A one-laser technique for optical time-delay beamsteering of a microwave phased-array antenna in transmit-and- receive modes. Arrays of reflective, fiber Bragg gratings are employed and a modulated, wavelength-tuned laser excites prism-shaped arrays of chirped or single-frequency gratings deployed inside a set of N parallel fibers. The fiber gratings can be replaced by waveguided gratings within a semiconductor chip for operation at high microwave frequencies.

A compact, liquid crystal-based acousto-optical control system for large (>1000 elements) phase-based phased array antennas includes a laser source providing polarized laser beams processed in an in-line interferometric optical architecture that uses two acousto-optic deflectors (AODs) driven by a microwave signal that preferably has a frequency of one-half the desired radar carrier frequency. The AODs and associated polarization rotators generate a plurality of optical signal pairs, each pair having one positive and one negative first order doppler shifted light beam, the positive and negative doppler shifted beams being orthogonally linearly polarized. A phase delay is introduced in a predetermined one of the light beams in each optical signal pair via electrical control of an array of birefringent-mode nematic liquid crystal cells in a spatial light modulator (SLM), while the non-phase delayed light beam in each pair serves as a reference for interferometric detection. After passing through the SLM, the phase-delayed light beam is combined with the unshifted light beam via a 45 degree orientation polarizer; this signal is then used via heterodyne detection by a photodiode to generate the radar carrier with the appropriate phase shift. The system operates in both the antenna transmit and receive modes, and provides a wide (GHz) tunable bandwidth, intrapulse beamforming, and analog phase control.

A SAR radar has an optical processor which uses an electrical-signal-to-light modulator. The modulator includes a tapped delay line which may be either analog or digital, and the signals tapped from the delay line are applied to an array of temporary storage elements, which in the case of analog signals may be a capacitive sample-and-hold, or for digital signals may include storage registers. In order to improve the signal-to-noise ratio (SNR) by comparison with a processor using an acoustic modulator, the signals tapped from the delay line are sampled at a display sampling rate, which is very low by comparison with the signal sampling rate or the highest frequency of interest, and the sampled signals are held until the next following display rate pulse. The signals held in the temporary storage elements are applied to the modulator elements, so that the optical pattern remains fixed for relatively long periods of time during which the optical processing can integrate photons for improved SNR.

A compact, stable, and optically efficient two dimensional spatial light modulator-based electro-optical control system for large (>1000 elements) phase-based phased array antennas uses an acousto-optic modulator (AOM) driven by a microwave signal at the desired radar carrier. A phase delay is introduced via electrical control of an array of birefringent-mode nematic liquid crystal cells that selectively phase delays a polarized signal light beam, while a non-phase delayed doppler shifted polarized beam is used as a reference for microwave signal generation via interferometric detection through a photodiode. The optical design provides a very fast (in nsecs) wideband carrier hopping capability. An alternative embodiment of the invention uses a deformable mirror device (DMD) SLM to introduce the required phase shifts.

A method of determining a feature-forming variant, such as focus or exposure, for a lithographic system or the like includes Fourier processing that extracts a figure of merit. In a preferred embodiment, the lithographic system fabricates a series of formations of a single pattern. An optical image of each exposure is formed. A Fourier power spectrum is determined for each optical image. An angular power function is extracted from each power spectrum by quantifying optical power along lines originating at various angles from an origin of the power spectrum. With regard to axes of maximum power, the distribution of on-axes and off-axes power is quantified for each angular power function. An optimum for the lithographic system is determined based upon the data extracted from the angular power functions. Preferably, the extraction of an angular power function from the associated Fourier power spectrum is an averaging of the optical power along selected portions of the lines originating from the origin, thereby improving the signal-to-noise ratio.