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Process for the surface treatment of carbon fiber strands
   
Document Number
US Patent 5078840
Issued Date
January 7, 1992
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Abstract
A process for electrolytically treating the surface of a carbon fiber without using a surface treatment bath, comprising forming a flow of an electrolyte solution in the form of a liquid film or column at at least one anode and at at least one cathode which alternate along the direction of the length of the carbon fiber, and passing carbon fiber strands through the flows of the electrolyte solution to apply electric current to the carbon fiber strands.
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Number of Claims:
11
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Owner
Published
January 7, 1992
Application Number
07/554,997
Filed
July 20, 1990
US Classification
205/768  
Int'l Classification
D01F   11/16   (20060101)   D01F   11/00   (20060101)  
Examiner
Assistant Examiner
Priority Data
Jul 20, 1989 [JP] 1-188573 Aug 11, 1989 [JP] 1-208576
USPTO Field of Search
204/130   204/132  
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A reaction apparatus for atomic layer deposition includes a vacuum chamber having a gas inlet, a gas outlet, and a gas flow path for connecting the gas inlet and the gas outlet; a reactor located in the vacuum chamber, including a reaction chamber where a first gas, which is input through the gas flow path, reacts with a specimen in the reaction chamber, the reactor further including a gas distributor, which is located in the reaction chamber to evenly supply the gas; a specimen location controller for moving the specimen located in the vacuum chamber to the reaction chamber; and an analyzer, which is connected to the reaction chamber, for analyzing a second gas generated in the reaction chamber. The apparatus is able to deposit uniform atomic layers on a specimen by maintaining the pressure and flow of reactant gas and can deposit and analyze an atomic layer simultaneously.

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