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Thin film transistor with vertical channel adjacent sidewall of gate electrode and method of making
 
   
Document Number
US Patent 5723879
Issued Date
March 3, 1998
Link
Inventors
Cho; Seok Won (Chungcheongbuk-do,KR)
Map
Abstract
A thin film transistor and a method which forms a channel region (c), a lightly doped drain region (LDD) region and, optionally, an offset region (o), in a portion of a semiconductor layer which is adjacent a sidewall of the gate electrode without the use of photo masks, thereby increasing the permissible degree of miniaturization and improving production yield.
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Thin film transistor with vertical channel adjacent sidewall of gate electrode and method of making - US Patent 5723879 Drawing
Drawing from US Patent 5723879
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Number of Claims:
17
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Owner
Goldstar Electron Co., Ltd. (Chungcheongbuk-do,KR)
Published
March 3, 1998
Application Number
08/788,204
Filed
January 24, 1997
US Classification
257/60   257/E21.412 257/E21.414 257/E29.279 257/E29.299
Int'l Classification
H01L   29/786   (20060101)   H01L   29/66   (20060101)   H01L   21/336   (20060101)   H01L   21/02   (20060101)  
Examiner
Parent Case
This application is a continuation, of application Ser. No. 08/415,567 filed on Apr. 3, 1995, now abandoned which is a division of 28/296,172 filed Aug. 29, 1994 now U.S. Pat. No. 5,432,102.
Priority Data
May 12, 1994 [KR] 10411/1994
USPTO Field of Search
257/347   257/348   257/60  
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Claims
Description
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