A method of depositing a tin oxide film onto a heated substrate is provided, by chemical vapor deposition using a tetraalkyoxy tin compound. Further provided is a method for doping the film with platinum or palladium using a .beta.-diketonate precursor thereof.
A resistance heater for heating fluids including a fluid-permeable porous substrate. An electrically conductive porous thin film is deposited on the porous substrate. An electrical connector coupled to the thin film and adapted to provide an electrical circuit through said thin film to effect heating of said thin film in order to heat a fluid passing through the pours of the thin film and substrate. A method of making and using a resistance heater is also disclosed.
Ti, Zr Hf and La precursors for use in MOCVD techniques have a ligand of the general formula OCR.sup.1(R.sup.2)CH.sub.2X, wherein R.sup.1 is H or an alkyl group, R.sup.2 is an optionally substituted alkyl group and X is selected from OR and NR.sub.2, wherein R is an alkyl group or a substituted alkyl group.
