A unibody, monolithic, one-piece PBN plasma chamber for an MBE gas plasma source. The chamber has a cylindrical configuration with at least one effusion orifice and a gas inlet opening. The gas inlet opening is preferably communicatively connected to an elongated, tubular inlet member. The inlet member is preferably coupled to a liquid cooled gas source by an intermediary connection member which is preferably constructed of a refxactory metal. The chamber minimizes leakage and maximizes efficiency. A gas plasma source assembly and a method for making the chamber are also disclosed.
The object of the present invention is to provide a RF induction plasma source generating apparatus which generates a stabilized plasma and sustains the stabilized plasma by maintaining the plasma pressure from several hundreds Torr to several thousands Torr with attachment a buffer nozzle cap, upper metallic blocking films and lower metallic blocking films to a nozzle cap, plasma tube and RF induction coils, respectively for separating the plasma source generating apparatus from the chamber. To accomplish the object of the invention, the plasma source generating apparatus comprising PBN tube, RF induction coils, a nozzle, and a nozzle cap is characterized by a buffer nozzle cap for locating between the nozzle cap and the plasma tube and modulating the flow of the gas to modulate the difference between the chamber pressure and the plasma pressure; sealing films formed by sealing the lips of the buffer nozzle cap, the nozzle cap and the plasma tube for preventing the leakage of gas; and upper blocking films and lower blocking films for blocking the spread out of the RF electric field induced in the RF induction coils and converging the plasma source.
