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Method of manufacturing a gas detection sensor, and the resulting sensor
   
Document Number
US Patent 4988539
Issued Date
January 29, 1991
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Inventors
Breuil; Philippe (Saint-Etienne,FR)
Tournier; Guy (Saint-Etienne,FR)
Lalauze Rene (Saint-Etienne,FR)
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Abstract
A method of manufacturing a sensor for detecting trace or impurity gases, the method comprising evaporating tin and/or tin oxides under a partial pressure of oxygen in order to condense vapor on an electrically insulating substrate to obtain a porous layer deposit therein. The metal or the metal oxides is/are evaporated under a flow of a mixture of gases containing both oxygen and an inert gas at a total pressure of not less than 100 pascals and with the partial pressure of the oxygen in the mixture being not more than 130 pascals.
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Number of Claims:
5
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Published
January 29, 1991
Application Number
07/446,545
Filed
December 6, 1989
US Classification
427/126.3   427/255.31 427/255.35
Int'l Classification
G01N   27/12   (20060101)  
Attorney/Law Firm
Priority Data
Dec 06, 1988 [FR] 88 15975
USPTO Field of Search
427/126.3   427/255.2   427/255.3  
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