Scanning stylus atomic force microscope with cantilever tracking and optical access

Claims

What is claimed as new and desired to be secured by Letters Patent of the United States is:

1. An atomic force microscope, comprising:

a scanning mechanism;

a light source;

a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a fixed sample;

a stylus mounted on said cantilever;

an optical assembly comprising at least one steering lens, mounted on said scanning mechanism to guide a light beam emitted from said light source on the cantilever and to follow substantially a fixed point on said cantilever during movement of said scanning mechanism; and

a position detector which receives a reflected light beam from said cantilever and detects a deflection of said cantilever;

wherein said optical assembly comprises means for producing a point source of light between a fixed end and a free end of said scanning mechanism.

2. An atomic force microscope as recited in claim 1, wherein said optical assembly steers said light beam onto a fixed point on said cantilever during a scan of said scanner of at least 30 .mu.m.

3. An atomic force microscope as recited in claim 1, wherein said scanning mechanism comprises a piezoelectric tube scanner and said optical assembly is mounted in said tube scanner.

4. An atomic force microscope as recited in claim 1, wherein said scanning mechanism comprises at least one piezoelectric member, where said at least one piezoelectric member has an asymmetric cutout.

5. An atomic force microscope as recited in claim 1, wherein said scanning mechanism comprises:

a piezoelectric tube scanner; and

a mounting member attached to said tube scanner and made of piezoelectric material, said cantilever being attached to said mounting member.

6. An atomic force microscope as recited in claim 3, further comprising an optical mirror mounted in or in a vicinity of said tube scanner for receiving a light beam from said light source and directing said light beam to said optical assembly.

7. An atomic force microscope as recited in claim 1, further comprising:

a second position detector; and

a beam splitter for directing a portion of light emitted from said light source onto said second position detector, wherein said beam splitter is mounted between said optical assembly and said cantilever;

wherein an output of the position detector is used to measure a motion of the scanner and cantilever in X and Y scan directions.

8. An atomic force microscope as recited in claim 1, wherein:

said scanning mechanism comprises a scanner; and

said optical assembly comprises a focus lens, and a steering lens mounted in or alongside said scanner, said point source being formed between said focus lens and said steering lens.

9. An atomic force microscope as recited in the claim 8, wherein said focus lens and said steering lens focus an image of said point source on said cantilever, during scanning motion of said cantilever.

10. An atomic force microscope as recited in claim 8, further comprising an adjustment system for moving a position of the point source in a rough plane that is generally parallel to the sample, but maintaining an essentially fixed vertical position, keeping a vertical distance between said point source and said steering lens substantially constant, wherein said adjustment system allows the image to be moved onto said cantilever.

11. An atomic force microscope as recited in claim 8, wherein a distance moved by said steering lens during scanning of said cantilever is .DELTA.o, a distance moved by said image during said scanning is .DELTA.i, y.sub.i is a distance between said steering lens and said image, and y.sub.o is a distance between said steering lens and said point source, a magnification of said optical assembly M.sub.l =y.sub.i /y.sub.o, and a mechanical magnification of said system M.sub.s is chosen such that:

M.sub.s =.DELTA.i/.DELTA.o=1+M.sub.l.

12. An atomic force microscope as recited in claim 1, wherein said optical assembly comprises:

means for forming a focused spot using said light beam; and

a lens adapted to image said spot on said cantilever; wherein a distance moved by said lens during scanning of said cantilever is .DELTA.o, a distance moved by said image during said scanning is .DELTA.i, y.sub.i is a distance between said lens and said cantilever, and y.sub.o is a distance between said lens and said image, a magnification of said optical assembly M.sub.l =y.sub.i /y.sub.o, and a mechanical magnification of said system M.sub.s is chosen such that:

M.sub.s =.DELTA.i/.DELTA.o=1+M.sub.l.

13. An atomic force microscope as recited in claim 1, wherein said light source is not moved by said scanning mechanism.

14. An atomic force microscope as recited in claim 1, wherein said optical assembly is mounted inside said scanning mechanism.

15. An atomic force microscope as recited in claim 14, wherein said optical assembly is translated by said scanning mechanism to focus said light beam on to said cantilever and to steer said focused light beam such that said focused light beam follows substantially said fixed point on said cantilever.

16. An atomic force microscope, comprising:

a scanning mechanism;

a light source;

a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a fixed sample;

a stylus mounted on said cantilever;

an optical assembly comprising at least one steering lens, mounted on said scanning mechanism to guide a light beam emitted from said light source on the cantilever and to follow substantially a fixed point on said cantilever during movement of said scanning mechanism; and

a position detector which receives a reflected light beam from said cantilever and detects a deflection of said cantilever;

wherein said optical assembly comprises:

a first lens for focusing light from said light source to a point source between a fixed end and a free end of said scanning mechanism; and

a steering lens mounted between said point source and said cantilever.

17. An atomic force microscope comprising:

scanning mechanism;

a light source;

a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a fixed sample;

a stylus mounted on said cantilever;

an optical assembly comprising at least one steering lens, mounted on said scanning mechanism to guide a light beam emitted from said light source on the cantilever and to follow substantially a fixed point on said cantilever during movement of said scanning mechanism; and

position detector which receives a reflected light beam from said cantilever and detects a deflection of said cantilever;

wherein said position detector is located at a point where light beams reflected from said cantilever converge when said cantilever is undeflected during a full extent of movement of said scanning mechanism so that said position detector is substantially sensitive to a deflection motion of said cantilever rather than a scanning motion of said cantilever.

18. An atomic force microscope as recited in claim 17, further comprising:

second position detector; and

a beam splitter for directing a portion of light beams reflected from said cantilever onto said second position detector, so that the detector is sensitive to the scanning motion of the cantilever.

19. An atomic force microscope as recited in claim 17, further comprising a relay lens mounted between said cantilever and said position detector for relaying light beams reflected from said cantilever, such that said point is translated to an alternate location.

20. An atomic force microscope as recited in claim 17, further comprising a relay mirror mounted between said cantilever and said position detector for relaying light beams reflected from said cantilever to a desired location.

21. An atomic force microscope, comprising:

a scanning mechanism;

light source;

a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a fixed sample;

a stylus mounted on said cantilever;

an optical assembly comprising at least one steering lens, mounted on said scanning mechanism to guide a light beam emitted from said light source on the cantilever and to follow substantially a fixed point on said cantilever during movement of said scanning mechanism; and

position detector which receives a reflected light beam from said cantilever and detects a deflection of said cantilever;

wherein said position detector is located at or near a point where a minimum deflection is measured when said cantilever is undeflected and scanned over a full extent of movement of said scanning mechanism.

22. A method of operating a scanning probe microscope having a scanning mechanism, a light source, a cantilever and an optical assembly comprising at least one steering lens or steering mirrors attached to said scanning mechanism, and a position detector, comprising:

generating a light beam;

directing and focusing said light beam onto said cantilever using said optical assembly so that said light beam strikes a substantially fixed point on said cantilever during movement of said scanning mechanism; and

receiving a reflected light beam reflected from said cantilever using said position detector to detect a deflection of said cantilever;

wherein said directing step comprises:

forming a point source between a fixed end and a free end of said scanning mechanism.

23. A method as recited in claim 22, further comprising:

splitting said light beam into a first beam which strikes said cantilever and a second beam which is directed to a second position detector, wherein said second beam and second position detector are used to measure, calibrate, or correct motion of the scanning mechanism.

24. A method as recited in claim 22, wherein said directing step further comprises:

focusing an image of said point source on said cantilever.

25. A method as recited in claim 22, further comprising:

moving a lateral position of said point source while maintaining a substantially fixed vertical position of said point source while scanning said scanning mechanism.

26. A method as recited in claim 24, wherein said optical assembly comprises a focus lens, and a steering lens mounted on said scanning mechanism, said point source being formed between said focus lens and said steering lens, a distance between said steering lens and said image being y.sub.1, and a distance between said steering lens and said point source being y.sub.0, said method further comprising:

scanning said cantilever;

moving said optical assembly a distance .DELTA.o during said scanning;

moving said image a distance .DELTA.i during said scanning;

defining a magnification of said optical assembly as M.sub.l =y.sub.1 /y.sub.0 ; and

selecting a mechanical magnification M.sub.s =.DELTA.i/.DELTA.o=1+M.sub.l.

27. A method of operating a scanning probe microscope having a scanning mechanism, a light source, a cantilever and an optical assembly comprising at least one steering lens or steering mirrors attached to said scanning mechanism, and a position detector, comprising:

generating a light beam;

directing and focusing said light beam onto said cantilever using said optical assembly so that said light beam strikes a substantially fixed point on said cantilever during movement of said scanning mechanism;

receiving a reflected light beam reflected from said cantilever using said position detector to detect a deflection of said cantilever; and

locating said position detector at a point where light beams reflected from said cantilever converge when said cantilever is undeflected during a full extent of scanning motion of said scanning mechanism.

28. A method as recited in claim 27, further comprising:

splitting said light beams reflected from said cantilever into a first beam which is directed to said position detector and a second beam which is directed to a second position detector, wherein said second beam and second position detector are used to measure, calibrate, or correct motion of the scanning mechanism.

29. A method of operating a scanning probe microscope having a scanning mechanism, a light source, a cantilever and an optical assembly comprising at least one steering lens or steering mirrors attached to said scanning mechanism, and a position detector, comprising:

generating a light beam;

directing and focusing said light beam onto said cantilever using said optical assembly so that said light beam strikes a substantially fixed point on said cantilever during movement of said scanning mechanism;

receiving a reflected light beam reflected from said cantilever using said position detector to detect a deflection of said cantilever;

determining a point where light beams reflected from said cantilever converge when said cantilever is undeflected during a full extent of movement of said scanning mechanism; and

relaying said light beams reflected from said cantilever to a desired position.

30. A method as recited in claim 29, further comprising using a relay lens to relay said light beams reflected from said cantilever, to generate said point at an additional alternative location.

31. A method as recited in claim 29, further comprising:

using a relay mirror to relay said light beams reflected from said cantilever, to generate said point at an additional alternative location.

32. A method of operating a scanning probe microscope having a scanning mechanism, a light source, a cantilever and an optical assembly comprising at least one steering lens or steering mirrors attached to said scanning mechanism, and a position detector, comprising:

generating a light beam;

directing and focusing said light beam onto said cantilever using said optical assembly so that said light beam strikes a substantially fixed point on said cantilever during movement of said scanning mechanism;

receiving a reflected light beam reflected from said cantilever using said position detector to detect a deflection of said cantilever;

measuring a change in said reflected light beam when said cantilever is undeflected and scanned over a full extent of said scanning mechanism; and

locating said position detector at a point where said change is a minimum.

33. An atomic force microscope, comprising:

a scanning mechanism;

a light source;

a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a fixed sample;

a stylus mounted on said cantilever;

an optical assembly comprising at least one steering lens, mounted on said scanning mechanism to guide a light beam emitted from said light source on the cantilever and to follow substantially a fixed point on said cantilever during movement of said scanning mechanism; and

a position detector which receives a reflected light beam from said cantilever and detects a deflection of said cantilever;

wherein said scanning mechanism comprises:

at least one piezoelectric, electrostrictive, magnetostrictive or similar scanning device; and

a mounting member with an asymmetric cutout attached to said scanning mechanism, said cantilever being attached to said mounting member;

said asymmetric cutout providing optical and mechanical access to allow at least one of insertion of at least one optical elements to provide viewing of at least one of the cantilever and the sample with an optical microscope, and an optical path for said reflected light beam from said cantilever.

34. An atomic force microscope as recited in claim 33, wherein said mounting member is made of piezoelectric material.

35. An atomic force microscope as recited in claim 34, wherein said mirror is mounted on said scanning mechanism such that, during movement of said scanning mechanism, the light beam reflected off said mirror will strike substantially a fixed spot on said cantilever, or track the motion of said cantilever in one direction.

36. An atomic force microscope, comprising:

a scanning mechanism;

a light source not moved by the scanning mechanism;

a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a fixed sample;

a stylus mounted on said cantilever;

an first optical assembly consisting of at least one lens to focus a light beam emitted from said light source and a second optical assembly containing at least one mirror, mounted on and translated by said scanning mechanism to steer said focused light beam to follow substantially a fixed point on said moving cantilever during movement of said scanning mechanism; and

a position detector which receives a reflected light beam from said cantilever and detects a deflection of said moving cantilever.

37. An atomic force microscope as recited in claim 36, wherein said position detector is located at an optimal position where all light beams reflected from said cantilever converge when said cantilever is undeflected during a full extent of movement of said scanning mechanism so that the position detector is substantially sensitive to a deflection motion of the cantilever rather than to a scanning motion of said cantilever.

38. An atomic force microscope as recited in claim 36, wherein said position sensitive detector is located at or near a point where a minimum deflection is measured when said cantilever is undeflected and scanned over a full extent of movement of said scanning mechanism.

39. An atomic force microscope, comprising:

a scanning assembly;

a light source;

a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a fixed sample;

a stylus mounted on said cantilever;

means to focus a light beam emitted from said light source on the cantilever; and

a position detector which receives a reflected light beam from said cantilever and detects a deflection of said scanning cantilever;

said scanning assembly comprising at least one translating element having at least one asymmetric cutout.

40. A scanner as recited in claim 39, where said asymmetric cutout is occupied by at least one optical elements to allow viewing of at least one of the atomic force microscope and said cantilever with an optical microscope.

41. A scanner as recited in claim 39, where said asymmetric cutout provides an optical path for the light beam reflected from the cantilever to reach said position detector.