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Mirror objective arrangement
   
Document Number
US Patent 5306892
Issued Date
April 26, 1994
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Inventors
Hohberg; Gerhard (Aalen-Dewangen,DE)
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Abstract
The invention is directed to a pancratic mirror objective system for laser focussing and especially for laser machining apparatus. The pancratic mirror objective system preferably includes a convex paraboloid mirror and an ellipsoid mirror. The ellipsoid mirror can be approximated by a toric or spherical form. The focus F.sub.1 of the paraboloid mirror P and the first focus of the ellipsoid mirror E are coincident. By rotating the ellipsoid mirror E about the axis parallel to the incident laser beam through the first focus F.sub.1, the effective image side aperture (for example K=4 to K=8) and the focal length are varied. The track control compensates for the movement of the focus F.sub.2 in laser machining apparatus.
Drawing
Mirror objective arrangement - US Patent 5306892 Drawing
Drawing from US Patent 5306892
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Number of Claims:
10
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Owner
Carl-Zeiss-Stiftung (Heidenheim,DE)
Published
April 26, 1994
Application Number
07/901,729
Filed
June 22, 1992
US Classification
219/121.67   219/121.74 359/859 359/863
Int'l Classification
B23K   26/06   (20060101)   G02B   5/10   (20060101)   G02B   17/06   (20060101)   G02B   17/00   (20060101)  
Examiner
Assistant Examiner
Attorney/Law Firm
Priority Data
Jun 22, 1991 [DE] 4120684
USPTO Field of Search
359/858   359/859   359/863   219/121.67   219/121.72   219/121.73   219/121.74  
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