An acoustic or ultrasonic device includes two ultrasonic energy transmission paths having substantially identical transmission characteristics for a neutral condition of the device. One or both of the transmission paths include path altering structure(s) or coating(s) for changing the transmission characteristics of one or both of the paths in response to a physical phenomenon to be sensed or monitored. The paths have input transducers coupled thereto for transmitting ultrasonic energy into the paths. The input transducers are driven by a single oscillator such that the ultrasonic energy waves generated in the two paths are substantially identical to one another. A drive adjusting circuit compensates for any differences between the two paths and/or the ultrasonic waves in the two paths. An output transducer is coupled to the two paths for receiving ultrasonic waves from the paths and generating an output signal which is the result of combining the acoustic or ultrasonic waves from the two paths. By combining the waves from the two paths, the output signal is effectively the interference pattern generated by the waves in the two paths and hence the device operates as an acoustic or ultrasonic energy interferometer to sense or monitor physical phenomena to which the path altering structure(s) or coating(s) respond.
In accordance with the invention, magnetostrictive saw devices are provided with tunable transducer structures for enhanced performance. The transducers are in the form of patterned conductors disposed between magnetic films. The magnetostrictive response is tuned by adjusting the thickness of magnetic film overlying the conductive layer.
Methods and systems for forming accelerometers include forming a load beam supported at one end having an input interdigital transducer (IDT) and an output IDT. The load-beam has a cross section varying in the longitudinal direction effective to cause the load beam to deflect radially in response to an applied load. The cross section varies in width, height, or both.
A surface acoustic wave device includes a piezoelectric substrate, a first interdigital transducer, a second interdigital transducer and a first coupler. The first and second interdigital transducers are arranged on the surface of the piezoelectric substrate such that the second interdigital transducer is offset from a direction in which a surface acoustic wave excited by the first IDT propagates. A first edge is provided on the piezoelectric substrate to reflect the excited surface acoustic wave to the first and second interdigital transducers, and the first coupler having a plurality of metal strips on the piezoelectric substrate is provided between the first edge of the piezoelectric substrate and at least one of the first and second interdigital transducers so as to be adjacent to the first and second interdigital transducers. The surface acoustic wave device operates using a shear horizontal surface wave.
The invention relates to a silicon micromechanically fabricated infrared detector having an infrared radiation absorbing layer (7, 44) deposited on an insulating substrate and a detector (11, 24, 25) for detecting the amount of radiation absorbed in the metallic absorbing layer. According to the invention, on the path of the radiation, prior to the absorbing layer (7, 44) is located an electrically controllable Fabry-Perot interferometer (1, 2, 5) manufactured by silicon micromechanical techniques and having the absorbing layer (7, 44) integrally coupled with one of the mirrors (1, 2) thereof).
An apparatus for noninvasively monitoring the flow and/or the composition of a flowing liquid using ultrasound is described. The position of the resonance peaks for a fluid excited by a swept-frequency ultrasonic signal have been found to change frequency both in response to a change in composition and in response to a change in the flow velocity thereof. Additionally, the distance between successive resonance peaks does not change as a function of flow, but rather in response to a change in composition. Thus, a measurement of both parameters (resonance position and resonance spacing), once calibrated, permits the simultaneous determination of flow rate and composition using the apparatus and method of the present invention.
