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Semiconductor device having diffraction grating
   
Document Number
US Patent 5663592
Issued Date
September 2, 1997
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Abstract
A semiconductor device has a substrate composed of a semiconductor which has one of sphalerite and diamond crystal structures. The substrate has a plane orientation inclined at 0.5.degree. to 15.degree. with respect to one of {111} and {110} planes indicated by Miller indices. A first semiconductor layer is formed on the substrate. The first semiconductor layer has a sawtooth-shaped first periodic structure consisting of one of the {111} and {110} planes indicated by the Miller indices and at least one plane indicated by another index. A second semiconductor layer is formed on the first semiconductor layer. The second semiconductor layer has a second periodic structure having a phase shifted from a phase of the first periodic structure.
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Semiconductor device having diffraction grating - US Patent 5663592 Drawing
Drawing from US Patent 5663592
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Number of Claims:
7
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Owner
Published
September 2, 1997
Application Number
08/504,487
Filed
July 20, 1995
US Classification
257/627   257/102 257/14 257/23 257/E29.07 257/E29.245 257/E33.003 372/45.01 372/46.01 372/50.11
Int'l Classification
H01L   29/12   (20060101)   H01L   29/66   (20060101)   H01L   29/775   (20060101)   H01L   29/02   (20060101)   H01S   5/32   (20060101)   H01S   5/34   (20060101)   H01L   33/00   (20060101)   H01S   5/12   (20060101)   H01S   5/00   (20060101)   H01S   5/30   (20060101)   H01S   5/10   (20060101)   H01S   5/183   (20060101)   H01S   5/02   (20060101)   H01S   5/187   (20060101)  
Examiner
Parent Case
This application is a continuation of application Ser. No. 08/103,208 filed Aug. 9, 1993, now abandoned.
Priority Data
Aug 10, 1992 [JP] 4-212690 Dec 25, 1992 [JP] 4-346308 Jul 27, 1993 [JP] 5-204700
USPTO Field of Search
372/44   372/45   372/46   257/14   257/15   257/22   257/23   257/24   257/627   257/628   257/102  
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Claims
Description
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