An apparatus for detecting the velocity information of an object comprises the irradiation optical system for performing the irradiation of beam to the predetermined position on an object to be measured; the photodetector for detecting the light from the irradiated object by the irradiation optical system, the velocity information being obtained by the detection; the detector for detecting the irradiating state for detecting the deviation of the irradiating position of the beam on the object to be measured; and the adjuster for adjusting the irradiating state of the beam on the object based on the detection result of the detector for detecting the irradiating state. With such constituents as above, the apparatus is capable of dealing with the fluctuation of the lightning to obtain a high-precision detection of the velocity information at a high speed.
A method and system for producing a compact uniform illumination beam that does not have a positional blind spot. First, non-collimated light beams that have a positional blind spot are received from a light source. Next, the noncollimated light beams are converted into approximately collimated light beams without the positional blind spot. Then, the collimated light beams are split into a plurality of split beams. These split beams are then overlapped to form a compact and uniform illumination beam.
A device for detecting the displacement of an object is provided with a semiconductor laser having an active layer for emitting laser beams in two directions, mirrors for directing the laser beams toward a diffraction grating provided on the object, and a detector for receiving the interfering lights diffracted by the diffraction grating. The active layer of the semiconductor laser is arranged substantially parallel to the diffraction grating, to save space, also to enable light deflection such that the spreading direction of the light beams from the semiconductor laser coincides with the direction of pitch of the diffraction grating. The diffraction grating is irradiated with an improved efficiency, giving diffracted lights with higher intensity to the detector and improving the S/N ratio of detection. The space between the semiconductor laser and the object is reduced, thus reducing the entire volume of system.
A method and system for producing a compact uniform illumination beam that does not have a positional blind spot. First, non-collimated light beams that have a positional blind spot are received from a light source. Next, the non-collimated light beams are converted into approximately collimated light beams without the positional blind spot. Then, the collimated light beams are split into a plurality of split beams. These split beams are then overlapped to form a compact and uniform illumination beam.
