An apparatus for electrostatically spray-coating a workpiece with conductive paint which includes a color changeover valve mechanism for selectively supplying conductive paint, cleaning liquid and air. A flush valve mechanism is provided for selectively supplying the cleaning liquid and the air. A first directional control valve includes an outlet and inlets. The inlets are connected to feed lines extending from the color changeover valve mechanism and the flush valve mechanism, respectively. A block line is made of an insulating material and has a first end connected to the outlet of the first directional control valve. The block line includes a second end in communication with the first end. A second directional control valve is provided having outlets and an inlet. The inlet is connected to the second end of the block line. An intermediate reservoir is connected via a feed line to one of outlets of the second directional control valve. A waste-liquid tank is connected via a first discharge line to a second outlet of the second directional control valve. A spray gun is connected via a delivery line to the intermediate reservoir. A second discharge line is branched from the delivery line via a changeover valve. A discharge line cleaning mechanism is provided for selectively supplying at least cleaning liquid and air to the second discharge line. A high voltage is applied to the conductive paint between the second directional control valve and the spray gun.
An apparatus for depositing thin films of a semiconductor device. The thin film deposition apparatus includes: a reactor maintained at a constant pressure; at least two reaction gas supply portions for supplying reaction gases to the reactor; an exhaust pump for discharging the gases out of the reaction gas supply portions and/or the reactor; first flow control valves installed between each reaction gas supply portion and the reactor, for controlling the amount of gases flowing between the reaction gas supply portions and the reactor; second flow control valves installed between each reaction gas supply portion and the exhaust pump, for controlling the amount of gases flowing between the reaction gas supply portions and the exhaust pump; an inert gas supply portion for supplying an inert gas into the reactor; reaction gas pipe lines, wherein the reaction gases provided from the reaction gas supply portions flow through the reaction gas pipe lines to the reactor and/or the exhaust pump; an inert gas pipe line, wherein the inert gas provided from the inert gas supply portion flows through the inert gas pipe line to the reactor; and a plurality of valves installed in the reaction gas pipe lines and/or the inert gas pipe lines, for controlling the amount of reaction gases and inert gas flowing into the reactor and/or the exhaust pump.
An intermediate storage vessel has a cylinder container, a piston provided in the cylinder container so as to be slidable in a reciprocating manner, and an inpour hole portion is provided above the discharge hole portion. An insulation cover is provided so as to cover the intermediate storage vessel and an insulation mechanism, and the cover is removable from the insulation mechanism side.
An electrostatic coating machine comprising at least two paint tanks (13A, 13B) for pushing out a paint by a pressure of a hydraulic fluid which one is attached to a rotary base (14) while being electrically insulated from each other, and can be positioned to a coating position opposed to the machine body (3) by the rotation of the rotary base (14) such that while one paint tank is at the coating position, the other paint tank is engaged with a paint charging attachment (22) that is disposed being electrically insulated from the machine body (3) and has a paint supply port (Ps) for supplying a cleaning fluid and a paint of a next color and a drain recovery port (Dr) for recovering drains. Cleaning/paint charging time can be shortened to improve operation efficiency and insulation countermeasure for the paint supply system can be saved.
A fluid supply cylinder with improved flusbability, useable for supplying paints to a dispenser in electrostatic coating systems. The fluid supply cylinder having generally a piston reciprocatingly disposed in a chamber of a body member, the piston having a head with a face opposite an end wall of the chamber, a plurality of chamber fluid ports disposed in the end wall of the chamber, and a plurality of fluid conduits between a corresponding one of the plurality of chamber fluid ports and a common outer fluid port, whereby the reciprocating piston draws fluid into the cylinder chamber and supplies fluid from the cylinder chamber through the plurality of chamber fluid ports in the end wall thereof.
An apparatus for electrostatically coating a workpiece has an insulating separator valve mechanism for electrically separating a paint supply passage for supplying an electrically conductive paint to a coating gun, into a paint supply passage to which a high voltage will be applied and a paint supply passage to which no high voltage will be applied. The insulating separator valve mechanism has a first valve body connectable to said paint supply passage through a first on/off valve, and a second valve body connectable to said paint supply passage through a second on/off valve. While the first and second valve bodies are connected to each other and the first and second on/off valves are closed, a paint trap is cleaned by a cleaning medium, which is discharged into a second dump passage. A process of cleaning the paint trap for a paint color change is efficiently and reliably carried out to reliably remove paint residuals from the paint trap.
