An electron tube with concentric, cylindrical electrodes has at least one meshed type of grid, a mesh being defined by several rods in contact by their ends, each point of contact forming a node. In order to limit the grid current, the surface area of a node is reduced. Only three rods leave each node. The meshes are hexagonal.
An electrode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.
