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Method and apparatus for performing optical measurements    
United States Patent5459570   
Link to this pagehttp://www.wikipatents.com/5459570.html
Inventor(s)Swanson; Eric A. (Maynard, MA); Huang; David (Cambridge, MA); Fujimoto; James G. (Cambridge, MA); Puliafito; Carmen A. (Weston, MA); Lin; Charles P. (Somerville, MA); Schuman; Joseph S. (Boston, MA)
AbstractA method and apparatus for performing various optical measurements is provided utilizing an optical coherence domain refrectometer (OCDR). A short coherence optical radiation source applies optical radiation through like optical paths to a sample and an optical reflector. The optical reflector is movable in accordance with a predetermined velocity profile to permit interferometric scanning of the sample, the resulting output having a Doppler shift frequency modulation. This output may be demodulated and detected to obtain desired measurements and other information. Additional information may be obtained by applying radiation from two or more sources at different wavelengths to the sample and reflector and by separately demodulating the resulting outputs before processing. Birefringent information may be obtained by polarizing the optical radiation used, by suitably modifying the polarization in the sample and reference paths and by dividing the output into orthogonal polarization outputs which are separately demodulated before processing.
   














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Drawing from US Patent 5459570
Method and apparatus for performing optical measurements - US Patent 5459570 Drawing
Method and apparatus for performing optical measurements
Inventor     Swanson; Eric A. (Maynard, MA); Huang; David (Cambridge, MA); Fujimoto; James G. (Cambridge, MA); Puliafito; Carmen A. (Weston, MA); Lin; Charles P. (Somerville, MA); Schuman; Joseph S. (Boston, MA)
Owner/Assignee     Massachusetts Institute of Technology (Cambridge, MA)
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Publication Date     October 17, 1995
Application Number     08/033,194
PAIR File History     Application Data   Transaction History
Image File Wrapper   Patent Term   Fees
Litigation
Filing Date     March 16, 1993
US Classification     356/479
Int'l Classification     G01D 009/02
Examiner     Turner; Samuel A.
Assistant Examiner    
Attorney/Law Firm     Wolf, Greenfield & Sacks
Address
Parent Case     This application is a continuation of application Ser. No. 07/692,877 filed on Apr. 29, 1991, now abandoned.
Priority Data    
USPTO Field of Search     356/345 356/356 356/358 356/357 356/355 356/359 356/360 250/227.19 250/227.27
Patent Tags     performing optical measurements
   
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What is claimed is:

1. A system for performing selected optical measurements on a sample comprising:

a short coherence length optical radiation source at a wavelength .lambda.;

a reference optical reflector;

a first optical path leading to said reflector;

a second optical path leading to said sample;

means for applying optical radiation from said source through the first optical path to said reflector and through the second optical path to the sample;

means for altering the relative lengths of said optical paths in accordance with a predetermined velocity profile, said profile providing for continuous alteration in said relative length at an instantaneous velocity V for each point on the profile in at least the region of said profile where said measurements are to be performed;

means for combining reflections from the reflector received through the first optical path and reflections from the sample received through the second optical path, the resulting combined optical output having interference fringes at length matched points on the two paths and having an instantaneous modulating frequency including a Doppler shift frequency at a frequency f.sub.D= 2V/.lambda.;

means for demodulating said output; and

means for processing the demodulated output to obtain information concerning said selected measurements.

2. A system as claimed in claim 1 wherein there is a predominant low frequency noise for the system, wherein the velocity V is not sufficient to result in a Doppler shift frequency f.sub.D which is higher than said predominant low frequency noise, wherein said means for altering includes means for causing a vibratory change at a frequency f.sub.M in the length of at least one of said optical paths, and wherein said means for demodulating demodulates for a modulating frequency which is a selected combination of f.sub.D and f.sub.M.

3. A system as claimed in claim 1 wherein there is a predominant low frequency noise for said system, wherein the velocity V is sufficiently high so that the Doppler shift frequency f.sub.D is higher than said predominant low frequency noise, and wherein said modulating frequency is f.sub.D.

4. A system as claimed in claim 3 wherein the velocity V is substantially uniform over said velocity profile, at least in the portion thereof over which measurements are being taken.

5. A system as claimed in claim 4 wherein said velocity profile is substantially a sawtooth profile having a ramp portion with a substantially uniform velocity V.

6. A system as claimed in claim 4 wherein said velocity profile is a substantially triangular velocity profile having two sides, at least one side of which is at said uniform velocity V, and wherein measurements are taken during movements along at least one side of said profile.

7. A system as claimed in claim 3 wherein said means for altering alters said first path length, wherein said velocity profile provides a velocity which is not uniform with time, resulting in variations in the instantaneous f.sub.D, wherein said means for demodulating includes means for adapting to the f.sub.D frequency variations, and including means for providing position information on alterations in said first path length to said means for processing.

8. A system as claimed in claim 7 wherein said demodulating means includes filter means for controlling the frequency band about said modulating frequency which is accepted by the means for demodulating, and wherein said means for adapting includes means for expanding the frequency band about said modulating frequency which is accepted by said means for demodulating.

9. A system as claimed in claim 7 wherein said means for adapting includes means for producing a signal having a frequency which varies substantially inversely with the variation in f.sub.D caused by velocity variations, and means for mixing said signal with said output to obtain an output having a substantially constant modulating frequency.

10. A system as claimed in claim 7 wherein said velocity profile is substantially a sinewave profile.

11. A system as claimed in claim 1 wherein said means for demodulating includes a logrithmic amplifier for dynamic range compression.

12. A system as claimed in claim 1 wherein said means for demodulating includes a bandpass filter centered at said modulation frequency in a pass band which is roughly two to three times the output signal bandwidth of approximately V/CL, where CL is the coherent length of the source.

13. A system as claimed in claim 1 wherein each of said optical paths include a single mode optical fiber, and means for coupling optical energy between the optical fiber and the reflector/sample at the end of the path.

14. A system as claimed in claim 13 wherein said fibers are polarization maintaining optical fibers.

15. A system as claimed in claim 1 including means for equalizing the group velocity dispersion in the two optical paths.

16. A system as claimed in claim 15 wherein said paths are formed utilizing single mode optical fibers of substantially equal length.

17. A system as claimed in claim 1 wherein measurements are to be taken for a predetermined depth extent within the sample, and wheren the numerical aperture for the means coupling the sample and the optical fiber corresponds to a depth field equal to the said depth extent.

18. A system as claimed in claim 1 wherein said means for altering includes means for reciprocating the reflector in first and second directions substantially perpendicular to said first optical path, to, respectively, lengthen and shorten the path, measurements being taken when the reflector is moved in at least one of said directions.

19. A system as claimed in claim 18 wherein said reflector may wobble slightly as it is moved, wherein said first optical path includes an optical fiber and means for optically coupling between the fiber and the reflector, and including means for maintaining the reflector in alignment in spite of movement and wobble thereof.

20. A system as claimed in claim 19 wherein said reflector includes a corner-cube, said corner-cube functioning as said means for maintaining.

21. A system as claimed in claim 1 wherein said sample is a biological sample, said measurements being indicative of optical properties of the sample along the direction of application of the optical radiation.

22. A system as claimed in claim 21 wherein the biological sample is in the eye, the measurements being of selected optical properties in the eye.

23. A system as claimed in claim 1 wherein measurements are being taken on at least one birefringent layer; and

including means for polarizing the optical radiation from said source in a selected first direction, means for altering the polarization of the-radiation differently for radiation applied to said reflector and to said sample, said means for altering causing reflected radiation from the reflector to be polarized in a selected second direction and causing reflected radiation from the sample to be polarized in a direction dependent on the birefringence of said layer, the polarized reflected radiation from the reflector and sample being interferometrically combined, means for splitting and detecting the combined output as two outputs having orthogonal polarizations, means for separately processing the two outputs to obtain separate interferometric signals, and means for combining said interferometric signals to provide selected indications of birefringence.

24. A system as claimed in claim 1 wherein said optical source includes means for providing radiation at at least two different wavelengths .lambda..sub.1 and .lambda..sub.2, wherein said radiation at different wavelengths are absorbed and reflected differently by the sample resulting in at least a first combined optical output modulated at a frequency f.sub.1, and a second combined optical output modulated at a frequency f.sub.2, and wherein said means for demodulating includes separate demodulating means for each of said combined outputs.

25. A system as claimed in claim 24 wherein each of said means for demodulating includes means for filtering in a selected band centered at the appropriate modulated frequency f.sub.n.

26. A system as claimed in claim 1 wherein said radiation source is selected from sources including light emitting diodes, superluminescent diodes, pulsed laser source, and incandescent light source.

27. A system as claimed in claim 1 including means for aligning the second optical path and said sample.

28. A system as claimed in claim 27 wherein said means for aligning includes means for angularly aligning, means for linearly aligning, and means for depth aligning.

29. A system as claimed in claim 1 wherein said second optical path terminates in a probe for applying a beam of said radiation to said sample, and including means for scanning said beam in transverse direction over said sample to generate an image having a plurality of dimensions.

30. A system as claimed in claim 1 wherein said optical paths are single mode fiber-optical paths, wherein said second optical path terminates in a probe, and including an endoscope in which said probe is mounted for probing internal body cavities.

31. A method for performing selected optical measurements on a sample comprising the steps of:

causing short coherence length optical radiation of a wavelength .lambda. to impinge on a reference reflector and on the sample through first and second optical paths, respectively;

altering the relative lengths of said paths in accordance with a predetermined velocity profile, said profile providing for continuous alteration in said relative length at an instantaneous velocity V for each point on the profile in at least the region of said profile where said measurements are to be performed;

combining reflections from the reflector received through the first optical path and reflections from the sample received through the second optical path, the resulting combined optical output having interference fringes at length matched points on the two paths and having an instantaneous modulating frequency including a Doppler shift frequency at a frequency f.sub.D= 2V/.lambda.;

demodulating said output; and

processing the demodulated output to obtain information concerning said selected measurements.

32. A method as claimed in claim 31 wherein said sample is a biological sample, said measurements being indicative of optical properties of the sample along the direction of application of the optical radiation.

33. A system for performing selected optical measurements on a sample having at least one birefringent layer comprising:

a short coherence length optical radiation source at a wavelength .lambda., said radiation being polarized in a first state;

means for defining a reference optical path and a sample optical path through which radiation from said source may bidirectionally pass;

means for altering the polarization of the radiation passing through at least one of said paths in a manner such that radiation from said source in said paths have different polarization states, reflected radiation from said sample having a polarization in a state which varies as a function of the birefringence of said layer;

means for interferometrically combining reflected radiation from said optical paths;

means for providing a controlled variation in the relative path lengths for interferometrically combined radiation;

means for splitting and detecting the interferometrically combined output as two outputs having orthogonal polarization states;

means for separately processing the two outputs to obtain separate interferometric signals; and

means for combining said interferometric signals to provide a selected indication of birefringence profile.

34. A system as claimed in claim 33 wherein said optical paths are formed of polarization maintaining fibers, said reference optical path terminating in a reflector, and wherein said means for providing controlled variations controls the length of the reference path.

35. A system as claimed in claim 33 wherein said two outputs are a horizontal amplitude component and a vertical amplitude component, and wherein said means for combining includes means for utilizing said amplitude components to determine at least one of birefringent retardations in the sample and the amplitude of sample reflections.

36. A system as claimed in claim 33 wherein said two outputs are combined to provide polarization insensitive measurements.

37. A system for performing selected optical measurements on a sample comprising:

means for providing short coherence length optical radiation at at least two different wavelengths .lambda..sub.1 and .lambda..sub.2, at least one spectral characteristic of the sample being different between wavelengths .lambda..sub.1 and .lambda..sub.2 ;

means for defining a reference optical path and a sample optical path through which said radiation at different wavelengths may bidirectionally pass;

means for interferometrically combining reflected radiation from said optical paths, said means for combining having at least a first combined optical output modulated at a frequency f.sub.1 and a second combined optical output modulated at a frequency f.sub.2 ;

means for providing a controlled variation in the relative path lengths for interferometrically combined radiation;

means for separately demodulating said first and said second combined optical outputs; and

means for processing the two outputs to obtain information concerning said selected measurements.

38. A system as claimed in claim 37 wherein said reference optical path terminates in a reflector, and wherein the means for providing controlled variation controls the length of the reference path.

39. A system as claimed in claim 37 wherein said means for separately demodulating includes means for filtering each of said combined optical outputs in a selected band centered at the appropriate modulated frequency.

40. A method for optically measuring a microstructural feature of selected biological tissue comprising the steps of:

generating a short coherence length optical signal at a selected wavelength;

passing said signal through a reference optical path and through a sample optical path terminating at said biological tissue, said paths being bidirectional to also pass reflected radiation;

interferometrically combining reflected optical signals from said optical paths;

providing a controlled variation in the relative path lengths of the interferometrically combined beams;

detecting the results of said interferometrically combining step; and

processing the result of the detecting step to obtain information concerning said microstructural feature.

41. A method as claimed in claim 40 wherein said biological tissue is occular tissue located in a patient's eye, said sample optical path terminating within the patient's eye, and the reflected radiation interferometrically combined including that from said occular tissue.

42. A method as claimed in claim 41 wherein said selected biological tissue is at least one of subretinal tissue, retinal tissue, and optic nerve tissue of a patient's eye, said sample optical path terminating within the patient's eye, and the reflected radiation interferometrically combined including that from said tissue of the patient's eye.

43. A method as claimed in claim 42 wherein said method is a method of measuring retinal nerve fiber layer thickness, and wherein the reflected radiation interferometrically combined includes that from said retinal nerve fiber layer.

44. A method as claimed in claim 40 wherein said biological tissue is a birefringent tissue layer;

wherein said generating step generates an optical signal which is polarized in a first state; and

including the step of altering the polarization state for the radiation passing through at least one of said paths in a manner such that the signal from said generating step in said paths have different polarization states, reflected radiation from said birefringant tissue layer having a polarization in a state which varies as a function of the birefringence of such layer;

said detecting step including the step of splitting the interferometrically combined output into two outputs having orthogonal polarization states; and

said processing step including the steps of separately processing the two outputs to obtain separate interferometric signals, and combining the interferometric signals to provide information concerning the structure of said tissue layer.

45. A method as claimed in claim 44 wherein said biological tissue is birefringent occular tissue of a patient's eye, said sample optical path terminating at the patient's eye and the reflected radiation interferometrically combined including that from said occular tissue.

46. A method as claimed in claim 45 wherein said method is a method of measuring retinal nerve fiber layer thickness, said retinal nerve fiber layer being a birefringent layer and wherein the reflected radiation interferometrically combined including that from said retinal nerve fiber layer.

47. A method as claimed in claim 44 wherein said method is a method of measuring retinal nerve axon density, the retinal nerve fiber layer being a birefringent layer, and wherein said processing step includes the step of determining the rate of change in birefringent retardation with nerve fiber layer thickness.

48. A method as claimed in claim 40 wherein said generating step includes the step of generating short coherence length optical radiation at at least two different wavelengths .lambda..sub.1 and .lambda..sub.2, at least one spectral characteristic of the biological tissue being different between the wavelengths .lambda..sub.1 and .lambda..sub.2 ;

wherein said interferometrically combining step includes the steps of providing a first combined optical output modulated at a frequency f.sub.1 and a second combined optical output modulated at a frequency f.sub.2 ;

wherein said detecting step includes the steps of separately demodulating said first and second combined optical outputs; and

wherein said processing step includes the step of processing the two outputs to obtain information concerning said microstructural feature.

49. A method as claimed in claim 48 wherein the demodulating step includes the step of filtering in a selected band centered at the appropriate modulated frequency.

50. A method as claimed in claim 48 wherein said processing step includes the step of utilizing a detected difference in spectral characteristics of a sample at different wavelengths to determine at least one of a material of the sample and a property of a sample material.

51. A method as claimed in claim 48 wherein said sample is formed of at least two layers which are composed of material having different spectral characteristics at at least one of the wavelengths .lambda..sub.1 and .lambda..sub.2, and wherein said processing step includes the step of utilizing a detected difference in spectral characteristics for a sample at different wavelengths to determine the boundary between said layers.
 Description Submit all comments and votes
 


FIELD OF THE INVENTION

This invention relates to the performing of precision measurements and more particularly to a method and apparatus for optically performing precision measurements, generally distance and thickness measurements, on biological and other samples.

BACKGROUND OF THE INVENTION

There are many industrial, medical, and other applications where high resolution (generally less than 10 micrometer) measurement of distances, thicknesses, and optical properties of a biological or other sample are required. These applications include measurements of biological tissue layers, semiconductors and other applications involving multiple thin layers of material, as well as in the non-destuctive testing of small structures such as integrated optical circuits, optical connectors, optical couplers, semiconductor lasers and semiconductor optical amplifiers. Such applications also include various medical applications including laser microsurgery and diagnostic instrumentation.

Existing techniques for performing such measurements include optical coherence domain reflectometers (OCDR), optical time domain reflectomerry (OTDR), ultrasound, scanning laser microscopes, scanning confocal microscopes, scanning laser ophthalmoscopes and optical triangulation. Existing OCDR systems do not normally have the rapid data acquisition rate required for the measurement of biological or other samples having the potential for dynamic movement; while OTDR systems are very expensive and have only limited resolution and dynamic range.

Ultrasound, which is perhaps the most commonly used technique, is disadvantageous for applications such as taking measurements on the eye in that, in order to achieve the required acoustic impedence matches, and to thus avoid beam losses and distortion, contact is generally required between the ultrasonic head or probe and the product or patient being scanned. While such contact is not a problem when scans are being performed on, for example, a patient's chest, such probes can cause severe discomfort to a patient when used for taking eye measurements such as those used for measuring intraocular distances for computing the power of lens implants.

The relatively long wavelengths employed in ultrasound also limit spatial resolution. Further, ultrasound depends on varying ultrasound reflection and absorption characteristics to differentiate and permit recording or display of tissue, or other boundaries of interest. Therefore, when the acoustic characteristics of adjacent layers to be measured are not significantly different, ultrasound may have difficulty recognizing such boundaries.

Scanning laser or confocal microscopes and scanning laser ophthalmoscopes (SLO) provide highly spatially resolved images, for example being able to generate real time video images of the eye with a lateral resolution of a few micrometers. However, the depth resolution of SLO's quickly degrade with decreasing numerical aperture. For example, SLO measurements of the retina through the pupil aperture restrict the depth resolution to roughly 200 microns. SLO's are also expensive, costing in the range of a quarter million dollars.

Optical triangulation offers fairly high resolution, but requires parallel boundaries. Such devices also have relatively poor signal-to-noise ratios and have degraded resolution at greater depths, where numerical aperature is restricted.

A need, therefore, exists for an improved method and apparatus for performing high resolution measurements and in particular for optically performing such measurements, which improved technique does not require contact with the body being measured, which maintains substantially constant high resolution over a scanning depth of interest, regardless of available aperture size and which is relatively compact and inexpensive to manufacture. Such a system should also be capable of providing differentiation between sample layers, should be able to provide identification of layer material or of selected properties thereof, should be able to provide one, two and three-dimensional images of a scanned body and should be rapid enough for use in biological and other applications where the sample being measured changes over relatively short time intervals. Finally, it would be desirable if such technique could also provide information concerning the birefringence property and spectral properties of the sample.

SUMMARY OF THE INVENTION

In accordance with the above, this invention utilizes an optical coherence domain reflectometer (OCDR) technique to perform various measurements. In particular, optical measurements are performed on a sample by providing a short coherent length optical radiation source at a wavelength .lambda. and a reference optical reflector. The short coherence length permits fine spatial resolutions. The optical source could, for example, be a light emitting diode or super luminescent diode and would preferably have a coherence length of less than 10 micrometers. The reference optical reflector would typically be a high reflection mirror. First and second optical paths are provided leading to the reference reflector and sample, respectively. Optical radiation (i.e. light) from the source is split, being applied through the first optical path to the reflector and through the second optical path to the sample. Changes are made in the length of the first optical path with a predetermined velocity profile, for example at a uniform velocity V. Reflections from the reflector received through the first optical path and reflections from the sample received through the second optical path are optically combined, the resulting combined optical output having interference fringes at matched path lengths and forming the envelope for a modulating signal. The modulated signal may be modulated at the Doppler shift frequency f.sub.D= 2V/.lambda. caused by reflector translation or may be a combination of f.sub.D and a modulating frequency f.sub.M. The combined optical output is then demodulated to obtain the coherence envelope and the demodulated output processed to obtain information concerning the selected measurements. A logrithmic amplifier may be provided in the demodulator for dynamic range compression.

The velocity V at which changes in the path length are made is preferably relatively high, being greater than approximately 1 cm/sec for the preferred embodiment. To avoid the need for a superimposed modulating frequency f.sub.M, the reflector translation velocity should be high enough so that f.sub.D is higher than the predominant low frequency noise. For the preferred embodiment, the changes in first path length may be ramped, with the change in one direction occurring at the velocity V and the change in the other direction occurring much more rapidly. The changes in first path length may also have a triangular pattern, with the change in at least one direction being at the velocity V. The scan pattern may also be a sinusoidal pattern. With uniform velocity, measurements would be taken during a translation which occurs at the velocity V and may occur for path length changes in both directions with a triangular drive. With a sinusoidal drive, the nonlinearity may be detected and taken into account in subsequent processing.

The system is preferably implemented utilizing optical fibers in the optical paths; however, the system may also be implemented utilizing bulk optics or other optical components. Where optical fibers are employed, the lengths of the paths and the lengths of the fibers in the paths are preferably both substantially equal.

The changes in the first optical path are preferably accomplished by reciprocating the mirror or other reference reflector in a direction substantially perpendicular to the optical path. A suitable means may be provided for maintaining the reflector in alignment in spite of movement and wobble of the reflector as it is moved. The numerical aperture for the coupling to the sample should also correspond to a depth field equal to a predetermined depthsextent within the sample over which measurements are to be taken.

If measurements are desired on at least one birefringent layer, the system includes a means for polarizing the optical energy from the source in a selected first direction, the polarization of the light being altered differently for energy applied to the reflector and to the sample. The elements which alter the polarization also cause reflected light energy from the reflector to be polarized in a second selected direction and cause reflected light energy from the sample to be polarized in a direction dependent on the birefrigence of the birefringent sample. The combined outputs containing interferometric fringes are split and detected as two outputs having orthogonal polarizations. These two outputs are then separately processed to obtain separate interferometric signals and the separate interferometric signals are combined to provide selected indications of birefringence.

In order to enhance the ability of the system to distinguish a boundary between layers having similar optical properties, and to obtain other information concerning such layers, advantage is taken of the fact that the optical absorption, impedance, and other optical characteristics of materials may vary with wavelength. Thus, one layer of a junction may be more easily detected at a first wavelength of the optical energy, while another layer may be more easily detected at a different wavelength. For one embodiment of the invention, two or more short coherence length optical sources provide optical radiation at different wavelengths, for example .lambda.1 and .lambda.2, the sample reacting differently to inputs received at these different wavelengths. This results in a first interferometric optical output modulated at a frequency f.sub.D1= 2V/.lambda.1 and a second interferometrical optical output modulated at a frequency f.sub.D2= 2V/.lambda..sub.2. The two outputs are separately demodulated and may then be separately processed or processed together.

The sample arm may terminate in a probe which may be used for one dimensional measurement on a sample, or may be scanned to obtain two or three dimensional measurements. The probe may be utilized to map or perform measurements on the eye, skin or other externally accessible body part, or may be incorporated into an endoscope for probing internal body cavities such as blood vessels, airways and digestive tract.

The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular description of preferred embodiments of the invention as illustrated in the accompanying drawings.

IN THE DRAWINGS

FIG. 1 is a schematic block diagram of a first fiber optic embodiment of the invention.

FIG. 2 is a schematic block diagram of a second fiber optic embodiment of the invention.

FIG. 3 is a schematic block diagram of a bulk optic embodiment of the invention illustrating the use of two separate wavelengths to enhance resolution.

FIG. 4 is a diagram of the envelope of a scan output which might be obtained utilizing the embodiments of FIGS. 1-3.

FIG. 5A is an enlarged diagram of a portion of an output waveform such as that shown in FIG. 3, illustrating the modulation frequency on which such envelope is superimposed. FIG. 5B is a diagram of the waveform of FIG. 5A after demodulation.

FIG. 6 is a schematic block diagram of a third fiber optic embodiment of the invention utilizing polarized light to detect birefringence.

FIGS. 7A-7C are diagrams obtained using an embodiment such as that shown in FIGS. 1-3 and 6 to scan a human aorta which is normal, contains fatty plaque, and contains calcified plaque, respectively.

DETAILED DESCRIPTION

Referring first to FIG. 1, a fiber optic optical coherence domain refrectometer (OCDR) 10.1 is shown which incorporates the teachings of this invention. In particular, the output from a short coherence length optical source 12 is coupled as one input to an optical coupler 14. Such coupling may be through a fiber optic path 16. Source 12 may, for example, be a light emitting diode (LED) or super luminescent diode (SLD) of suitable wavelength, and preferably has a coherence length of less than 10 micrometers. Source 12 might also be a pulsed laser source or an incandescent source; but for most applications a LED or SLD would be preferable, a pulsed laser having higher power but being much more costly and having lower resolution, and an incandescent source having good resolution but very low power. As will be discussed later, it is desirable that the coherence length of source 12 be minimized to enhance the resolution of the system. The other input to coupler 14 is from a laser 18 generating an optically visible output which is applied to the coupler through a fiber optic path 20. As will be discussed in greater detail later, laser 18 does not contribute to the normal operation of the system and is utilized only to provide a source of visible light for proper alignment with a sample when the light from source 12 is in the infrared region or is otherwise not visible. Further, unless otherwise indicated, all optical fibers utilized for the various embodiments will be assumed to be single mode fibers. These fibers may be polarization maintaining or not, but are preferably polarization maintaining to insure good polarization mode matching.

The output from coupler 14 is applied as the input to coupler 22 through fiber optic path 24. The light or optical energy received at coupler 22 is split between a first fiber optic path 26 leading to sample 28 being scanned and a second fiber optic path 30 leading to a reference reflector or mirror 32. Fiber optic path 26 is terminated in a probe module 34 which includes a lens 36 for focussing the energy beam applied to the module on sample 28 and for receiving reflections from sample 28 and transmitting the reflections back to the fiber. Path 30 also has a focussing lens 38 for focussing light on mirror 32. The optical fibers of path 26 may be wrapped around a piezoelectric crystal 40 which vibrates (i.e. expands and contracts) in response to an applied electrical signal to cause slight expansion and contraction of the optical fiber and to thus modulate the optical signal passing through the fiber. The total length of path 26 between coupler 22 and a selected depth point in sample 28 and the total length of path 30 between coupler 22 and mirror 32 should be substantially equal for each depth point of the sample during a scan of selected depth range. In addition, to prevent group velocity dispersion which would decrease spatial resolution, the lengths of the optical fibers in paths 26 and 30 should also be substantially equal. Alternatively, the group velocity dispersions may be equalized by placing optical materials of known group velocity dispersion and thickness in the light paths to compensate for any inequality. For example, where the fiber in the reference path may need to be shorter than that in the sample probe, a length of high dispersion material may be included in the reference path. It is also important that the termination of the optical fibers utilized in the system be angle polished and/or anti-reflection coated to minimize reflections.

Reference mirror 32 is secured to a mechanism 39 which reciprocates the mirror toward and away from lens 38 in a particular pattern. For the embodiment shown in FIG. 1, mechanism 39 moves mirror 32 away from lens 38 at a uniform, relatively high velocity, which velocity is preferably greater than 1 cm/sec. The length or extent or movement of mirror 32 by mechanism 39 is at least slightly greater than the desired scan depth range in sample 28. When mirror 32 reaches the far end of its travel path, for one embodiment the mirror is rapidly returned to the initial position, the scan having a generally ramp or sawtooth profile, with measurements being taken on the ramp. Mechanism 39 may also return mirror 32 to its initial position at substantially the same rate V, movements of the mirror thus being in a triangular pattern. With a triangular scan, readings or measurements can be taken with the mirror moving in either one of the two directions, or can be taken with the mirror moving in both directions. Mechanism 39 may be any one of a variety of devices adapted for performing the mirror translation function. For example, mechanism 39 could be a stepper motor, the motion of which is applied to mirror 32 through an averaging mechanism to provide uniform velocity. A DC servo motor might also be utilized to obtain the desired motion. Various electromagnetic actuators, for example, a speaker coil, may also be utilized for moving the mirror. With such electromagnetic actuators, detection of mirror position and servocontrol thereof are also required in order to achieve the desired uniform motion. More specifically, in such a system a signal indicative of desired mirror position at each point in the mirror travel path would be compared against a signal from a detector of actual mirror position and any resulting error signals utilized to control the actuator to maintain the mirror moving at the desired constant velocity. It would also be possible to use a servo-controlled galvanometer driven linear translator for the mechanism 39.

One potential problem is that when the mirror 32 is being translated at high speed by mechanism 39, it is virtually impossible to eliminate some wobbling of the mirror which may adversely affect the accuracy of distance determinations. Various mechanisms may be utilized to correct for such mirror wobble so that a beam reflected from the mirror will be coupled back into the fiber. One simple technique to compensate for the wobble problem is to have lens 38 focus the beam at a small spot near the center of mirror 32 rather than causing the lens to apply a collimated beam to the mirror. The focussed beam provides greater tolerance in returning the beam to the fiber in spite of slight angular variations in the mirror than does a collimated beam.

A second technique to compensate for mirror wobble is to substitute a corner-cube on which the beam is initially incident for mirror 32. Reflections from the corner-cube reflect off a stationary mirror and the corner-cube to the fiber. Corner-cubes generally have the property that, regardless of the angle at which a beam is incidentthereon, the beam will always return in exactly the opposition direction at which the beam was incident.

Reflections received by probe 34 from sample 28 are applied through path 26 to coupler 22 and optical reflections from mirror 32 are applied through lens 38 and path 30 to the coupler. The optical signals received from the sample and the reference are combined in coupler 22, resulting in interference fringes for length matched reflections, (i.e. reflections for which the difference in reflection path lengths is less than the source coherence length) and the resulting combined output is coupled onto fiber optic path 40. The optical signal on fiber path 40 is applied to a photodetector 42 which converts the optical combined signal on path 40 to a corresponding current-varying electrical signal. The current-varying electrical signal on output line 44 from photodetector 42 is preferably convertd to a voltage varying signal by a transimpedance amplifier (TIA) 45 or other suitable means, the TIA output being applied as an input to a demodulator 46.

Various forms of demodulation may be utilized in practicing the teachings of this invention. In its simplest form, demodulator 46 may consist of a bandpass filter 78 centered around the modulation frequency of the combined output signal and an envelope detector. The filter assures that only the signal of interest is looked at and removes noise from the output. This enhances the signal-to-noise ratio of the system and thus system sensitivity. The filtered signal is then applied to the envelope detector.

The envelope detector in demodulator 46 may consists of a rectifier 82 and a subsequent low pass filter 84. The rectifier output would be proportional to the square root of the sample reflectivity. The second filter removes any high frequency components from what is basically a base band signal. The demodulator preferably also includes a logrithmic amplifier 86, either before or after the rectifier, for dynamic range compression. Without the logrithmic amplifier, strong reflections from boundaries would either be off scale or weaker reflections would not be visible.

The exemplary demodulator described above is one type of heterodyne demodulator. However, a variety of other demodulation techniques known in the art may also be utilized to perform the demodulator function.

The demodulated output from circuit 46 is the interferometric envelope signal of interest. A suitable printer 48 may be utilized to obtain a visual record of this analog signal which may be utilized by a doctor, engineer or other person for various purposes. For preferred embodiments, the analog output from demodulator 46 is applied, either in addition to or instead of to printer 48, through an analog-to-digital converter 50 to a suitable computer 52 which is programmed to perform desired analyses thereon. Computer 52 may, for example, control the display of the demodulated signal on a suitable display device 54, such as a cathode ray tube monitor, or may control a suitable printer to generate a digital record. In addition, computer 52 may detect various points of interest in the demodulated envelope signal and may perform measurements or make other useful determinations based on such detections. Computer 52 may be a suitably programmed standard processor or a special purpose processor may be provided for performing some or all of the required functions.

The embodiment shown in FIG. 1 would be utilized where mirror 32 is scanned by mechanism 39 at an intermediate but uniform velocity. For purposes of this discussion, an intermediate scanning velocity is considered one at which the Doppler frequency shift caused by the mirror movement is not negligible, but is low enough to fall within the predominant low frequency noise for the system. The noise spectrum includes noises arising from fluctuations in light source 12, mechanical components and electrical circuits, and are larger at lower frequencies, typically below 10 kHz. The Doppler shift frequency f.sub.D results from the translation of the reference mirror 32 and is given by the equation:

f.sub.D= 2V/.lambda.

where V is the velocity at which the mirror is being moved at the given time and .lambda. is the optical wavelength of the source. Thus, where this Doppler shift is less than 10 kHz, additional modulation is needed to shift the modulation frequency above the predominant noise spectrum. In FIG. 1, this is achieved by introducing sinusoidal phase modulation by use of piezoelectric transducer 40. While in FIG. 1 the additional modulation is introduced by use of the oscillator or transducer in reference path 26, such modulation could also be provided in the sample arm or path 30. Further, in addition to piezoelectric, the small movement required for this supplemental modulation may be achieved using electromagnetic, electrostatic, or other elements known in the art for providing small generally sinewave movements. Alternatively, this supplemental modulation can be achieved by passing light in the reference arm and/or sample arm through acousto-optic modulators. Such modulators would normally be attached to provide supplemental movement to the mirror.

The supplemental modulation from transducer 40 or other suitable means which modulate the optical path length is at a frequency f.sub.M and the oscillation-amplitude of this modulator is adjusted so that the peak-to-peak oscillating movement or optical delay change is one-half of the wavelength .lambda. of source 12. The combined effect of the supplemental modulation and the Doppler shift frequency causes the output envelope to be on modulating frequencies of f.sub.D, f.sub.M +f.sub.D, f.sub.M -f.sub.D and at higher harmonics and f.sub.M .+-.f.sub.D. f.sub.M is normally chosen to be higher than the predominant noise spectrum.

Demodulation of the output from photodetector 42 is normally at f.sub.M +f.sub.D and/or f.sub.M -f.sub.D. For purposes of illustration, it will be assumed that demodulation is at f.sub.M +f.sub.D. The center frequency for bandpass filter 78 is thus set for the frequency (f.sub.M +f.sub.D). The bandwidth for filter 78 should be approximately two to three times the full-width-half-maximum (FWHM) bandwidth of the received signal to avoid signal broadening and distortion. This bandwidth is given by the equation ##EQU1## where V is the velocity at which the mirror is being moved, .increment.l is the coherence length of source 12 and is given by the equation ##EQU2## where .increment..lambda. is the full-width half-power spectral width or wavelength bandwidth of the optical radiation or light from source 12 and might typically be in a range from 20 to 30 nm. The bandwidth of low pass filter 84 would typically be roughly identical to that of bandpass filter 78.

If the velocity at which mirror 32 is being moved has a high enough speed so that the resulting Doppler shift frequency is higher than the predominant noise spectrum, then supplemental modulation by a device such as phase modulator 40 is not required. For an 830 nm wavelength output from source 12, which might be a typical source wavelength, this occurs for a scan velocity above approximately 4 mm/sec. In such a system, the detection electronics would be the same as those discussed above in conjunction with FIG. 1 except that the center frequency for bandpass filter 78 would be set to the Doppler shift frequency f.sub.D. As the scanning speed increases, the bandwidth of the signal .increment.f also increases, resulting in corresponding increases in the bandwidth of filters 78 and 84. This leads to a loss of detection sensitivity, an inevitable result of high speed scan.

High speed scans also permit measur