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Process of fabricating field-emission type electron source, electron source fabricated thereby and element structure of electron source
 
   
Document Number
US Patent 5800233
Issued Date
September 1, 1998
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Abstract
A cathode is formed on a glass substrate by depositing nickel thereon, and silicon dioxide is allowed to accumulate on the cathode by sputtering to form an insulator film. Then, a gate electrode is provided on the insulator film by depositing nickel thereon. A hole is formed on the glass substrate by lithography to carry out patterning, and the gate electrode and the insulator film are selectively etched to create a hole for the formation of an emitter emitting electrons. Furthermore, nickel is stacked into the hole by deposition to form the emitter, and subsequently the emitter is covered with sulfur as a high vapor-pressure substance to form a high vapor-pressure substance layer.
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Number of Claims:
12
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Published
September 1, 1998
Application Number
08/599,315
Filed
February 9, 1996
US Classification
445/25   445/58
Int'l Classification
H01J   9/02   (20060101)  
Priority Data
Apr 03, 1995 [JP] 7-077800
USPTO Field of Search
445/50   445/58   445/25  
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