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Optical system for stereoscopically measuring feature heights based on lateral image offsets
   
Document Number
US Patent 5832107
Issued Date
November 3, 1998
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Abstract
Two stereoscopic images of the surface of an inspected object are projected by two different lens systems to two separate video cameras for recording thereby and for display via a CPU on a 3D monitor. The optical axes of the two lens systems are equiangularly spaced from a central Z axis extending normal to the object plane, so that the height of a feature on the surface of the workpice may be calculated by determining the difference in the amount of lateral offset in the X direction from the center of a displayed image of a given feature as shown in one of the displayed images from the amount of its corresponding lateral offset in the other image, and then calculating Z in accordance with the formula Z=the difference in the offset in the X direction divided by twice the tangent of the angle of inclination of a respective viewing axis relative to the Z axis. Alternatively, the two images may be superimposed to form a stereoscopic image, and the two lens systems are shifted on the Z axis until the slight offset images of the feature coincide.
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Optical system for stereoscopically measuring feature heights based on lateral image offsets - US Patent 5832107 Drawing
Drawing from US Patent 5832107
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Number of Claims:
11
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Owner
Published
November 3, 1998
Application Number
08/699,436
Filed
September 19, 1996
US Classification
382/154   356/613
Int'l Classification
G01B   11/245   (20060101)   G01B   11/30   (20060101)   G01B   11/24   (20060101)   G01B   11/25   (20060101)   H04N   13/00   (20060101)  
Examiner
Assistant Examiner
USPTO Field of Search
382/106   382/108   382/153   382/154   382/162   382/164   382/294   356/11   356/12   356/22   356/376   356/390   359/464   359/462   348/128   348/139   348/159   250/559.23   250/559.31   250/559.46  
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