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Integrated circuits having mixed layered superlattice materials and precursor solutions for use in a process of making the same
   
Document Number
US Patent 5803961
Issued Date
September 8, 1998
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Inventors
Azuma; Masamichi (Colorado Springs, CO)
McMillan; Larry D. (Colorado Springs, CO)
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Abstract
Metal alkoxycarboxylate-based liquid precursor solutions are used to form electronic devices (100) that include mixed layered superlattice materials (112) of a type having discrete oxygen octahedral layers (124) and (128) collated with a superlattice-generator layer (116). The precursor solutions include a plurality of metal moieties in effective amounts for yielding the layered superlattice materials. These metal moieties are mixed to include an A/B portion capable of forming an A/B layer (124), a perovskite-like AB layer portion capable of forming a perovskite-like AB octahedral layer (128), and a superlattice-generator portion capable of forming the superlattice-generator layer (116). The precursors are deposited in liquid form upon a substrate and annealed to provide the layered superlattice materials.
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Integrated circuits having mixed layered superlattice materials and precursor solutions for use in a process of making the same - US Patent 5803961 Drawing
Drawing from US Patent 5803961
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Number of Claims:
23
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Owner
Symetrix Corporation (Colorado Springs, CO)
Published
September 8, 1998
Application Number
08/644,588
Filed
May 10, 1996
US Classification
106/287.18   106/287.19 257/E21.009 257/E21.01 257/E21.011 257/E21.272
Int'l Classification
H01L   21/316   (20060101)   C23C   18/00   (20060101)   C23C   18/12   (20060101)   H01L   21/02   (20060101)   H01L   21/314   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
This application is a division of U.S. application Ser. No. 08/406,374 filed 17 Mar. 1995, which is a continuation in part of U.S. application Ser. No. 07/965,190, filed 23 Oct. 1992.
USPTO Field of Search
106/287.18   106/287.19  
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