The invention provides a Bipolar structure such as a silicon controlled rectifier (SCR) that exhibits advantageously low triggering and holding voltages for use in high speed (e.g., 900 MHz->2 GHz) submicron ESD protection circuits for Bipolar/BiCMOS circuits. The Bipolar structure features a low shunt capacitance and a low series resistance on the input and output pins, allowing for the construction of ESD protection circuits having small silicon area and little to no impedance added in the signal path. In a preferred aspect of the invention, the SCR is assembled in the N-well of the Bipolar/BiCMOS device, as opposed to the P-substrate, as is customary in the prior art. A preferred aspect of the invention utilizes a Zener diode in combination with a resistor to control BSCR operation through the NPN transistor. The turn-on voltage of the Zener is selected so as to be comparable to the emitter-base breakdown voltage of the NPN structure, which is only slightly higher than the power supply voltage to ensure that the ESD protection circuit will not be triggered under normal circuit operation. A forward diode string can optionally be added in series with the Zener to increase circuit trigger voltage, particularly in instances where the power supply voltage exceeds the Zener breakdown voltage. During an ESD event, when pad voltage exceeds Zener breakdown voltage, the Zener breaks down, and current flows through an associated (polysilicon) resistor to trigger the NPN of the Bipolar SCR and thus activate the BSCR to conduct the High ESD current from the associated, protected circuit.
A transient negative voltage pump circuit pumps the ESD voltage to a negative voltage. The negative voltage with the ESD voltage are used for early triggering of an SCR structure on the integrated circuit. In one version of the present invention, a pn junction diode of the SCR device is used as part of the negative voltage pump circuit. This saves the layout area while improving the ESD performance. The present invention improves the ESD performance of an SCR ESD protection circuit which is used for protecting the power bus or an IC pin during an ESD event.
A semiconductor device has a PN junction between first and second regions of the device in which in the intended operation of the device reverse breakdown of the junction occurs. The first region is of lower impurity concentration than the second region and a first buried region of the same conductivity type as and of higher impurity concentration than the first region is provided in the first region adjacent to the junction. A second buried region of the same conductivity type as and of higher impurity concentration than the first buried region is provided in the first buried region and one of the first and second buried regions is formed with a plurality of separate regions of small area arranged so that reverse breakdown of the junction preferentially occurs through the second buried region.
A diode-triggered NPN ESD protection device includes a P-Base region enclosing the emitter region of the NPN transistor for enhancing the reliability of the ESD protection device. The incorporation of the P-Base region encourages bulk transistor action and inhibits surface transistor action such that the reliability of the protection device is enhanced. In another aspect of the present invention, a trigger voltage control method is applied to a diode-triggered ESD protection device to extend the periphery length of the p-n junction of the trigger diode without increasing the size of the protection device. By extending the periphery length of the p-n junction, the trigger current generated by the trigger diode is increased so that the trigger voltage for the ESD protection device can be lowered, providing effective ESD protection. The periphery length is extended by using a shaped periphery, such as a corrugated periphery or a perforated periphery.
An ESD protected semiconductor circuit and the ESD protection circuit. The protected circuit includes a terminal, a semiconductor device coupled to the terminal and an ESD protection circuit. The ESD protection circuit includes a substrate of a first conductivity type and has a surface. A first well of conductivity type opposite to the first conductivity type is disposed within the substrate and extends to the surface. A second well of the first conductivity type is disposed within the first well and is spaced from the substrate and extending to the surface. A third region of the opposite conductivity type is disposed within the second well and is spaced from the first well and extending to the surface. At least one of the substrate or the third region is coupled to the terminal.
Described are structures for a device with a controllable dummy layer which can provide a low controllable trigger voltage and can be used as a first triggered device in ESD protection networks. A controllable dummy layer diode is provided which is structured as a butting diode with a dummy polysilicon layer above the butting region. The dummy polysilicon layer functions as an STI block to remove the STI between the n+ and p+ regions of the diode. In one embodiment the diode has the function of a controllable gate with a punchthrough-like-trigger, in which a capacitor-couple circuit couples a portion of the ESD voltage into the gate of the diode to provide a gate voltage. By changing the channel length under the gate of the diode as well as the gate voltage, the reverse-biased voltage of the diode is readily adjusted to a predetermined
