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Method for calibrating a coordinate measuring machine and the like and system therefor    
United States Patent4819195   
Link to this pagehttp://www.wikipatents.com/4819195.html
Inventor(s)Bell; Frederick K. (Centerville, OH); Brazier; Gary E. (Brookville, OH); Brown; Stephen N. (Dayton, OH)
AbstractMethod (FIGS. 4A through 4C) and system (FIG. 3) are disclosed for automatically calibrating a coordinate measuring machine (CMM) (10). The system guides an operator through instrument set-up and data collection procedures. The system automatically converts the collected data into error compensation or axis correction data which represents 21 different geometry errors (i.e. pitch, yaw, roll etc.) of the CMM (10). The error compensation data is then transferred to a CMM measurement processor (36) for subsequent use by the CMM (10) during operation thereof to thereby compensate the CMM (10) for its entire measuring volume (102).
   














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Inventor     Bell; Frederick K. (Centerville, OH); Brazier; Gary E. (Brookville, OH); Brown; Stephen N. (Dayton, OH)
Owner/Assignee     The Warner & Swasey Company (Cleveland, OH)
Patent assignment
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Publication Date     April 4, 1989
Application Number     07/004,434
PAIR File History     Application Data   Transaction History
Image File Wrapper   Patent Term   Fees
Litigation
Filing Date     January 20, 1987
US Classification     702/95 33/503 33/505 33/556 318/632 700/193
Int'l Classification     G01C 025/00 G06F 015/46 G05D 023/275
Examiner     Lall; Parshotam S.
Assistant Examiner     Dixon; Joseph L.
Attorney/Law Firm     Syrowik; David R. Eifler; Raymond J. ,
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Priority Data    
USPTO Field of Search     364/167 364/168 364/170 364/474 364/550 364/551 364/559 364/560 364/561 364/562 364/563 364/571 33/503 33/505 33/545 33/546 33/553 33/554 33/555 33/556 33/557 33/558 318/632
Patent Tags     calibrating coordinate measuring like and
   
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ReferenceRelevancyCommentsReferenceRelevancyComments
4727653
Fujitani
33/503
Mar,1988

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4679159
Yamazaki
700/161
Jul,1987

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4636960
McMurtry
700/193
Jan,1987

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4611293
Hatch
702/92
Sep,1986

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4587622
Herzog
702/97
May,1986

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4583159
Kanemoto
700/195
Apr,1986

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4542467
McMurtry
700/195
Sep,1985

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4437151
Hurt
702/95
Mar,1984

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4370720
Hyatt
700/194
Jan,1983

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Gerber
2/2.5
Jan,1971

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We claim:

1. Method for calibrating a CMM (10) having a measuring volume (102), the CMM including a probe shaft (22) having three axes of motion (X, Y and Z), a probe (14) supported on a distal end of the probe shaft, devices for providing a position signal in determining the position of the probe for each of the axes of motion in the coordinate frame of the CMM and control means (36) for receiving the position signals and for providing a coordinate measurement signal which identifies the position of the probe, the method including the steps of: moving (FIGURES 4A through 4C) the CMM from a first predetermined position to a plurality of other predetermined positions along the length of each of the axes of motion so as to generate position signals in the coordinate frame of the CMM; measuring (FIGS. 4A through 4C) the positions to obtain measured calibration data; processing (FIGS. 4A through 4C) the position signals and the calibration data, said step of processing including the step of correlating (FIGS. 4A through 4C) the position signals and the calibration data to obtain axis correction data for each of said predetermined positions; said step of processing further providing squareness data (84, 94 and 96) representing the orthogoninality of the axes, storing (108) the axis correction data in a form which can be utilized by the control means during operation of the CMM to compensate the CMM for the entire measuring volume and wherein the improvement comprises the steps of:

(a) installing (FIG. 5A) an artifact on the CMM in a first position within a plane defined by a first pair of the axes of motion, the artifact having two ends separated by a distance;

(b) moving (FIG. 5A) the artifact to a second position within the plane;

(c) moving (86) the probe so that the CMM generates coordinate data representing the positions defined by the ends of the artifact in each of the positions; and

(d) repeating steps (a) through (c) for second and third pairs of the axes of motion the coordinate data being utilized in said step of processing to provide the squareness data for calibrating the CMM.

2. The method as claim as claimed in claim 1 wherein the measured calibration data includes nine sets of rotation data (48 through 64).

3. The method as claimed in claim 2 wherein the rotation data is measured in seconds and wherein said step of processing includes the step of converting (48 through 64) the rotation data from seconds into radians.

4. The method as claimed in claim 2, wherein said step of processing further provides six sets of straightness data (72 through 82), each set of straightness data representing the lack of straightness of one axis of motion with respect to one of the other axes of motion.

5. The method as claimed in clam 4 wherein said step of processing includes the steps of: translating (72) at least one set of the straightness data to a predetermined point in the sets of the rotation data; and normalizing (72) at least one set of the straightness data to a best fit line.

6. The method as claim in claim 5 wherein each of the sets of straightness data is normalized to a best fit line.

7. The method as claimed in claim 2 wherein said step of processing further provides three sets of scale error data (66, 68 and 70), each set of scale error data representing error in one of the devices.

8. The method as claimed in claim 7, wherein said step of processing includes the step of translating (66) at least one set of scale error data to a reference point in the machine coordinate frame as a function of said rotation data.

9. The method as claimed in claim 1 wherein the artifact comprises a ball bar having first and second ends separated by a fixed distance and wherein step (c) comprises coupling the probe to both ends of the ball bar so that the coordinate data represents positions defined by the ends of the ball bars.

10. The method as claimed in claim 1, or claim 9 wherein said step of processing includes the step of calculating (90) the sequences for each of the planes from the coordinate data.

11. The method as claimed in claim 1 wherein the method further comprises the steps of:

installing (FIG. 7A) a second artifact on he CMM data predetermined location within the measuring volume; and

moving (86) the probe so that the CMM generates coordinate data representing the position of the second artifact.

12. The method as claimed in claim 11 wherein the second artifact comprises a calibration sphere (100) wherein the step of moving comprises coupling the probe to a plurality of positions on the sphere.

13. The method as claimed in claim 12 wherein said step of processing includes the step of calculating the axis correction data from the coordinate data.

14. A system (FIG. 3) for calibrating a CMM (10) having a measuring volume (102), the CMM including a probe shaft (22) having at least one axis of motion (X, Y or Z), a device for providing a position signal in determining the position of the probe for the axis of motion in the coordinate frame of the CMM and control means (36) for receiving the position signal and for providing a coordinate measurement signal, the system comprising at least one calibration device (32) for measuring the position of the CMM in a standard coordinate frame having a standard axis system at a plurality of predetermined positions along he axis of motion of the CMM to obtain measured calibration data, the device generating the position signal in the coordinate frame of the CMM; and data processing means (34) for processing the position signal and the calibration data, the improvement comprising:

the data processing means including means (FIGS. 4A through 4C) for correlating the position signal and the calibration data to obtain axis correction data for each of said predetermined positions; and

storage means (11)) for storing the axis correction data in a form which can be utilized by the control means during operation of the CMM for the entire measuring volume.

15. A system (FIG. 3) for calibrating a CMM (10) having a measuring volume, the CMM including a probe shaft (22) having three axes of motion (X,Y,Z) devices for providing a position signal for each of the axes of motion in the coordinate frame of the CMM and control means (36) for receiving the position signals and for providing a coordinate measurement signal, the system comprising at least one calibration device (32) for measuring the position of the CMM in a standard coordinate frame having a standard axis system at a plurality of predetermined positions of the CMM to obtain measured calibration data, the devices generating feedback data in the coordinate frame of the CMM; and data processing means (34) for processing the position signals and the calibration data, the improvement comprising:

the data processing means including means (FIGS. 4A through 4C) for correlating the position signals and the calibration data to obtain axis correction data for each of said predetermined positions; and

storage means (110) for storing the axis correction data in a form which can be utilized by the control means during operation of the CMM to compensate the CMM for the entire measuring volume.

16. The invention as claimed in claim 1 or claim 15 wherein said axis correction data include: nine sets of compensated rotation data (48 through 64) representing the amount of angular rotation about each of the axes for each of the axes; squareness data (84, 94, 96) representing the orthogonality of three different pairs of the axes; six sets of normalized straightness data (72 through 82) for said axes; and three sets of scale error data (66, 68, 70) representing errors in the devices.
 Description Submit all comments and votes
 


This invention relates to method and system for calibrating a coordinate measuring machine (CMM) and the like and, in particular, to method and system for calibrating a CMM whereby, as a result of the calibration, the CMM is compensated during its operation for its entire measuring volume.

With the advent of numerically controlled machine tools, the demand has grown for a means to support this equipment with faster first-piece inspection and, in many cases, 100% dimensional inspection. To fill this need, the CMM was developed in the early 1960's. A CMM can also be used as a layout machine before machining and for checking feature locations after machining. In many cases the CMM plays a vital role in the mechanization of the inspection process.

Since its development, the CMM has been increasingly used throughout the automotive and aerospace industries. Although it was once considered an exotic tool for ensuring quality control, the CMM is now becoming a mandatory piece of equipment for both the large manufacturing plant and the small job shop. This is primarily due to the need for an accurate measuring instrument and detailed documentation of the components being produced.

Currently, the CMM is being used in one of three ways in manufacturing. The simplest approach is to place the CMM at the end of the production line or in an inspection area. With this approach, the CMM is used to inspect the first part of a production run to verify the machine setup. Once the setup is verified, it then measures parts on a random basis. For many applications, this permits the best approach to inspection.

Another approach is to incorporate the CMM between two work centers and then measure 100% of the parts produced at the first center before any secondary operations are performed at the second work center. This approach is possible because CMMs are capable of measuring three-dimensional geometry and making many different measurements within a short period of time. When this approach is used, the CMM indirectly controls the production process. In this setting, however, the CMM must be "hardened" to perform in the shop environment for part inspection.

A third approach integrates the CMM into the production line. This permits the CMM to directly control the production process. In operation, an integrated system would measure the workpiece, compare the measurements with required dimensions and, if necessary, automatically adjust the machine controls so that the part is manufactured within the required specifications.

A basic CMM consists of four elements: (1) the machine structure, which basically is an X-Y-Z positioning device; (2) the probing system used to detect part surfaces and provide input to a control system; (3) the control system including a machine control and computer hardware; and (4) the software for three-dimensional geometry analysis. The measuring envelope or volume is defined by the X, Y and Z travel of the machine.

Although a variety of machine designs and configurations exist, all designs incorporate the same fundamental concept of three coordinate axes. Each axis is ideally square in its own relationship to the reference plane created by the other two axes. Each axis is fitted with a linear measurement transducer for positional feedback. This allows position displays within the envelope to be independent of any fixed reference point.

The most common reference systems in use are steel and glass scales Both systems utilize noncontact, electro-optical reader heads for determining the exact position of the machine. Steel reference systems are widely used in shop environments because the difference in the coefficient of expansion between the steel scale and workpiece is minimal. Glass scale reference systems are generally used in controlled environments because of the difference in the coefficient of expansion between glass and the metal workpiece.

The worktable of the machine generally contains tapped holes to facilitate the clamping and locating of parts. It may be made from granite or steel because of its stability in various environments.

Electronic or solid probes are inserted into the probe arm or shaft&, which is supported by cantilever, bridge gantry, column members or other CMM types. Probe arm movement is guided by means of frictionless air bearings or mechanical bearings.

Coordinate measuring is typically a two or three-dimensional process that determines the position of holes, surfaces, centerlines, and slopes. Up to six sides of a cube-shaped part may be inspected without repositioning the part.

In a typical operation, the part is placed on the table of the CMM at a random location. Generally, this location is approximately central to the machine axes to access all of the part surfaces to be inspected with the probe. Depending on the size of the part and the type of probe used, the part may need to be clamped to the machine table. If multiple inspections of similar parts are required, a reference location point may be established with a reference precision cube or sphere. The probe is then moved, manually or under machine control, until contact is made with desired part features. Reader heads, traveling on each axis along built-in axis measuring scales, transfer the instantaneous machine position through the digital display and to the computer interface. The dimensional and geometric elements may then be calculated, compared, and evaluated, or stored, or printed out as required.

Some of the advantages of using CMMs over conventional gaging techniques are flexibility, reduced setup time, improved accuracy, reduced operator influence, and improved productivity.

CMMs do not need to be dedicated to any single or particular measuring task. They can measure practically any dimensional characteristic of virtually any part configuration, including cams, gears and contoured surfaces.

Establishing part alignment and appropriate reference points are very time consuming with conventional surface-plate inspection techniques. These procedures are greatly simplified or virtually eliminated through software available on computer-assisted or computer-controlled CMMs.

Such software allows the operator to define the part's orientation on the CMM, and all coordinate data are subsequently automatically corrected for any misalignment between the part reference system and the machine coordinates. A CMM with sophisticated software can inspect parts in a single setup without the need to orient the part for access to all features even when a fourth axis (rotary table) is employed.

All measurements on a CMM are taken from a common geometrically fixed measuring system, eliminating the introduction and accumulation of errors that can result with hard-gage inspection methods and transfer techniques. Moreover, measuring all significant features of a part in one setup prevents the introduction of errors due to setup changes.

The use of digital readouts eliminates the subjective interpretation of readings common with dial or vernier-type measuring devices. Operator "feel" is virtually eliminated with modern electronic probe systems All CMMs have canned software routines for typical part features, such as bores or center distances. In the part-program-assisted mode, the operator positions the machine; once the initial position has been set, the machine is under the control of a program that eliminates operator choice. In the computer numerically controlled (CNC) mode, motor-driven machines run totally unattended by operators. Also, automatic data recording, available on most machines, prevents errors in transcribing readings to the inspection report. This all adds up to the fact that less skilled operators can be readily instructed to perform relatively complex inspection procedures

All the factors previously mentioned help to make CMMs more productive than conventional inspection techniques. Further dramatic productivity improvements are realized through the computational and analytical capabilities of associated data handling systems, including calculators and all levels of computers.

A variety of machine configurations are available from the manufacturers of CMMs. Each configuration has advantages that make it suitable for particular applications. A total of 11 different machine configurations exist; however, some of these configurations are modifications of one of the five primary configurations: cantilever, bride, column, gantry, and horizontal arm.

The utility of a CMM depends largely on the nature of the probing device. Three types of probes are commonly used: (1) hard; (2) electronic, and (3) noncontact. A probe is selected according to the dimensional and geometrical requirements of the inspection process.

Various accessories used in conjunction with the probes enhance the capability of CMMs. For example, indexable probe heads permit orienting the measuring probe in horizontal and vertical planes to keep the probe normal to the plane desired. This feature gives the CMM the capability to reach and inspect geometrical elements that are not aligned to the machine axes. In addition, the use of indexable heads is generally required when inspecting and scanning complex surfaces. Indexable probe heads, however, tend to shrink CMM measuring volume.

A microprocessor control system is usually supplied with indexable heads to operate as a power drive and intelligent interface between machine control and indexing heads.

Rotary tables are especially useful when inspecting complex, multifaced parts or workpieces with a rotation axis such as cams, gears, and rotors. A variety of sizes are available to accommodate different size workpieces. Rotary tables expand CMM measuring volume.

Rotary tables can be controlled manually or automatically. When automatically controlled tables are used, special software programs interact with the machine controls to control table movement and provide misalignment compensation.

Besides their physical configurations, CMMs can also be classified according to their mode of operation: manual, manual computer-assisted, motorized computer-assisted, and direct computer controlled. Manual machines have a free-floating, solid or electronic or non-contact probe that the operator moves along the machine's coordinate axes to establish each measurement. Digital readouts, associated with each axis, provide the measurement values that the operator notes and records manually. In some instances, a simple digital printout device may be used to record the readings.

Manual computer-assisted CMMs use a data processing system to manipulate the measurements which are still made by manually moving the probe through a series of measurement locations. Solid or electronic or non-contact probes may be used on this type of machine. The data processing may be accomplished by a special microprocessor-based digital readout, a programmable calculator, or a full-fledged computer.

Depending on the sophistication of the data processing system and associated software, computer-assisted CMMs perform functions ranging from simple inch to millimeter conversion to automatic three-dimensional compensation for misalignment and a host of geometric and analytical measuring tasks. Storing of predetermined program sequences and operator prompting are also available to create part programs. The part program is generated and stored in the computer, which determines the inspection sequence and compares measured results with nominal values and tolerances for automatic GO, NOT GO decision making.

In effect, the computer system can carry out all the calculations and analyses required to arrive at dimensional and tolerance evaluations and can lead the operator through a prescribed series of positioning and measuring moves. Data recording is usually included with computer-assisted CMMs.

A motorized computer-assisted CMM has all the features of a computer-assisted CMM, but uses power-operated motions under the control of the operator, who uses a joystick. Most motorized CMMs also provide means for disengaging the power drive to permit manual manipulation of the machine motions. Some machines use direct-current servomotors and pneumatically operated friction clutches to reduce the effect of collisions, and most permit drive disengagement for manual movement

Direct computer controlled (DCC) CMMs are equivalent to CNC machine tools. A computer controls all the motions of a motorized CMM. In addition, the computer also performs all the data processing functions of the most sophisticated computer-assisted CMM. Both control and measuring cycles are under program control. Most DCC machines offer various programming options, including program storage and, in some instances, off-line programming capability.

Beyond the microprocessor-based digital readouts, which were initially developed to provide basic measurement data processing capabilities for manual coordinate measuring machines, there is also a need to solve sophisticated measuring problems involving three-dimensional geometry and to provide more flexible general-purpose programming capabilities to solve special measuring problems. Many CMM manufacturers offer a series of data processing equipment for such purposes, including full DCC capability.

The key to the productivity of all forms of computer-assisted CMMs lies in the sophistication and ease of use of the associated software. Software is the most important element in any coordinate measuring system because its power determines how many part features can be measured and its ease of use determines the extent to which the machine is used.

The functional capabilities of CMM software depend on the number and type of application programs available. Virtually all CMMs offer some means of compensation for misalignment between the part reference system and the machine coordinates by probing selected points. Some machines are limited to alignment in one plane, while most machines provide full three-dimensional alignment. Once the designated points have been taken, the program calculates the misalignment and applies the appropriate correction to all subsequent measurement readings.

Conversion between Cartesian, polar, and, in some instances, spherical coordinate systems is also commonly handled. Most systems also calculate the deviation of measurements from nominal dimensions of the part stored in memory and flag out-of-tolerance conditions.

Geometric functions handled by the CMM software define geometric elements--such as points, lines, planes, cylinders, spheres and cones--from a series of point measurements and solve measurement problems dealing with the interaction of such geometric elements. Such software can determine, for example, the intersection of two circles established on the basis of a selected number of measurements or it can establish the angle of intersection of two surfaces.

Many software packages also provide a means for evaluating geometric tolerance conditions by determining various types cf form and positional relationships (such as flatness, straightness, circularity, parallelism, or squareness) for single features and related groups of features

Best-fit programs can identify the location of a part finished to size within a rough part from which it is to be made, to optimize the machining-allowance distribution: maximum material condition (MMC) programs evaluate features dimensioned according to MMC principles.

Other application programs include automatic part scanning for digitized profiles and a variety of special programs to handle the inspection of special shapes such as gears and cams. Statistical analysis software available provides for graphic data display, including histograms.

In the simplest form of CMM, a single transducer mounted parallel to each axis is able to determine the position of the probe tip relative to the datum point, which may conveniently be the point at which the axes intersect, or any other suitable location.

There are several possible sources of error if such a technique is employed. Lack of straightness in movement and of orthogonality of the axes are major sources of such errors. A further cause of error is the angular rotation of the carriages about axes perpendicular to their directions of movement. Such errors, often referred to as Abbe errors, depend not only upon rotation, but also upon the lateral offset between the probe tip and the transducer measuring in that dimension, and are obviously variable with that offset. Other sources of error exist, such as errors in the linear transducers themselves.

Many attempts have been made to compensate for error. For example, it is known to introduce a deliberate and known error into the transducers by various means. However, such corrections only apply for a given location in the measuring volume. An alternative technique is to "calibrate" the machine, measuring the errors existing at various points when the machine is actually used. As may be imagined, such a calibration process can be extremely lengthy, especially for a large machine and an enormous amount of storage is necessary.

One prior method for determining axis misalignment is as follows:

(a) positioning a granite cube on the CMM table with a first side aligned with the CMM X axis and then measuring the variation in the CMM-generated Y coordinate as the CMM probe is moved over the first side, then adjusting the cube position until no Y variation is produced.

(b) Move the CMM probe over a second side (perpendicular to the X axis) and measure the variation in the CMM-generated X coordinate. The ratio of the X coordinate variation to the Y coordinate variation is a measure of the misalignment between the CMM X and Y axes.

(c) Measure Y and Z axis misalignment by repeating steps (a) and (b), using appropriate sides of the granite block and substituting Y for X and Z for Y in steps (a) and (b).

(d) Measure X and Z misalignment by repeating steps (a) and (b), using another pair of sides and substituting Y for X and Z for Y.

In addition to being time-consuming, this granite square method is subject to errors caused by imprecise positioning of the granite square on the CMM table.

Another time-consuming method is used to measure axis scale errors and involves the use of a laser and the following steps:

(a) A reflector for a laser in&interferometer is attached to the CMM in place of the CMM probe.

(b) The Y and Z axes of the CMM are locked so that only movement along the X axis is allowed.

(c) A laser interferometer is aligned so that its beam travels parallel to the X axis and strikes the reflector.

(d) The reflector is then moved along the X axis of the CMM and CMM-generated X axis readings and the interferometer readings are obtained. From these readings the scale error in the CMM X axis can be determined.

(e) Steps a-d are then repeated for the Y and Z axes.

Also known are CMM inspection procedures which involve the use of artifacts such as the barbell and the Bryan Gauge. The data generated by the CMM during these procedures is used on a pass-fail basis. In other words, if use of the above artifacts indicates that adjustment is required, then the previously described granite block or laser interferometer procedures are used in making the needed adjustments.

Another method used to calibrate a CMM includes the steps of installing a CMM artifact on a CMM table, coupling the CMM probe to the artifact and storing a plurality of CMM-generated cartesian coordinate data points for a plurality of positions defined by the artifact. A data processor is programmed to generate a set of distance equations in terms of the CMM generated cartesian coordinates, a known diameter of the artifact and a plurality of unknown CMM axis alignment error and scale error factors. This set of equations is then solved for the unknown error factors, from which can be determined the necessary CMM adjustments. The CMM can then be properly aligned by making the indicated adjustments. In one version of this procedure, the artifact may be a ball bar. In another version, the artifact may be a Bryan Gauge. An example of this method is found in U.S. Pat. No. 4,437,151 issued Mar. 13, 1984 and entitled Coordinate Measuring Machine Inspection and Adjustment Method. Another prior art approach for applying software error compensation to a coordinate measuring machine is disclosed in the article entitled: "Error Compensation of Coordinate Measuring Machines" dated January, 1985 and published in the Annals of the CIRP by G. Zhang et al. The Zhang system is based on a rigid body model of workpiece motion in the machine coordinate frame. By taking a relatively small set of data for each axis, errors are computed throughout the full workzone. Squareness data is determined using linear displacement measurements along the machine diagonals. The error compensation computation is incorporated into the machine position reading subroutines to automatically produce compensated readings.

SUMMARY OF THE INVENTION

One advantage of the present invention is to provide an improved method and system for calibrating a CMM and the like in a reliable, accurate and cost-efficient manner in a manufacturing environment.

The CMM calibrating method of the present invention includes the steps of correlating feedback data and calibration data to obtain axis correction data for each predetermined position along the entire axis of motion. The axis correction data is then stored in a form which can be utilized by a control means during operation of the CMM to compensate the CMM for the entire measuring volume of the CMM.

The CMM calibrating system of the present invention includes data processing means, including means for correlating feedback data and calibration data to obtain axis correction data for each of the predetermined position along the axes of motion of the CMM. Storage means stores the access correction data in a form which can be utilized by a control means during operation of the CMM to compensate the CMM for the entire measuring volume of the CMM.

Preferably the CMM includes a probe shaft having three degrees of freedom representing axes of motion of the CMM. Also, preferably, all geometry errors (i.e. 21) of the CMM are corrected electronically prior to actual use of the CMM, so that the corrections can be performed in real time. As a result, the need to manufacture and assemble a totally accurate machine is eliminated.

Other advantages of the method and system include the reduction in time in final assembly of the CMM and allowing increased manufacturing tolerances for many of the components of the CMM.

The above advantages and other features of the present invention are readily apparent from the following detailed description when taken in connection with the accompanying drawings.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 is a perspective view of a typical CMM with which the present invention is utilized;

FIG. 2 is a representation of the three-dimensional coordinate system of the CMM of FIG. 1;

FIG. 3 is a block diagram of the system for automatically calibrating the CMM;

FIGS. 4A through 4C is a flowchart illustrating the various steps taken by the system of FIG. 4 to calibrate the CMM;

FIGS. 5A through 5C illustrate two different positions of an artifact, such as a ball bar, in each of the coordinate planes of the CMM;

FIG. 6 is a flowchart illustrating the various operating steps taken to determine the squareness of the CMM;

FIGS. 7A and 7B illustrate the three-dimensional coordinate system and measuring volume of the CMM of FIG. 1, together with a probe subcoordinate system;

FIG. 8 is a block diagram illustrating the method and system for determining position within the measuring volume of the CMM; and

FIG. 9 is a set of equations to be solved to determine the corrected position within the measuring volume for a machine described in FIG. 1 whose axis coordinates are defined in FIGS. 7A and 7B; similar equations could be developed for other types of CMM configurations.

Referring to FIG. 1, there is illustrated a coordinate measuring machine (CMM) collectively indicated by reference numeral 10. The CMM generally includes an X-Y-Z positioning device, generally indicated at 12; a probe 14; and a control system, generally indicated at 16. The control system 16 includes a machine control, generally indicated at 18; computer hardware, generally indicated at 20; and software for programming the computer hardware 20.

The probe 14 is inserted into a Z-axis probe arm or shaft 22 of the device 12. The device 12 includes a base or work table 26 which contains tapped holes to facilitate the clamping and locating of parts.

The device 12 also includes a backrail 28 which slidably supports an X-axis carriage 30 by preloaded air bearings, which also guide the carriage 30.

An overhead Y-axis carriage 32 moves relative to the X-axis carriage 30 and is also supported and guided by preloaded air bearings on the X-axis. The probe shaft 22, in turn, moves relative to the Y-axis carriage 32 and is supported and guided thereon by preloaded air bearings.

While a conventional cantilever CMM has been described, it is to be understood that other types of CMMs may be utilized with the present invention based on a set of equations defined for the particular CMM being corrected.

Referring to FIG. 2, the X-Y-Z coordinate system depicted therein illustrates typical errors caused by angular rotation of the carriages 30 and 32 and the shaft 22 about the axes cf the three axis system. Three such errors exist for each of the axes. Consequently, nine such errors exist for the coordinate system of FIG. 2 even though the mechanical components of the device 12 are manufactured and assembled in a highly accurate fashion. Because of these rotation errors and other errors, position error still exists as the device 12 is moved to different spots within its measuring volume 102 as shown in FIG. 7. Angular rotation errors about each of the axes are defined as follows: A(x)=X-roll; A(y)=Y-pitch; A(z)=Z-pitch; B(x)=X-pitch; B(y)=Y-roll; B(z)=Z-yaw; C(x)=X-yaw; C(y)=Y-yaw; and C(z)=Z-roll.

Lack of straightness in movement along the axes of FIG. 2 is also a source of error. For each axis there typically exists a lack of straightness with respect to the other two axes, thereby resulting in six errors with respect to straightness of the device 12. Straightness errors are defined as follows: X(y)=Y-straightness in X direction; X(z)=Z-straightness in X direction; Y(x)=X-straightness in Y direction; Y(z)=Z-straightness in Y direction; Z(x)=X-straightness in Z direction; and Z(y)=Y-straightness in Z direction.

Although oftentimes a less serious source of error, axis scale errors can become significant. Such errors are defined as follows: X(x)=scale errors in X; Y(y)=scale errors in Y; and Z(z)=scale errors in Z.

Another possible source of error is lack of orthogonality of the X,Y, and Z axes. Such error is typically given as the angular deviation from 90 degrees as follows: P.sub.yx =y-x squareness; P.sub.zx =z-x squareness; and P.sub.zy =z-y squareness.

Consequently, it can be seen that there are 21 different geometry errors of the device 12, all of which, except for the squareness errors vary depending on the position of the device 12 within its measuring volume 102.

Finally, another possible source of errors are probe offset errors, which are determined from the angular errors and probe offsets, S.sub.x, S.sub.y and S.sub.z of FIG. 7B. The probe 14 is used to measure the center position of a sphere 100. Probe offsets are then determined by vector subtraction of vectors A and B of FIG. 7A.

Referring now to FIG. 3, there is illustrated in block diagram form a system for calibrating the 10. The system 10 includes calibration equipment 32, such as a laser interferometer with linear, angle and straightness optics. Preferably, the laser comprises an HP 5528A laser. The calibration equipment 32 also includes electronic levels with a level meter and an A to D HPIB interface The calibration equipment 32 further includes a ball bar as well as a vertical straight edge and probe. Preferably, the electronic levels comprise Wyler electronic levels and the probe comprises a Renishaw TP-2, PH-6 probe, including a 200 millimeter extension. Finally, the calibration equipment 32 includes probe adaptors for the laser optics, the level and the PH-6 probe.

The calibration equipment 32, in general, is used by factory personnel to measure