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Laser interferometer for interferometric length measurements including an automatic-compensating circuit
   
Document Number
US Patent 4984898
Issued Date
January 15, 1991
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Abstract
In a laser interferometer for interferometric linear measurement, a semiconductor laser (1) energizes a measuring interferometer (7) with which there is coordinated a spatially directly adjacent reference interferometer (9). The output signal of the reference signal detector (22) of the reference interferometer (9) is used to effet in the event of changes in the refraction index of the medium occupying the reference section and the measuring section a frequency tuning of the semiconductor laser (1) in such a way that the wavelength acting as a length normal will be kept constant in the reference interferometer (9) and the measuring interferometer (7).
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Laser interferometer for interferometric length measurements including an automatic-compensating circuit - US Patent 4984898 Drawing
Drawing from US Patent 4984898
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Number of Claims:
6
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Published
January 15, 1991
Application Number
07/274,810
Filed
September 29, 1988
US Classification
356/498  
Int'l Classification
H01S   5/00   (20060101)   H01S   5/062   (20060101)   G01B   9/02   (20060101)   H01S   5/0683   (20060101)   H01S   5/068   (20060101)   H01S   5/0687   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Feb 27, 1987 [DE] 3706347
USPTO Field of Search
356/356   356/357   356/358  
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Description
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