Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
A multiprocessing apparatus has a plurality of process processors connected to a carrier processor and controlled by a control system, wherein the apparatus includes connection information signal generating means for generating a connection information signal expressing information of connection of the plurality of process processors to the carrier processor, switching means for generating a registration information signal expressing information of registration of connection of the plurality of process processors to the carrier processor, and control means for carrying out a control process while logically judging a matching state between the connected process processors and the registered process processors by reference to the connection information and the registration information. Thus, it is possible to provide a multiprocessing apparatus in which process processors to be connected to the carrier processor can be increased or decreased in number easily and securely.
A distributed control system for controlling an integrated production process for semiconductor wafers and packages. A workstation is connected to a tester and a sorter/handler for configuring and controlling both devices. An operator need not be aware of different syntaxes and configurations required by different brands of testers, sorters/probers or handlers. The workstation is connected to a computer-aided manufacturing node to obtain setup and other processing control information and to send updated control information to the node through a network. If the data collected from the testers indicates low yield, the computer-aided manufacturing node is alerted.
A versatile production system in which a communication-memory unit is attached to a product, or to a pallet carrying the product, while the product is conveyed along the production line. The communication-memory unit communicates with a line host controller via line terminals located at production line assembling and testing sites in order to send information relating to the product from the communication-memory unit to the line host controller and to the communication-memory unit from the line host controller. Information can also be transferred from the communication-memory unit to the line terminals for output to a production worker and input by a production worker from a line terminal to the communication-memory unit. In this manner, the communication-memory unit contains manufacturing information relating to the product and this information is electronically updated at each production line site. The communication-memory unit can be emplaced in the side surfaces, top surfaces, or bottom surface of a pallet so as to allow communication and be detachable from the pallet. A pallet could also include an indented storage area or a basket-like enclosure to accommodate subassemblies or test equipment placed therein.
A versatile production system, to produce multiple kinds of products including small quantities of products, by supplying work order sheets to personnel in the line transmitted via a production management system, and by transmitting defective product data at each working process to a quality control system. The production system comprises assembling sites and testing sites for testing and inspecting the performance or the quality of an assembled product, at least one line terminal installed at each of the assembling sites and the testing sites, an ID card attached to a product to match the flow of an article and manufacturing data, including a type and a parts number for each product, while being transported, a line host controller that reads the data from the ID card via the line terminals, outputs work order sheets for operators via the line terminals, outputs a test result report containing test-inspection record data for each product, and outputs a delivery order sheet for preparation packing to a packing site via a Local Area Network, and a line host control terminal connected to the line host controller.
The precision substrate storage container includes a bottom plate 20 removably attached to the bottom of a container body 1 in which a multiple number of semiconductor wafers are accommodated in alignment; a holder 50 removably supported on bottom plate 20; and a RFID system transponder 60 held in holder 50. Bottom plate 20 includes a base plate 21 opposing the rear bottom of container body 1 and a wall plate 30 erected on base plate 21. The base plate 21 is formed with a first supporting structure 40 for supporting holder 50 that is oriented in the horizontal direction and a second supporting structure 43 for supporting holder 50 that is oriented in the vertical direction so as to selectively change the position of holder 50 taking one of the two directions, longitudinal and transverse.
