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SRAM cell with no PN junction between driver and load transistors and method of manufacturing the same
   
Document Number
US Patent 5635731
Issued Date
June 3, 1997
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Abstract
SRAM memory cells is provided with high resistance to soft error and no parasitic capacitance due to PN junction. SRAM memory cells comprises the load resister is a thin film transistor having a same conductive type as that of the driver transistor.
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SRAM cell with no PN junction between driver and load transistors and method of manufacturing the same - US Patent 5635731 Drawing
Drawing from US Patent 5635731
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Number of Claims:
10
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Published
June 3, 1997
Application Number
08/511,820
Filed
August 7, 1995
US Classification
257/67   257/756 257/903 257/904 257/E27.1 365/154 365/156
Int'l Classification
H01L   27/11   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Jan 23, 1995 [JP] 7-008162
USPTO Field of Search
257/67   257/69   257/377   257/384   257/755   257/756   257/903   257/904  
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