A metal organic liquid precursor solution includes metal organic complexes dispersed in an ester solvent. The ester solvent has medium length carbon chains to prevent the precipitation of strongly electropositive metals in solution. A liquid precursor solution is used to make thin film metal oxides of uniform thickness and consistent quality.
The present invention relates to a method for producing an Sr--Bi--Ta or Nb-based composite alkoxide with the structure of an atomic arrangement controlled, having a metal atomic ratio of Sr:Bi:Ta or Nb=1:2:2, characterized in that an Sr alkoxide (Sr(OR).sub.2) prepared from an Sr metal is allowed to react with a Bi alkoxide (Bi(OR).sub.3) in alcohol to produce an Sr--Bi double alkoxide (Sr[Bi(OR).sub.4 ].sub.2), and subsequently the alkoxide is allowed to react with a Ta alkoxide (Ta(OR).sub.5) or an Nb alkoxide (Nb(OR).sub.5).
A ceramic layer, in particular having ferroelectric, dielectric or superconducting properties, uses compounds with a simple structure as precursors and only methanoic acid, acetic acid or propionic acid and, where appropriate, water as solvent.
An organic solvent-free process for deposition of metal oxide thin films is presented. The process includes aqueous solutions of necessary metal precursors and an aqueous solution of a water-soluble polymer. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films.
