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Electrophotographic photosensitive member and method of manufacturing the same
   
Document Number
US Patent 5480754
Issued Date
January 2, 1996
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Abstract
A method for manufacturing an electrophotographic photosensitive member capable of providing high quality even images, which are completely free from image defects and unevenness of image density, which comprises a step for forming a non-monocrystalline deposited film comprising silicon atoms and hydrogen atoms and/or fluorine atoms on an aluminum substrate containing a fine quantity of silicon atoms by a plasma CVD method, wherein the surface of the substrate is cleaned with water in which carbon dioxide has been dissolved before a process for forming the deposited film.
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Number of Claims:
92
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Owner
Published
January 2, 1996
Application Number
08/215,644
Filed
March 22, 1994
US Classification
430/65   430/131
Int'l Classification
G03G   5/05   (20060101)   G03G   5/10   (20060101)   G03G   5/082   (20060101)  
Examiner
Priority Data
Mar 23, 1993 [JP] 5-086872
USPTO Field of Search
430/128   430/127   430/65   430/131  
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