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Highpower microwave transmissive window assembly
   
Document Number
US Patent 5132652
Issued Date
July 21, 1992
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Abstract
A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.
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Highpower microwave transmissive window assembly - US Patent 5132652 Drawing
Drawing from US Patent 5132652
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Number of Claims:
25
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Owner
Canon Inc. (Tokyo,JP)
[*] Notice:The portion of the term of this patent subsequent to June 5, 2007 has been disclaimed.
Published
July 21, 1992
Application Number
07/439,057
Filed
November 20, 1989
US Classification
333/252   118/723MW 333/99PL
Int'l Classification
H01P   1/08   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
FIELD OF THE INVENTION This application is a continuation of pat. application Ser. No. 179,617 filed Apr. 8, 1988, now U.S. pat. No. 4,931,756.
USPTO Field of Search
333/252   333/99PL  
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