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System for measuring distance between two points using a variable frequency coherent source    

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United States Patent5412474   
Link to this pagehttp://www.wikipatents.com/5412474.html
Inventor(s)Reasenberg; Robert D. (Lexington, MA); Phillips; James D. (Lexington, MA); Noecker; Martin C. (Concord, MA)
AbstractAn interferometric gauge for high precision absolute and incremental measurements of distances of up to at least 100 meters. An accuracy of 0.02 Angstrom has been demonstrated, free of the .about.10 Angstrom polarization-leakage errors of conventional gauges. The absolute distance measurement requires no a priori information, and multiple synthetic wavelengths need not be used. The gauge can be used as the sensor for a null servo. There are reduced-cost versions of lower accuracy. The gauge can employ a resonant cavity for greater sensitivity, and can be built with no transmissive elements in the measured path. Without additional hardware, the gauge readout can be in the form of a frequency or an analog electrical signal, in addition to a digital count of an integral number of wavelengths. The gauge employs a high-sensitivity null sensor. Feedback to an optical frequency shifter maintains the null condition; the frequency shift is measured electronically, providing a high sensitivity distance readout. The gauge keeps track of the whole and fractional number of the optical waves travelled. Absolute distance measurement is based on free spectral range determination, employing the high sensitivity and freedom from polarization leakage of this design.
   














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Inventor     Reasenberg; Robert D. (Lexington, MA); Phillips; James D. (Lexington, MA); Noecker; Martin C. (Concord, MA)
Owner/Assignee     Smithsonian Institution (Washington, DC)
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Publication Date     May 2, 1995
Application Number     07/880,590
PAIR File History     Application Data   Transaction History
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Filing Date     May 8, 1992
US Classification     356/486 356/4.09 356/506
Int'l Classification     G01B 009/02
Examiner     Turner; Samuel A.
Assistant Examiner     Kim; Robert
Attorney/Law Firm     Oblon, Spivak, McClelland, Maier & Neustadt
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USPTO Field of Search     356/4.5 356/345 356/349 356/350 356/352 356/357 356/358
Patent Tags     measuring distance between two points variable frequency coherent source
   
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What is claimed as new and desired to be secured by Letters Patent of the United States is:

1. A system for measuring a distance between two points, which comprises:

means for generating a coherent electromagnetic first beam having a first frequency which can be varied within a frequency range;

an interferometer coupled to said first beam and comprising plural reflective surfaces including first and second reflective surfaces separated by said distance, said interferometer providing an optical output signal which is a sum of coherent electromagnetic beams that travel different path lengths in said interferometer; and

first feedback means for producing a first feedback signal based on said optical output signal, and feeding back said first feedback signal to said means for generating to control the frequency of said first beam so as to maintain constant at at least one value an optical phase difference between at least two of said different path lengths.

2. A system according to claim 1, wherein said means for generating comprises:

an acousto-optic modulator.

3. A system according to claim 1, wherein said means for generating comprises:

a source which generates said first beam; and

means, coupled to said source, for varying said first frequency of said first beam generated by said source.

4. A system according to claim 1, wherein said means for generating comprises:

at least one of a magneto-optic modulator and an electro-optic modulator.

5. A system according to claim 1, which further comprises:

first means for frequency modulating said first beam at a first modulation frequency.

6. A system according to claim 5, wherein said first means for frequency modulating comprises:

an electro-optic modulator.

7. A system according to claim 5, wherein:

said means for generating comprises a source of said first beam; and

said first means for frequency modulating comprises one of an acousto-optic modulator, a magneto-optic modulator, and a means, applied to said source, for modulating said first frequency of said first beam generated by said source.

8. A system according to claim 5, which further comprises:

first frequency variation control means for controlling said means for generating to produce said first frequency; and

wherein said first feedback means further comprises means for detecting a first amplitude modulation at said first modulation frequency, of said optical output signal from said interferometer, and feeding back, as negative feedback, a feedback signal corresponding to an amplitude value of said first amplitude modulation, to said first frequency control means, thereby maintaining a minimum first amplitude modulation.

9. A system according to claim 8, which further comprises:

a second means for frequency modulating said first beam with a second modulation frequency.

10. A system according to claim 9, which further comprises:

means for detecting a second amplitude modulation of said optical output signal at one of the sum and difference of said first and second modulation frequencies;

second modulation frequency control means for controlling said second modulation frequency; and

second feedback means for feeding back a second feedback signal corresponding to an amplitude of said second amplitude modulation, as negative feedback, to said second frequency modulation control means.

11. A system according to claim 10, wherein:

said second modulation frequency control means comprises auxiliary control means for controlling a second switch means and for selectively changing said second modulation frequency to first and second frequencies which correspond to different optical orders of said interferometer, said second switch means for connecting and disconnecting said second feedback signal to the second means for frequency modulating.

12. A system according to claim 8, further comprising:

said first beam comprising first and second portions;

second means for varying frequency of the second portion which provides said second portion with a second frequency;

monitor means for monitoring variations in frequency of the first and second portions;

second means for frequency modulating said second portion; and

means for detecting a second amplitude modulation at said second modulation frequency.

13. A system according to claim 12, which further comprises:

second frequency variation control means for controlling said second means for varying frequency to produce said second frequency;

second feedback means for feeding back a signal corresponding to the amplitude of said second amplitude modulation, as negative feedback, to said second frequency variation control means, thereby minimizing said second amplitude modulation.

14. A system according to claim 13, wherein:

the first frequency variation control means further comprises a first switch means for connecting and disconnecting said first feedback signal to said means for generating, and first auxiliary control means for controlling said first switch means; and

the second frequency variation control means further comprises a second switch means for connecting and disconnecting said second feedback signal to said second means for varying frequency, and second auxiliary control means for controlling said second switch means, whereby the first and second frequencies may be varied to correspond to different optical orders of the interferometer.

15. A system according to claim 1, wherein:

said feedback means comprises detection means for detecting an amplitude modulation of said optical output signal from said interferometer; and

control means, coupled to said detection means and to said means for generating, for controlling said first frequency so that the intensity of said optical output signal remains constant.

16. A system according to claim 1, which further comprises:

monitor means for monitoring a variation in said first frequency, wherein said variation in frequency corresponds to a change in said distance.

17. A system according to claim 1, wherein the reflective surfaces of the interferometer are arranged to form a multiple pass resonant cavity.

18. A system according to claim 1, which further comprises:

means for periodically translating one of said reflective surfaces at a dither frequency.

19. A system according to claim 18, which further comprises:

first frequency variation control means for controlling said means for generating to produce said first frequency having a first value; and

wherein said first feedback means further comprises means for detecting a first amplitude modulation at said dither frequency, of said optical output signal from said interferometer, and feeding back, as negative feedback, a feedback signal corresponding to an amplitude value of said first amplitude modulation, to said first frequency control means, thereby maintaining a minimum first amplitude modulation.

20. A system according to claim 19, which further comprises:

second frequency variation control means for controlling said means for generating to produce said first frequency having a second value;

wherein said first and second frequency variation control means control the frequency of said first beam during first and second half-cycles, respectively, of said hopping frequency, giving it said first and second values;

wherein said first and second frequency variation control means control the frequency of said first beam during first and second half-cycles, respectively, of said hopping frequency, giving it said first and second values;

wherein said first amplitude modulation refers to the amplitude modulation present during said first half-cycle;

further comprising second feedback means for detecting a second amplitude modulation of said optical output signal from said interferometer at said dither frequency, during said second half-cycle, and feeding back, as negative feedback, a feedback signal corresponding to an amplitude value of said second amplitude modulation, to said second frequency control means, thereby maintaining a minimum second amplitude modulation; and

monitor means for monitoring variations in frequency during said first and second half-cycles.

21. A system according to claim 20, wherein:

the first frequency variation control means further comprises a first switch means for connecting and disconnecting said first feedback signal to said means for generating, and first auxiliary control means for controlling said first switch means; and

the second frequency variation control means further comprises a second switch means for connecting and disconnecting said second feedback signal to said second means for varying frequency, and second auxiliary control means for controlling said second switch means, whereby said first and second values of said first frequency may be varied to correspond to different optical orders of the interferometer.

22. A system according to claim 1, further comprising:

transducer means, coupled to said interferometer and said first feedback means, for controlling said distance.

23. A system for measuring a distance between two points, which comprises:

an interferometer comprising plural reflective surfaces arranged to form a resonant cavity, wherein the distance to be measured is the distance between two of said plural reflective surfaces;

a coherent electromagnetic beam coupled to said interferometer;

means for varying a frequency of said coherent electromagnetic beam; and

means for frequency modulating said coherent electromagnetic beam.

24. A system according to claim 23, wherein:

one or more of said plural reflective surfaces of said resonant cavity are partially transparent.

25. A system according to claim 23, wherein one of said plural reflective surfaces of the resonant cavity comprises a flat portion and a concave portion.

26. An interferometer for a system for measuring distance between two points, comprising:

plural reflective surfaces arranged to form a resonant cavity, wherein the distance to be measured is the distance between two of said plural reflective surfaces, and wherein one of said reflective surfaces comprises a flat portion and a concave portion.

27. A system according to claim 26, wherein:

one or more of said plural reflective surfaces of said resonant cavity are partially transparent.

28. A process for measuring a distance between two points, comprising the steps of:

generating a coherent electromagnetic first beam having a first frequency with a generator means;

varying the first frequency within a frequency range;.

coupling said first beam to an interferometer having plural reflective surfaces including first and second reflective surfaces separated by said distance, said interferometer providing an optical output signal which is a sum of coherent electromagnetic beams that travel different path lengths in said interferometer; and

producing a first feedback signal based on said optical output signal;

feeding back said first feedback signal to said generator means to control the frequency of said first beam so as to maintain an optical phase difference between at least two of said different path lengths constant at at least one value.
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BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to interferometric distance measuring systems. More particularly, this invention relates to interferometric distance measuring systems for measurement of a change in the distance from one point to another point, the absolute distance from one point to another point, or for control of such distances. It also relates to interferometric distance measuring systems for measurement of a change in the difference between the distances from one point to each of two other points, the difference between the absolute distances from one point to each of two other points, for control of such distance differences, or to systems for combinations of these functions.

DISCUSSION OF THE BACKGROUND

The market for high precision distance measuring gauges is derived from laboratory and commercial uses. These uses are all terrestrially based. Furthermore, all current interferometric gauges have been designed for use in a gaseous atmosphere (e.g, air). Due to unavoidable turbulence that occurs in air, the index of refraction of air varies from point to point and is a function of time. The variation in the index of refraction of air limits to approximately 10 nanometers the accuracy of devices which measure optical path length in air except for those that make corrections by extraordinary means.

Since ordinary interferometric devices operating in air cannot provide a distance measurement whose uncertainty is less than the uncertainty caused by air fluctuations, there has been little incentive to reduce the other uncertainties in such measurements to levels which are well below the uncertainties provided by the air fluctuations.

High quality commercial laser interferometers are used routinely to measure distances to an accuracy on the order of 100 nanometers over distances of up to several meters. These instruments typically do not measure the absolute distance between the two points, but instead measure only a distance change which occurs after the start of a measurement operation. We call instruments which measure a distance change incremental gauges.

There are some optically-based absolute distance measuring devices available. However, these devices are large and extremely complex. Furthermore, these devices require a relatively accurate prior knowledge of the distance to be measured (within 1 percent of the actual distance in some cases). Therefore, these devices have found only limited application.

Another device of interest is an interferometric null servo, which maintains a fixed distance between two points. In an interferometric null servo, a laser gauge is used to measure approximately the deviation of the controlled distance from one which would yield a null or zero output from the interferometer, e.g., the offset from a minimum in transmission. The measured deviation, in the form of an electrical signal, is filtered, amplified, and applied to an actuator so as to return the distance to that which would yield a null output.

Existing differential distance measuring gauges can be classified in two categories. The first category includes devices which provide a relatively low accuracy measurement limited to approximately 100 nanometers. The second group of devices provide an accuracy which is significantly better than 100 nanometers. Many existing devices fall into the first category.

For example, U.S. Pat. No. 3,756,722 to Wetzel discloses an interferometric measuring system including a phase plate which produces a beam with transversely varying phase, thereby producing sine and cosine signals. The combination of sine and cosine signals is free of the directional ambiguity that exist in a single signal.

Another example of a low precision system is disclosed by U.S. Pat. No. 3,452,472 to Reid Smith-Vaniz in which an AC signal is obtained by mechanically vibrating a reference surface. This device requires a laser having two output frequencies. The difference between the two frequencies is varied by changing the length of the laser cavity. This device provides an absolute distance measurement but cannot track a continuously changing distance. Vibration of the reference surface is only provided to produce a signal with which the measurement is made.

Conventional high accuracy interferometric distance measuring systems use two overlapping beams that differ both in polarization and in frequency. The overlapped beams are separated into first and second polarization beams by a polarization-dependent beam splitter. The first separated beam traverses a length to be measured and is then rejoined with the second beam. However, the polarization separation is imperfect. Therefore, some fraction of each of the first and second beams is always intermixed with, and travels the path intended for, the second and first beams, respectively, leading to measurement errors. These measurement errors principally provide a signal bias that is a periodic function of the measured distance.

For example, U.S. Pat. No. 3,458,259 to Bagley et al and U.S. Pat. No. 3,656,853 also to Bagley et al disclose systems using two frequencies. In the '259 patent, a two frequency single mode laser (Zeeman-split) produces two copropagating beams of different polarization and frequency. Bagleys' patents both require polarization separating components. The limitations in the alignment of the polarization directions introduce a cyclic bias in the amplitude of the signal output from the interferometer. The bias corresponds to a systematic error on the order of one nanometer.

In the article by de Groot, in Applied Optics, Vol. 30, No. 25, dated Sep. 1, 1991, an absolute distance gauge design is disclosed which uses a pair of laser diodes. Use of very small laser diodes allows a compact and an inexpensive gauge to be built. In the use of this device, the absolute length must be known a priori to the order of 1 mm because of the limited frequency resolution of the grating used to distinguish between closely-spaced diode laser wavelengths.

SUMMARY OF THE INVENTION

One object of the present invention is to provide a compact and low cost high precision optical distance measurement system.

Another object of the present invention is to provide precise measurement of relative and absolute distances from between 0.01 and 100 meters.

Another object of the present invention is to provide a precise measure of relative and absolute distances between spacecraft.

Another object of the present invention is to provide continuous and/or extremely rapid distance measurements.

Another object of the present invention is to provide for an absolute measurement of distance.

Another object of the present invention is to provide for extremely accurate measurements of distances in vacuum.

Another object of this invention is to provide extremely accurate measurement of distances within satellites and stations in space and between satellites and stations.

Another object of the present invention is to provide a fiber optic coupling system, useful for coupling optical signals into and out of optical fibers, which has extremely low internal reflection.

These objects may be accomplished by a system and a process for using the system for measuring distance between two points, which comprises an interferometer through which a coherent electromagnetic beam passes and a means for varying the frequency of the coherent electromagnetic beam frequency.

These objects may also be accomplished by a system and a process for using the system for measuring distance between two points, which comprises an interferometer through which a coherent electromagnetic beam passes and a means for frequency modulating the coherent electromagnetic beam before passing the beam through the interferometer.

These objects may also be accomplished by a system and a process for using the system for measuring distance between two points which comprises an interferometer which comprises a resonant cavity.

These objects may also be accomplished by a system and a process for using the system for maintaining, at a fixed value, a distance between two points, which comprises an interferometer and means for coupling a coherent electromagnetic beam to said interferometer, wherein said means for coupling comprises a first means for frequency modulating at a first frequency, said coherent electromagnetic beam.

These objects may also be accomplished by a fiberoptic coupler and process of using the coupler, which comprises a single mode optical fiber having at least one end thereof, a surface that is at an angle with respect to the optical axis; and a transparent cap which is joined to the end of the fiber and which has a larger diameter than the fiber core.

BRIEF DESCRIPTION OF THE DRAWINGS

A more complete appreciation of the invention and many of the attendant advantages thereof will be readily obtained as the same becomes better understood by reference to the following detailed description when considered in connection with the accompanying drawings, wherein:

FIG. 1 shows a distance gauge of the present invention;

FIG. 2 shows a tracking frequency gauge (TFG) of the present invention;

FIG. 3 shows a null gauge, and a system for maintaining a fixed distance between two points;

FIG. 4 shows a system for measuring an absolute distance between two points of the present invention;

FIG. 5a shows a tracking frequency gauge with a resonant cavity interferometer of the present invention;

FIGS. 5b-5d show exemplary resonant cavities for a tracking frequency gauge;

FIGS. 6a and 6b show in detail, a tracking frequency gauge of the present invention;

FIGS. 7a-7e show, as a function of optical frequency, signals useful in explaining FM to AM conversion in the present invention;

FIG. 8 shows an AM detection and control circuit of the present invention;

FIGS. 9a-9c show a detailed version of an absolute distance gauge of the present invention;

FIGS. 10a and 10b show, as a function of optical carrier frequency, signals useful in understanding operation of the absolute distance gauge shown in FIGS. 9a-9c;

FIGS. 11a and 11b show a detailed version of an embodiment of a tracking frequency gauge of the present invention having alternating frequency modulation;

FIG. 11c shows an alternative arrangement for a tracking frequency gauge with alternating frequency modulation;

FIG. 12 shows an absolute distance gauge of the present invention having dual frequency modulation;

FIGS. 13a and 13b show, as a function of optical carrier frequency, signals useful in understanding operation of the absolute distance gauge with dual frequency modulation shown in FIG. 12;

FIG. 14 shows an FM side band locking null gauge of the present invention;

FIGS. 15a and 15b show, as a function of optical carrier frequency, signals useful in understanding a resonant cavity interferometer of the present invention;

FIGS. 16a-16d show exemplary resonant cavities of a resonant cavity interferometer of the present invention;

FIG. 17a-17c show reflective elements of a resonant cavity of the present invention and symmetry operations which may be performed thereon;

FIGS. 18a and 18b show systems for terminating an optical fiber, and launching a low-distortion beam into free space, with greatly reduced reflection back along the fiber; and

FIG. 19 shows another laser gauge system of the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring now to the drawings, wherein like reference numerals designate identical or corresponding parts throughout the several views, and more particularly to FIG. 1 thereof, which shows a beam 1a emitted by laser 1. The function of the laser indicated in FIG. 1 is to provide a coherent optical beam.

Preferably, the laser is of a type which provides a beam of optical waves of a single frequency or very narrow band of frequencies, wherein the frequency or average frequency is stable in time. Instead of a laser beam, any coherent electromagnetic beam may be used, such as any coherent beam with a frequency between radio frequencies and the high end of the ultraviolet light wave frequencies. Such a beam may be provided by a MASER, or a high frequency oscillator such as a Gunn diode, an impact device, a double barrier diode, a crystal oscillator or similar devices.

The beam 1a is frequency modulated by frequency modulator 2. Frequency modulator 2 may be any device which provides a modulation to the frequency of the coherent optical beam.

In particular, the frequency modulator 2 may be an acousto-optic device, an electro-optic device or a magneto-optic device. Furthermore, the frequency modulation represented by frequency modulator 2 may be provided by actually frequency modulating the laser, by modulating properties of the laser material, the cavity or a power source for the laser.

A preferred frequency modulator is an electro-optic modulator cell. Varying an applied voltage to an electro-optic cell varies the index of refraction of the cell, thereby varying the effective optical length of the cell. If the electro-optic cell is driven at a radio frequency, a beam passed therethrough has its phase modulated at the modulation radio frequency due to the voltage-driven variation in optical path length. The phase modulation of the beam after passing through the electro-optic cell is equivalent to frequency modulation of the beam, as will be discussed in more detail below. The modulation depth is proportional to the peak of the radio frequency voltage applied to the cell. A good review of the mathematics of frequency modulation is provided in the book, "REFERENCE DATA FOR RADIO ENGINEERS", sixth edition, Library of Congress card number 75-28960, in Chapter 23.

In all of the embodiments described herein, it is preferable to transport the beam from the modulator or modulators to the interferometer by passing it through a single mode optical fiber. In this case it is also preferable to use a polarization-preserving fiber; this allows better control of the polarization of the light emerging from the fiber. The use of such an optical fiber allows precise, stable alignment of beams injected into the interferometer without rigid mechanical connections which might transmit vibrations; produces a beam at the entrance to the interferometer which has a simple, smooth profile and stable position and orientation which are independent of the alignment of beams between the laser source and the fiber input coupler; and affords the convenience of transporting the beam through a narrow flexible waveguide over distances which may be large. The use of an optical fiber also risks introducing errors associated with polarization changes, variations in transmission due to variations in beam alignment at the fiber input, and spectral modification of the light due to weak interferometric effects within the fiber.

If an optical fiber is used, it may advantageously be inserted between the frequency modulator 2 and the interferometer. In this case, the beam leaving the frequency modulator 2 is coupled to the optical fiber 4 through input coupler 3; this input coupler tightly focussed the beam onto the tiny core of the fiber. The beam is transmitted through the optical fiber and exits through the output coupler 5; this output coupler captures the beam diverging from the end of the fiber and focussed it into a beam which is suitable collimated for injection into the interferometer.

If an optical fiber is not used, it may be advantageous to transport the beam from the frequency modulator 2 to the interferometer using some combination of mirrors and lenses so that the alignment and focussing of the beam may be adjusted easily.

The beam output from the output coupler 5 enters an interferometer, which may be a two-beam interferometer with dihedral or cornercube retro reflectors as shown by the example in FIG. 1; this common type of interferometer is closely related to the Michelson interferometer, which uses flat mirrors instead of dihedrals or cornercubes. The interferometer includes retroreflectors 8 and 9 and partial reflector 6. The entering beam intersects partial reflector 6 at position 7 where the beam is split into two components denoted E.sub.l and E.sub.2. The first component E.sub.l propagates toward retroreflector 9 which returns the first component E.sub.1 to partial reflector 6 at position 10. Similarly the second component E.sub.2 propagates toward retroreflector 8 and is returned to the partial reflector 6 at position 10.

The distance which second component E.sub.2 travels from partial reflector 6 to retroreflector 8 and back to partial reflector 6 is denoted by L2. The distance which first portion E.sub.1 travels from partial reflector 6 to retroreflector 9 and back to partial reflector 6 is denoted by L1.

The beams E.sub.l and E.sub.2 are each split into two components again when they return to partial reflector 6 at position 10; the first component of beam E.sub.1 overlaps and combines with the first component of beam E.sub.2 to form beam E.sub.3, and the second components of each beam similarly combine to form beam E.sub.4. Note that as the retroreflector 9 is moved, the length L1 is changed by twice as much distance, since it includes the distances to and from the retroreflector 9. Similarly, the rate of change of L1 is twice the rate of change of the distance between retroreflector 9 and partial reflector 6. The two output beams E.sub.3 and E.sub.4 contain useful information regarding the difference of the lengths of the interferometer arms, as discussed below.

The interferometer converts the frequency modulation of the optical carrier beam to an amplitude modulation as will now be described with reference to FIGS. 7a-7d. As with all two-beam interferometers, the interferometer shown in FIG. 1 provides an output 10 whose intensity varies sinusoidally with the difference between the optical path lengths in the two arms. In particular, the intensities of beams E.sub.3 and E.sub.4 vary as

I.sub.3 =I.sub.0 [1-cos (2.pi.L/.lambda.)]/2 (Equation 1)

I.sub.4 =I.sub.0 [1+cos (2.pi.L/.lambda.)]/2 (Equation 2)

where L=L1-L2. As the path difference L changes by one optical wavelength, the intensities vary through one complete cycle, returning to the same values. The arguments of the cosine function in Equations 1 and 2 may be written ##EQU1## Here we have used .lambda.=c/.nu., where c is the speed of light and .nu. is the optical frequency; N is an integer; and .theta. is an increment between zero and 2.pi. to account for a possible non-integer ratio between the path difference L and the wavelength .lambda.. We may then temporarily consider the integer N to be a fixed constant (which may be very large), and turn our attention to the small increments represented by .theta..

From Equation 3 we can see that, in general, the interferometer output intensity varies sinusoidally with both the distance and the optical frequency. It is periodic in L with period .lambda.; this is the distance change necessary to change N by one. It is periodic in optical frequency with a period equal to the free spectral range, or FSR, given by

FSR=c/L (Equation 4)

If the path difference L is small, then the FSR is large, and the interferometer is insensitive to changes in optical frequency. However, if L is thousands of wavelengths or more (large N), then the interferometer output can be a sensitive function of the optical frequency. For small fractional changes in .nu. and L, we can write ##EQU2## where .delta. denotes a small increment to the indicated quantity. This expression shows that if the path difference is large enough, we may use optical frequency changes and distance changes interchangeably to return the intensity I.sub.3 or I.sub.4 to some desired value, such as its minimum or maximum. Thus to maintain the interferometer at this target, we may push one endpoint with an actuator to change the path difference L, or we may tune the optical frequency until L is an integer multiple of the new wavelength. Furthermore, if we use both an optical frequency change and a distance actuator, we may control the path difference to follow a target which may be arbitrarily selected by the tuning of the laser.

A null servo may be constructed if a signal may be derived which is zero at the target condition, negative for errors or detuning to one side, and positive for errors or detuning to the other. This signal may then be used in a servo which minimizes the deviation from the target condition. One way to produce such a signal from the interferometer output signals is to measure the difference in the intensities of the output beams E.sub.3 and E.sub.4 ; this signal is zero for .theta.=.+-..pi./2, and changes sign with deviations of .theta. near these points. This is a simple method of deriving a signal for the servo, but is more susceptible to drift than the frequency modulation methods which we will describe.

The transmission intensity transmitted to each of the outputs of the interferometer varies sinusoidally as a function of the optical carrier frequency as shown in FIG. 7a. For L=1/2 meter, the nodes are separated by about 300 MHz. This is indicated in an exemplary fashion by the 300 MHz in FIG. 7a between two maxima. The so-called orders of the interferometer correspond to the different allowed values of the integer N.

In a spectrometer which measures only the intensity of the coherent optical beam passed through an interferometer, the intensity versus optical frequency corresponds to the graph shown in FIG. 7a.

Frequency or phase modulation of the carrier adds sidebands to the optical signal. The first pair of sideband frequencies are offset from the carrier frequency by the modulation frequency. The modulation frequency may be less than, approximately equal to, or greater than the FSR.

FIG. 7b shows the spectral components of a frequency modulated beam in which the optical carrier frequency CAR is centered at the node shown in FIG. 7a, and the upper sideband USB and lower side band LSB are denoted. The sidebands are separated by a frequency .nu..sub.2, the modulation frequency, from the optical carrier.

Phase modulation and frequency modulation are very closely related. The instantaneous frequency is just the rate of accumulation of phase. This rate includes a large constant rate, known as the carrier frequency, and a small varying increment to the rate, which we may describe as either a frequency increment or the rate of change of a phase increment. Because the resulting waves are essentially the same, frequency and phase modulation need not be considered separately.

The modulation depth is defined as the peak phase increment, usually given in radians. For a sinusoidal frequency modulation waveform, the phase varies cosinusoidally, and the modulation depth is equal to the peak deviation of the instantaneous frequ