A semiconductor light emitting device and a semiconductor laser device having an epitaxial growth layer composed of a III-V group nitride semiconductor. An AlN buffer layer, an n-type GaN intermediate layer, an n-type Al.sub.1-x Ga.sub.X N cladding layer, an In.sub.1-Y Ga.sub.Y N active layer and a p-type Al.sub.1-X Ga.sub.X N cladding layer, and a p-type GaN contact layer are successively formed on an n-type 6H--SiC substrate having a {0001} crystal growth plane. A p-side electrode is formed on the upper surface of the p-type GaN contact layer, and an n-side electrode is formed on the lower surface of the n-type 6H--SiC substrate, after which the n-type 6H--SiC substrate is cleaved along a {1120} plane to form a cavity facet.
A nitride semiconductor structure includes: a substrate having a growth surface, a convex portion and a concave portion being formed on the growth surface; and a nitride semiconductor film grown on the growth surface. A cavity is formed between the nitride semiconductor film and the substrate in the concave portion.
A semiconductor light emitting device of the present invention includes: a substrate; a light emitting layer; a semiconductor layer of a hexagonal first III-group nitride crystal; and a cladding layer of a second III-group nitride crystal. A stripe groove is provided in the semiconductor layer along a <1, 1, -2, 0> direction.
A semiconductor light emitting device of the present invention includes: a substrate; a light emitting layer; a semiconductor layer of a hexagonal first III-group nitride crystal; and a cladding layer of a second III-group nitride crystal. A stripe groove is provided in the semiconductor layer along a <1, 1, -2, 0> direction.
A process for producing a semiconductor light-emitting device, which comprises forming, on a substrate by crystal growth, a gallium nitride type compound semiconductor layer having a crystal face (0,0,0,1) which can be utilized as the end surface of an optical waveguide or as a cavity mirror surface.
A GaAlInBN systems semiconductor device is spaced apart from a substrate by a layer for reducing the propagation of a dislocation. This layer has a protrusion or protrusions, each having sidewalls on which a single crystal is exposed.
