An actuator having a part that is capable of moving both longitudinally and transversely may include a housing having a longitudinal axis with respect to which the movable actuator part can move within the housing both longitudinally and transversely. The actuator may include electromagnetic windings on a central section of the moveable part and permanent ring magnets disposed thereabout within the housing. The housing may be adapted to allow the longitudinal and transverse movement of the movable part to compensate for rotational movement of pivot mounted linkages connected to first and second ends of the movable part.

A pulsed power linear actuator provides increased stroke force by converting rotational kinetic energy into linear kinetic energy through the use of electrical energy. The kinetic energy may be established by placing a tube having endless conductive loops therein between an armature and stator. Rotation of the tube by a motor generates rotational kinetic energy which is converted to linear kinetic energy and transferred to the stroke arm when current is applied to the armature to generate electromagnet fields. The armature may be implemented with permanent magnets which generate time invariant magnetic fields, or it may be implemented as a multi-segmented armature where each segment is essentially an individual armature. The relative motion of the armature and tube exposes the loops to the electromagnet fields and produces an electromotive force which induces current in the rotating endless loops. The induced current reacts with either the time invariant magnetic fields (in the permanent magnet configuration) or the electromagnet fields (in the multi-segment configuration) to cause a transfer of energy from the rotating tube to the stroke arm. A multi-stage actuator configuration may be implemented with the multi-segment armature and multiple sets of endless loops to provide increased stroke length to the actuator.

A piezo-electrically actuated fluid control valve has a nozzle type seat, a magnet opposite from the seat, and a piezoelectric actuator in sheet form between the seat and magnet. The actuator includes a piezo-ceramic layer laminated to an electrode sheet, so that the composite is parallel to the seat and a surface of the magnet. The electrode sheet has opposite edges which extend beyond the piezo-ceramic layer and are clamped by the housing of the valve so that the center of the actuator is positioned between the seat and magnet. When an electric field is applied to the piezo-ceramic layer, the actuator bows or dishes so as to displace from the seat toward the magnet, and the magnetic field of the magnet draws the actuator further away from the seat, to increase the valve opening between the actuator and the seat. The actuator may be operated by a pulse width modulated or a proportional analog electrical signal, which may be applied in combination with the magnetic field to move the actuator, or if the magnetic field is induced by an electromagnet, electrical and magnetic control modes may be used alternatively.

A piezo-electrically actuated hydraulic valve has a nozzle type seat and a piezo-electric actuator in a plane orthogonal to the axis of the nozzle. The actuator includes a piezo-ceramic layer laminated to an electrode sheet, so that the composite is in sheet form and parallel to the plane of the seat. The electrode sheet has opposite edges which extend beyond the piezo-ceramic layer and are clamped by the housing of the valve so that the center of the actuator is positioned over the seat, and in the preferred embodiment normally closes the seat. When an electric field is applied to the piezo-ceramic layer, the actuator bows or dishes so as to displace relative to the nozzle. The electric field may be applied proportionally, in which case the actuator displaces proportionally to the field applied, the field may be applied as a pulse width modulated signal, in which case the displacement of the actuator also modulates. The actuator has an electrode coating applied over the ceramic layer, which may be divided into motor and generator sub-areas, and an area of the coating is absent where the ceramic layer seats against the nozzle. Rectangular and circular actuators are disclosed.

A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.