric device and a
manner of assembling the same.
As mentioned above, the package 1 consists of the box-shaped package body 7
and the flat lid 8, which are formed of Kovar, namely, an
iron/nickel/cobalt (Fe/Ni/Co) alloy.
Referring to FIG. 9, the package body subassembly comprises the package
body 7 as a principal component, the flange 3, the fiber guide 4, the
leads 6 and the base plate 9. The flange 3 having through holes 2 is
attached to one end of the package body 7. The leads 6 are arranged in two
rows, for example, seven leads 6 in each row, on the bottom wall of the
package body 7 as illustrated in FIG. 10. Each lead 6 penetrates the
bottom wall of the package body 7 and is secured to and insulated from the
bottom wall of the package body 7 by an insulating fixing material 21 such
as, for example, a borosilicate glass. As shown in FIGS. 1 and 2, for
example, the respective left end leads 6 of the front and back rows are
the external terminals of the light receiving element 18, leads 6 second
and third from the left of the front row are the external terminals of the
laser diode chip 15, the leads fourth and fifth from the left of the front
row are the external terminals of the thermistor 19, the respective right
end leads 6 of the front and back row are the external terminals of the
Peltier element 10, and the rest of the leads 6 are idle leads which are
not used in this embodiment.
Wires 20 are connected to the Peltier element 10 by welding or the like
without using a resin or a flux, while the rest of the wires 20 are
connected to the leads 6 by ultrasonic bonding. In an ultrasonic bonding
process, the wires 20 are bonded to the leads 6 by means of ultrasonic
vibrations. Therefore, in connecting the wires 20 to the respective upper
end of the long leads 6. The leads 6 are liable to be vibrated making
satisfactory bonding impossible. Accordingly, in this embodiment, the
leads 6 which are subjected to wire bonding are interconnected by a
reinforcing plate 22 to restrict the vibration of the leads 6 during the
ultrasonic bonding process.
The reinforcing plate 22 is formed so as to stabilize the performance of
the photoelectric device in operation in a high-frequency band. The
reinforcing plate 22 is a partly metallized insulating ceramic plate. That
is, nickel films 23 are formed by plating over the surface of areas where
the reinforcing plate 22 contacts the leads 6, respectively. The leads 6
are fixed firmly to the nickel films 23 by silver solder 24. Accordingly,
the leads 6 are restrained from vibration during the ultrasonic bonding
process. Furthermore, since the nickel films 23 are formed in a fixed
width, area through which electric current flows is increased, so that the
parasitic inductance of the leads 6 is reduced to enable stable optical
communication in a high-frequency band as high as 565 Mbit/sec. For
example, the parasitic inductance on the order of 6 nH of a lead of 0.45
mm in diameter and 7 mm in length is reduced to 3 nH by providing gold
films 23 of a fixed width over the areas where the reinforcing plate 22
contacts the leads 6.
The fiber guide 4 is attached to the wall of the package body 7 opposite
the wall to which the flange 3 is attached. The fiber guide 4 comprises a
tubular outer guide member 25 and an inner guide member 26 fitted in the
inner portion of the outer guide member 25. The inner portion of the outer
guide member 25 penetrates the wall of the package body 7 and the outer
guide member 25 is fixed hermetically to the package body 7 by brazing.
The outer portion of the outer guide member 25 has a thin wall which can
be easily squeezed by caulking. The outer portion of the inner guide
member 26 is inserted in the inner portion of the outer guide member 25,
the inner portion of the inner guide member 26 is reduced in diameter and
the free end of the inner portion of the inner guide member 26 is cut
obliquely to form an inclined surface. Prior to passing the free end of
the optical fiber cable 5 through the fiber guide 4, the jacket of the
optical fiber cable 5 covering the free end of the optical fiber cable 5
is removed to expose the optical fiber 16 along a fixed length so that the
exposed optical fiber 16 extends through the entire length of the inner
guide member 26 and part of the outer guide member 25, while the jacketed
portion of the optical fiber cable 5 extends through the outer portion of
the outer guide member 25.
The base plate 9 is fixed to the inner surface of the bottom wall of the
package body 7 at a position near the wall to which the flange 3 is
attached with a brazing filler material. The Peltier element 10 is fixed
to the upper surface of the base plate 9, and hence it is desirable to
form the base plate 9 of a material having a high thermal conductivity.
The upper and lower electrode plates 27 of the Peltier element 10 are
formed of an alumina ceramic having a coefficient of thermal expansion on
the order of 6.7.times.10.sup.-6 /.degree.C. Therefore, if the base plate
9 is formed of copper having a high thermal conductivity and a coefficient
of thermal expansion of 17.0.times.10.sup.-6 /.degree.C., the solder
joining the electrode plate 27 to the base plate 9 will be caused to break
by fatigue due to the difference between the electrode plate 27 and the
base plate 9 in thermal expansion. Accordingly, to avoid the breakage of
the solder, the base plate 9 is formed, for example, of a copper/tungsten
(Cu/W) alloy having a coefficient of thermal expansion in the range of 6.0
to 7.0.times.10.sup.-6 /.degree.C. and a thermal conductivity in the range
of 0.5 to 0.67 cal/cm.sec..degree.C. One side of the base plate 9 is in
contact with the wall of the package body 7 to transfer heat from the base
plate 9 through the wall of the package body 7 to the flange 3. The
coefficient of thermal expansion of covar forming the bottom wall of the
package body 7 is 5.3.times.10.sup.-6 /.degree.C. The base plate 9 may be
formed of SiC or the like.
Referring to FIGS. 5 and 6, the heat sink 14 is the principal component of
the subcarrier 11. The heat sink 14 is a rectangular plate having the
holding part 12 and the supporting part 13 rising from the main surface
thereof. The holding part 12 extends across the central portion of the
main surface of the heat sink 14 while the supporting part 13 extends in
parallel to the holding part 12 on one side of the heat sink 14. The
holding part 12 and the supporting part 13 are perpendicular to an
inclined axis inclined at an angle .theta. to the center axis of the heat
sink 14. The tubular positioning and fixing member 17 penetrates and is
fixed to the supporting part 13. The positioning and fixing member 17 is
an adjustable tube for guiding the optical fiber 16 and for adjusting the
position of the free ends of the optical fiber 16. Accordingly, the
positioning and fixing member 17 is formed of a material capable of
plastic deformation such as, for example, a nickel alloy. As illustrated
in FIG. 3, the positioning and fixing member 17 has a deformable, thin,
tubular adjusting section 28 passed through the supporting part 13 and a
thick, tubular guide section 29 having a shoulder in abutment with the
side surface of the supporting part 13. A taper hole is formed in the
guide section 29 to facilitate passing the optical fiber 16 through the
positioning and fixing member 17. The inside diameter of the positioning
and fixing member 17 is slightly greater than the diameter of 125 .mu.m of
the optical fiber 16. The free end of the adjusting section 28 is cut
aslant, as will be described hereinafter, to form an inclined surface
having an increased area for soldering the optical fiber 16 to the
adjusting section 28. A drop of solder 30 not having any flux is attached
beforehand to the inclined surface of the adjusting section 28 as shown in
FIG. 7. The drop of solder 30 is attached to the inclined surface through
steps of passing a dummy wire 31 having a diameter slightly greater than
the diameter of 125 .mu.m of the optical fiber 16 such as, for example, a
piano wire of 150 .mu.m in diameter, through the positioning and fixing
member 17, attaching a drop of solder to the free end of the adjusting
section 28, drawing out the dummy wire 31, i.e., the piano wire, from the
positioning and fixing member 17 as shown in FIG. 7, and removing the flux
adhering to the drop of solder 30 through ultrasonic washing.
A submount 32 is attached fixedly by a fluxless low temperature
melting-solder such as, for example, a Pb/Sn/In solder, to the holding
part 12 at a position on the prolongation of the adjusting section 28 of
the positioning and fixing member 17. The submount 32 is formed of an
insulating SiC having a high thermal conductivity and a coefficient
.alpha. of thermal expansion of 3.7.times.10.sup.-6 /.degree.C. which is
approximate to those of Si and a compound semiconductor. As shown in FIG.
8, the main surface of the submount 32 is metallized to form a metal layer
33. Au/Sn eutectic layers 34 and 35 are formed on the metal layer 33, and
the laser diode chip 15 and a gold pedestal 36 are attached fixedly to the
upper Au/Sn eutectic layers 34 and 35, respectively. The eutectic layers
34 and 35 may be substituted by a Pb layers or Pb/Sn layers. Thus, the
lower electrode of the laser diode chip 15 is connected electrically
through the metal layer 33 to the pedestal 36 and as shown in FIG. 8, is
fixed to the submount 32 with the resonator 38 which emits a laser light
37 positioned apart from the submount 32, namely, with the P-surface of
the pn laser diode facing up. The upper electrode of the laser diode chip
15 is connected electrically to the holding part 12 by two wires 20, while
the pedestal 36 is connected electrically to the leads 6 by two wires 20
as shown in FIGS. 1 and 2. Such a manner of electrical connection of the
laser diode chip 15 and the holding part 12 and that of the pedestal 36
and the leads 6 are necessary to change the polarity to use the driving
side of the laser diode chip 15 in driving the same by a fast transistor.
The laser diode chip 15 is mounted on the submount 32, and then the
submount 32 is fixed to the holding part 12.
In this embodiment, the laser diode chip 1 | | |