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Module for packaging semiconductor integrated circuit chips on a base substrate
   
Document Number
US Patent 4866507
Issued Date
September 12, 1989
Link
Inventors
Nihal; Perwaiz (Hopewell Junction, NY)
Ozmat; Burhan (Peekskill, NY)
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Abstract
An integrated circuit chip packaging structure, preferably having a semiconductor base substrate, i.e., silicon or gallium arsenide, alternating insulation and conductive layers on the base structure, at least two conductive layers being patterned into thin film wiring (i.e., thin film copper of approximately 5 microns), semiconductor integrated circuit chips connected to the upper-most patterned conductive layer, and means to connected the packaging structure to the next level of packaging (i.e., board or card). The thin film wiring layers typically each having coplanar ground, power and signal lines, with at least one power or ground line existing between coplanar signal lines to minimize cross talk. To facilitate efficient power distribution, lines of specific power levels of the patterned planes are connected to lines of the same power level on other patterned planes to form three dimensional power planes. To reduce package capacitance and keep the RC constant low, a personalized reference plane is incorporated. The personalized plane has insulating regions extending at least partially through the plane at predetermined locations that coincide with long signal lines on the wiring layers. The combined package provides a packaging alternative that has excellent electrical performance (i.e., speed, low RC constant, efficient power distribution), high density and thermal expansion matching between the underlying semiconductor structure and semiconductor chips mounted on the package. A high yield process for manufacturing the package is also disclosed.
Drawing
Module for packaging semiconductor integrated circuit chips on a base substrate - US Patent 4866507 Drawing
Drawing from US Patent 4866507
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Number of Claims:
37
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Published
September 12, 1989
Application Number
06/864,228
Filed
May 19, 1986
US Classification
174/258   174/250 257/659 257/664 257/684 257/700 257/E23.079 257/E23.173 361/748 361/784
Int'l Classification
H01L   23/48   (20060101)   H01L   23/52   (20060101)   H01L   23/538   (20060101)   H01L   23/50   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
357/74   357/75   357/40   357/45   174/68.5   361/397   361/412  
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Description
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