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Dielectric films for use in magnetoresistive transducers
   
Document Number
US Patent 5302461
Issued Date
April 12, 1994
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Abstract
A new class of materials for use as a dielectric to separate various metallic layers within a magnetoresistive transducer. The materials include oxides of Ta, Hf, Zr, Y, Ti, or Nb. Thin films of these materials, when fabricated in accordance with the teachings of the invention, constitute dielectric films which maintain their integrity as insulators at thicknesses down to 5 nm. Additionally, the adhesion of this class of dielectrics equals or exceeds that of commonly used dielectrics.
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Number of Claims:
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Owner
Hewlett-Packard Company (Palo Alto, CA)
Published
April 12, 1994
Application Number
07/894,398
Filed
June 5, 1992
US Classification
428/472   257/E43.004 360/122 360/315 360/320 428/701 428/702
Int'l Classification
H01L   43/08   (20060101)   G11B   5/39   (20060101)  
Examiner
USPTO Field of Search
428/472   428/701   428/702   360/113   360/122  
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