The invention is a method and apparatus for a pirani pressure sensor. The apparatus consists of a current supply and current receiving means affixed to a substrate. Bridging the current supply means and current receiving means is an electrically conductive polymer. The pirani pressure sensor may be made using conventional photolithographic techniques.
The present invention provides a pressure sensor. The pressure sensor comprises a substrate with several support structures attached to the substrate. The pressure sensor further includes a strut structure integrated with a heating element. The strut structure is engaged with the support structures so as to create an air gap between the heating element and the substrate. The heating element has an electrical resistance proportional to changes in air pressure in the air gap.
A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperature coefficient of resistance greater than 0.0035/.degree. C., the filament being subject to the vaporized organic or inorganic material; means for applying a current to the filament so that the temperature of the filament is less than 650.degree. C. so as not to degrade the molecular structure of the organic material; and a structure responsive to a change in resistance or a change in current to determine heat loss from the filament, which is a function of the pressure of the vaporized organic or inorganic material.
An improved Pirani gauge has a small-diameter wire sensing element, coplanar with a small-diameter wire compensating element, with two parallel flat thermally conductive plates spaced from the sensing and compensating elements. The sensing and compensating elements and their connections have the same physical dimensions, thermal properties and resistance properties. The connections have large thermal conductances to a uniform temperature region and the elements are located in the same vacuum environment. A DC heating current is used and confined to only the sensing element. A relatively small AC signal is used to sense bridge balance. A simplified three-dimensional pressure compensation formula provides accurate compensation while simplifying the collection of calibration data. The improved gauge provides significant advancements in Pirani gauge accuracy, production cost, and package size.
Method of printing with ultraviolet photosensitive resin-containing materials includes depositing at least one substance that includes an ultraviolet photosensitive resin on to a substrate, partially curing the substance by irradiating the substance with at least one ultraviolet light emitting device, and completely curing the substance. Substance curing system including a substrate, an applicator that deposits a substance that includes an ultraviolet photosensitive resin on to a substrate, and at least one ultraviolet light emitting device usable to irradiate the substance to partially cure and/or completely cure the substance.
Method of ejecting or depositing a substance includes depositing at least one substance that includes first and second photoinitiators onto a substrate, causing the first photoinitiator to react by irradiating the substance with at least one light, and causing the second photoinitiator to react by irradiating the substance with at least one light. Substance ejecting or depositing system including a substrate, an applicator that deposits a substance that includes first and second photoinitiators onto a substrate, and at least one light usable to irradiate the substance to cause the first and/or second photoinitiators to react.
