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Method for producing silicon halides by reducing silicon tetrhalides under a plasma torch
   
Document Number
US Patent 5077027
Issued Date
December 31, 1991
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Abstract
Silicon difluoride is produced by the reduction of silicon tetrafluoride in a plasma torch under argon atmosphere. Instead of the usual reducing agents finely divided silicon has now been used as a reducing agent.
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Method for producing silicon halides by reducing silicon tetrhalides under a plasma torch - US Patent 5077027 Drawing
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Number of Claims:
9
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Published
December 31, 1991
Application Number
07/530,279
Filed
May 30, 1990
US Classification
423/342   204/164 423/341
Int'l Classification
B01J   12/00   (20060101)   C01B   33/107   (20060101)   C01B   33/00   (20060101)   B01J   8/18   (20060101)  
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USPTO Field of Search
423/341   423/342   423/343   423/324   204/164  
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